SG11202104299SA - Vertical probe head with improved contact properties towards a device under test - Google Patents

Vertical probe head with improved contact properties towards a device under test

Info

Publication number
SG11202104299SA
SG11202104299SA SG11202104299SA SG11202104299SA SG11202104299SA SG 11202104299S A SG11202104299S A SG 11202104299SA SG 11202104299S A SG11202104299S A SG 11202104299SA SG 11202104299S A SG11202104299S A SG 11202104299SA SG 11202104299S A SG11202104299S A SG 11202104299SA
Authority
SG
Singapore
Prior art keywords
under test
device under
probe head
improved contact
vertical probe
Prior art date
Application number
SG11202104299SA
Other languages
English (en)
Inventor
Stefano Felici
Original Assignee
Technoprobe Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technoprobe Spa filed Critical Technoprobe Spa
Publication of SG11202104299SA publication Critical patent/SG11202104299SA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
SG11202104299SA 2018-11-06 2019-11-05 Vertical probe head with improved contact properties towards a device under test SG11202104299SA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT102018000010071A IT201800010071A1 (it) 2018-11-06 2018-11-06 Testa di misura a sonde verticali con migliorate proprietà di contatto con un dispositivo di test
PCT/EP2019/080171 WO2020094608A1 (en) 2018-11-06 2019-11-05 Vertical probe head with improved contact properties towards a device under test

Publications (1)

Publication Number Publication Date
SG11202104299SA true SG11202104299SA (en) 2021-05-28

Family

ID=65409291

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202104299SA SG11202104299SA (en) 2018-11-06 2019-11-05 Vertical probe head with improved contact properties towards a device under test

Country Status (9)

Country Link
US (1) US20210255218A1 (it)
EP (1) EP3877768A1 (it)
JP (1) JP7470114B2 (it)
KR (1) KR20210089206A (it)
CN (1) CN113039444A (it)
IT (1) IT201800010071A1 (it)
PH (1) PH12021550959A1 (it)
SG (1) SG11202104299SA (it)
WO (1) WO2020094608A1 (it)

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6411112B1 (en) * 1998-02-19 2002-06-25 International Business Machines Corporation Off-axis contact tip and dense packing design for a fine pitch probe
JP3942823B2 (ja) * 2000-12-28 2007-07-11 山一電機株式会社 検査装置
FR2860347A1 (fr) * 2003-09-29 2005-04-01 Probest Connecteur electrique a au moins deux contacts
JP2007127488A (ja) * 2005-11-02 2007-05-24 Rika Denshi Co Ltd プローブカード
EP2107380A1 (en) * 2008-04-01 2009-10-07 Technoprobe S.p.A Testing head having vertical probes configured to improve the electric contact with a device to be tested
TWI435083B (zh) * 2010-07-27 2014-04-21 Mpi Corp Combination probe head for vertical probe card and its assembly alignment method
JP6305754B2 (ja) * 2013-12-20 2018-04-04 東京特殊電線株式会社 コンタクトプローブユニット
JP6619014B2 (ja) * 2015-01-04 2019-12-11 イル キム、 検査接触装置
SG11201707348QA (en) * 2015-03-13 2017-10-30 Technoprobe Spa Testing head with vertical probes, particularly for high frequency applications
WO2016156002A1 (en) * 2015-03-31 2016-10-06 Technoprobe S.P.A. Contact probe and corresponding testing head with vertical probes, particularly for high frequency applications
TWI702402B (zh) 2015-05-07 2020-08-21 義大利商探針科技公司 特別用於減少間距應用的具有垂直探針的測試頭
US10866266B2 (en) * 2015-10-29 2020-12-15 Taiwan Semiconductor Manufacturing Company Ltd. Probe head receiver and probe card assembly having the same
KR101886536B1 (ko) * 2016-12-27 2018-08-07 주식회사 텝스 접촉력을 조절할 수 있는 스트레이트 니들 프로브 카드

Also Published As

Publication number Publication date
CN113039444A (zh) 2021-06-25
KR20210089206A (ko) 2021-07-15
US20210255218A1 (en) 2021-08-19
EP3877768A1 (en) 2021-09-15
TW202022387A (zh) 2020-06-16
JP7470114B2 (ja) 2024-04-17
WO2020094608A1 (en) 2020-05-14
JP2022506377A (ja) 2022-01-17
PH12021550959A1 (en) 2021-11-29
IT201800010071A1 (it) 2020-05-06

Similar Documents

Publication Publication Date Title
SG11201707344SA (en) Testing head with vertical probes having an improved sliding movement within respective guide holes and correct holding of the probes within the testing head under different operative conditions
SG11201704433TA (en) Contact probe for testing head
SG11202006521VA (en) Cantilever contact probe and corresponding probe head
SG11201707342TA (en) Contact probe for a testing head
SG11202003931TA (en) Contact probe for a testing head for testing high-frequency devices
SG10201911114RA (en) Test apparatus
EP3758846C0 (en) DEVICE FOR CARRYING OUT ELECTRICAL MEASUREMENTS
EP3596429C0 (en) INTERFACE DEVICES FOR USE WITH IMPROVED FUNCTIONALITY MEASURING PROBE
SG11202006479PA (en) Cantilever probe head and corresponding contact probe
EP3548907A4 (en) CONTACT MOTORS, PROBE HEAD ASSEMBLIES, PROBE SYSTEMS AND RELATED WAFER TEST METHODS OF WIRELESS OPERATION OF A TESTED DEVICE
EP3814726C0 (de) Ultraschallsensoranordnung
SG11202106774PA (en) Vertical probe head having an improved contact with a device under test
EP4083457A4 (en) IMPACT TEST DEVICE
EP3164722A4 (en) A contact probe for a test device
GB201818581D0 (en) Test apparatus
SG11202002291TA (en) Test device
GB201809969D0 (en) Test apparatus
LT4058756T (lt) Padėties nustatymo prietaisas
EP3867595C0 (fr) Configuration d'un dispositif de controle non destructif
GB2611200B (en) Pad assembly for anthropomorphic test device
SG11202104299SA (en) Vertical probe head with improved contact properties towards a device under test
SG11202110914XA (en) Test device
IL277292A (en) measuring device
GB201914761D0 (en) Visual field test device
GB2586358B (en) Shape measurement device