SG11202008822YA - Method for producing a micromechanical device having inclined optical windows, and corresponding micromechanical device - Google Patents
Method for producing a micromechanical device having inclined optical windows, and corresponding micromechanical deviceInfo
- Publication number
- SG11202008822YA SG11202008822YA SG11202008822YA SG11202008822YA SG11202008822YA SG 11202008822Y A SG11202008822Y A SG 11202008822YA SG 11202008822Y A SG11202008822Y A SG 11202008822YA SG 11202008822Y A SG11202008822Y A SG 11202008822YA SG 11202008822Y A SG11202008822Y A SG 11202008822YA
- Authority
- SG
- Singapore
- Prior art keywords
- micromechanical device
- producing
- optical windows
- inclined optical
- micromechanical
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00317—Packaging optical devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0067—Packages or encapsulation for controlling the passage of optical signals through the package
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/01—Packaging MEMS
- B81C2203/0118—Bonding a wafer on the substrate, i.e. where the cap consists of another wafer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/03—Bonding two components
- B81C2203/032—Gluing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/03—Bonding two components
- B81C2203/033—Thermal bonding
- B81C2203/036—Fusion bonding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/05—Aligning components to be assembled
- B81C2203/052—Passive alignment, i.e. using only structural arrangements or thermodynamic forces without an internal or external apparatus
- B81C2203/054—Passive alignment, i.e. using only structural arrangements or thermodynamic forces without an internal or external apparatus using structural alignment aids, e.g. spacers, interposers, male/female parts, rods or balls
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102018207201.9A DE102018207201A1 (de) | 2018-05-09 | 2018-05-09 | Herstellungsverfahren für eine mikromechanische Vorrichtung mit geneigten optischen Fenstern und entsprechende mikromechanische Vorrichtung |
PCT/EP2019/055747 WO2019214867A1 (de) | 2018-05-09 | 2019-03-07 | Herstellungsverfahren für eine mikromechanische vorrichtung mit geneigten optischen fenstern und entsprechende mikromechanische vorrichtung |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202008822YA true SG11202008822YA (en) | 2020-10-29 |
Family
ID=65724406
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202008822YA SG11202008822YA (en) | 2018-05-09 | 2019-03-07 | Method for producing a micromechanical device having inclined optical windows, and corresponding micromechanical device |
Country Status (7)
Country | Link |
---|---|
US (1) | US11584640B2 (ja) |
JP (1) | JP7098755B2 (ja) |
CN (1) | CN112105580B (ja) |
DE (1) | DE102018207201A1 (ja) |
SG (1) | SG11202008822YA (ja) |
TW (1) | TWI825093B (ja) |
WO (1) | WO2019214867A1 (ja) |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1182422C (zh) | 2000-01-28 | 2004-12-29 | 精工爱普生株式会社 | 光反射型起偏镜及使用它的投影仪 |
US7303645B2 (en) * | 2003-10-24 | 2007-12-04 | Miradia Inc. | Method and system for hermetically sealing packages for optics |
KR100707179B1 (ko) | 2005-02-07 | 2007-04-13 | 삼성전자주식회사 | 광스캐너 패키지 및 그 제조방법 |
KR100667291B1 (ko) | 2005-07-27 | 2007-01-12 | 삼성전자주식회사 | 마이크로 미러 소자 패키지 및 그 제조방법 |
DE102008012826B4 (de) * | 2007-04-02 | 2012-11-15 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Erzeugung einer dreidimensionalen mikromechanischen Struktur aus zweidimensionalen Elementen und mikromechanisches Bauelement |
DE102008040528B4 (de) | 2008-07-18 | 2018-11-08 | Robert Bosch Gmbh | Herstellungsverfahren für ein mikromechanisches Bauteil und ein mikromechanisches Bauteil |
DE102010062009B4 (de) * | 2010-11-26 | 2019-07-04 | Robert Bosch Gmbh | Verfahren zum Herstellen von Schrägflächen in einem Substrat und Wafer mit Schrägfläche |
DE102010062118B4 (de) | 2010-11-29 | 2018-09-27 | Robert Bosch Gmbh | Herstellungsverfahren für eine Abdeckvorrichtung für ein mikro-opto-mechanisches Bauteil |
DE102012206858B4 (de) | 2012-04-25 | 2021-05-20 | Robert Bosch Gmbh | Verfahren zum Herstellen einer optischen Fenstervorrichtung für eine MEMS-Vorrichtung |
DE102013211886A1 (de) * | 2013-06-24 | 2014-12-24 | Robert Bosch Gmbh | Fensterbestückte Abdeckung für eine optische Vorrichtung und Herstellungsverfahren zum Herstellen einer fensterbestückten Abdeckung für eine optische Vorrichtung |
DE102014202830B4 (de) * | 2014-02-17 | 2022-10-06 | Robert Bosch Gmbh | Herstellungsverfahren für einen mit transparenten Platten bestückten Wafer |
US9850124B2 (en) * | 2015-10-27 | 2017-12-26 | Advanced Semiconductor Engineering, Inc. | Semiconductor device package for reducing parasitic light and method of manufacturing the same |
DE102016105440A1 (de) * | 2016-03-23 | 2017-09-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung optischer Komponenten unter Verwendung von Funktionselementen |
DE102016216918A1 (de) * | 2016-09-07 | 2018-03-08 | Robert Bosch Gmbh | Herstellungsverfahren für eine mikromechanische Vorrichtung mit einem geneigten optischen Fenster und entsprechende mikromechanische Vorrichtung |
DE102018211548A1 (de) * | 2018-07-11 | 2020-01-16 | Robert Bosch Gmbh | Herstellungsverfahren für eine mikromechanische Vorrichtung mit geneigten optischen Fenstern und mikromechanische Vorrichtung mit geneigten optischen Fenstern |
-
2018
- 2018-05-09 DE DE102018207201.9A patent/DE102018207201A1/de active Pending
-
2019
- 2019-03-07 JP JP2020562720A patent/JP7098755B2/ja active Active
- 2019-03-07 WO PCT/EP2019/055747 patent/WO2019214867A1/de active Application Filing
- 2019-03-07 US US16/968,358 patent/US11584640B2/en active Active
- 2019-03-07 CN CN201980031200.4A patent/CN112105580B/zh active Active
- 2019-03-07 SG SG11202008822YA patent/SG11202008822YA/en unknown
- 2019-05-07 TW TW108115703A patent/TWI825093B/zh active
Also Published As
Publication number | Publication date |
---|---|
CN112105580A (zh) | 2020-12-18 |
CN112105580B (zh) | 2024-04-16 |
TW201946864A (zh) | 2019-12-16 |
JP2021523024A (ja) | 2021-09-02 |
US11584640B2 (en) | 2023-02-21 |
TWI825093B (zh) | 2023-12-11 |
DE102018207201A1 (de) | 2019-11-14 |
WO2019214867A1 (de) | 2019-11-14 |
US20200391998A1 (en) | 2020-12-17 |
JP7098755B2 (ja) | 2022-07-11 |
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