SG11202106419XA - Method of fabricating a device comprising a membrane overhanging a cavity - Google Patents
Method of fabricating a device comprising a membrane overhanging a cavityInfo
- Publication number
- SG11202106419XA SG11202106419XA SG11202106419XA SG11202106419XA SG11202106419XA SG 11202106419X A SG11202106419X A SG 11202106419XA SG 11202106419X A SG11202106419X A SG 11202106419XA SG 11202106419X A SG11202106419X A SG 11202106419XA SG 11202106419X A SG11202106419X A SG 11202106419XA
- Authority
- SG
- Singapore
- Prior art keywords
- fabricating
- cavity
- overhanging
- membrane
- membrane overhanging
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/00158—Diaphragms, membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0315—Cavities
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1873602A FR3090615B1 (en) | 2018-12-20 | 2018-12-20 | Method for manufacturing a device comprising a membrane overhanging a cavity |
| PCT/FR2019/053039 WO2020128245A1 (en) | 2018-12-20 | 2019-12-12 | Method for manufacturing a device comprising a membrane extending over a cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11202106419XA true SG11202106419XA (en) | 2021-07-29 |
Family
ID=66676725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11202106419XA SG11202106419XA (en) | 2018-12-20 | 2019-12-12 | Method of fabricating a device comprising a membrane overhanging a cavity |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US11939214B2 (en) |
| EP (1) | EP3898503A1 (en) |
| JP (1) | JP7368057B2 (en) |
| KR (1) | KR20210104823A (en) |
| CN (1) | CN113226978A (en) |
| FR (1) | FR3090615B1 (en) |
| SG (1) | SG11202106419XA (en) |
| TW (1) | TWI800699B (en) |
| WO (1) | WO2020128245A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3111628B1 (en) | 2020-06-18 | 2022-06-17 | Commissariat Energie Atomique | Method for manufacturing a microelectronic device comprising a membrane suspended above a cavity |
| FR3138657A1 (en) | 2022-08-08 | 2024-02-09 | Airmems | Multi-deformation MEMS switch and switch comprising one or more MEMS switches |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4214567B2 (en) * | 1997-08-05 | 2009-01-28 | 株式会社デンソー | Manufacturing method of semiconductor substrate for pressure sensor |
| JP3435665B2 (en) * | 2000-06-23 | 2003-08-11 | 株式会社村田製作所 | Composite sensor element and method of manufacturing the same |
| JP3782095B2 (en) | 2002-06-24 | 2006-06-07 | 松下電器産業株式会社 | Infrared sensor manufacturing method |
| DE102004027501A1 (en) * | 2004-06-04 | 2005-12-22 | Robert Bosch Gmbh | Micromechanical device with several caverns and manufacturing process |
| JP5497746B2 (en) * | 2009-04-17 | 2014-05-21 | 株式会社日立製作所 | Inertial sensor and manufacturing method thereof |
| JP5732203B2 (en) * | 2010-05-21 | 2015-06-10 | 日立オートモティブシステムズ株式会社 | Manufacturing method of composite sensor |
| JP5751332B2 (en) | 2011-08-25 | 2015-07-22 | 株式会社ニコン | Spatial light modulation element manufacturing method, spatial light modulation element, spatial light modulator, and exposure apparatus |
| WO2014142841A1 (en) | 2013-03-13 | 2014-09-18 | Illumina, Inc. | Multilayer fluidic devices and methods for their fabrication |
| JP2017106857A (en) * | 2015-12-11 | 2017-06-15 | ローム株式会社 | Semiconductor gas sensor, manufacturing method therefor, and sensor network system |
| DE102016113347A1 (en) * | 2016-07-20 | 2018-01-25 | Infineon Technologies Ag | METHOD FOR PRODUCING A SEMICONDUCTOR MODULE |
| KR102656824B1 (en) * | 2016-12-22 | 2024-04-11 | 일루미나, 인코포레이티드 | Flow cell package and method of manufacturing the same |
-
2018
- 2018-12-20 FR FR1873602A patent/FR3090615B1/en active Active
-
2019
- 2019-12-12 JP JP2021532882A patent/JP7368057B2/en active Active
- 2019-12-12 CN CN201980084624.7A patent/CN113226978A/en active Pending
- 2019-12-12 US US17/416,395 patent/US11939214B2/en active Active
- 2019-12-12 WO PCT/FR2019/053039 patent/WO2020128245A1/en unknown
- 2019-12-12 EP EP19842391.5A patent/EP3898503A1/en active Pending
- 2019-12-12 TW TW108145514A patent/TWI800699B/en active
- 2019-12-12 SG SG11202106419XA patent/SG11202106419XA/en unknown
- 2019-12-12 KR KR1020217022429A patent/KR20210104823A/en not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| US11939214B2 (en) | 2024-03-26 |
| TW202029289A (en) | 2020-08-01 |
| JP7368057B2 (en) | 2023-10-24 |
| TWI800699B (en) | 2023-05-01 |
| US20210387853A1 (en) | 2021-12-16 |
| FR3090615A1 (en) | 2020-06-26 |
| CN113226978A (en) | 2021-08-06 |
| JP2022513753A (en) | 2022-02-09 |
| FR3090615B1 (en) | 2020-12-11 |
| EP3898503A1 (en) | 2021-10-27 |
| WO2020128245A1 (en) | 2020-06-25 |
| KR20210104823A (en) | 2021-08-25 |
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