SG11202006417XA - Sputtering target and magnetic film - Google Patents

Sputtering target and magnetic film

Info

Publication number
SG11202006417XA
SG11202006417XA SG11202006417XA SG11202006417XA SG11202006417XA SG 11202006417X A SG11202006417X A SG 11202006417XA SG 11202006417X A SG11202006417X A SG 11202006417XA SG 11202006417X A SG11202006417X A SG 11202006417XA SG 11202006417X A SG11202006417X A SG 11202006417XA
Authority
SG
Singapore
Prior art keywords
sputtering target
magnetic film
magnetic
film
sputtering
Prior art date
Application number
SG11202006417XA
Inventor
Yasuyuki Iwabuchi
Manami Masuda
Takashi Kosho
Original Assignee
Jx Nippon Mining & Metals Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jx Nippon Mining & Metals Corp filed Critical Jx Nippon Mining & Metals Corp
Publication of SG11202006417XA publication Critical patent/SG11202006417XA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material
    • H01J37/3429—Plural materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/12—Both compacting and sintering
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/0433—Nickel- or cobalt-based alloys
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/05—Mixtures of metal powder with non-metallic powder
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C19/00—Alloys based on nickel or cobalt
    • C22C19/07—Alloys based on nickel or cobalt based on cobalt
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
    • C22C27/06—Alloys based on chromium
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C30/00—Alloys containing less than 50% by weight of each constituent
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C5/00—Alloys based on noble metals
    • C22C5/04—Alloys based on a platinum group metal
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
    • G11B5/658—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing oxygen, e.g. molecular oxygen or magnetic oxide
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851—Coating a support with a magnetic layer by sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
    • H01F10/16—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys containing cobalt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
    • H01F41/183—Sputtering targets therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2201/00—Treatment under specific atmosphere
    • B22F2201/20—Use of vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10—Sintering only
    • B22F3/1017—Multiple heating or additional steps

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Magnetic Record Carriers (AREA)
SG11202006417XA 2018-08-09 2019-05-23 Sputtering target and magnetic film SG11202006417XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018150676 2018-08-09
PCT/JP2019/020558 WO2020031461A1 (en) 2018-08-09 2019-05-23 Sputtering target and magnetic film

Publications (1)

Publication Number Publication Date
SG11202006417XA true SG11202006417XA (en) 2020-08-28

Family

ID=69414658

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202006417XA SG11202006417XA (en) 2018-08-09 2019-05-23 Sputtering target and magnetic film

Country Status (6)

Country Link
US (1) US11894221B2 (en)
JP (1) JP7153729B2 (en)
CN (1) CN111566253B (en)
SG (1) SG11202006417XA (en)
TW (1) TWI727322B (en)
WO (1) WO2020031461A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI727322B (en) * 2018-08-09 2021-05-11 日商Ｊｘ金屬股份有限公司 Sputtering target and magnetic film

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60228637A (en) 1984-04-25 1985-11-13 Toshiba Corp Co alloy for magnetic recording medium
US5652054A (en) * 1994-07-11 1997-07-29 Kabushiki Kaisha Toshiba Magnetic recording media having a magnetic thin film made of magnetic metals grains and nonmagnetic matrix
JP2001256631A (en) 2000-01-05 2001-09-21 Naruse Atsushi Magnetic recording medium and method of manufacturing the same
CN100450783C (en) * 2004-08-31 2009-01-14 株式会社理光 Write-onece-read-many optical recording medium and its sputtering target
JP2006155861A (en) 2004-10-29 2006-06-15 Showa Denko Kk Perpendicular magnetic recording medium, production process thereof, and magnetic recording and reproducing apparatus
JP4377861B2 (en) * 2005-07-22 2009-12-02 株式会社神戸製鋼所 Ag alloy reflecting film for optical information recording medium, optical information recording medium, and Ag alloy sputtering target for forming Ag alloy reflecting film for optical information recording medium
US7488526B2 (en) * 2005-11-22 2009-02-10 Ricoh Company, Ltd. Sputtering target and manufacturing method therefor, and optical recording medium and manufacturing method therefor
JP2009090601A (en) 2007-10-11 2009-04-30 Kobe Steel Ltd Recording layer for optical information recording medium, optical information recording medium, and sputtering target
JP2011084804A (en) * 2009-09-18 2011-04-28 Kobelco Kaken:Kk Metal oxide-metal composite sputtering target
KR20120057629A (en) * 2009-09-18 2012-06-05 소니 주식회사 Recording layer for optical information recording medium, optical information recording medium, and sputtering target
JP2011174174A (en) 2010-01-26 2011-09-08 Mitsubishi Materials Corp Sputtering target for forming magnetic recording medium film, and method for producing the same
JP2011175725A (en) 2010-01-26 2011-09-08 Mitsubishi Materials Corp Sputtering target for forming magnetic recording medium film and method for manufacturing the same
JP5375707B2 (en) 2010-03-28 2013-12-25 三菱マテリアル株式会社 Sputtering target for forming a magnetic recording film and method for producing the same
JP5536540B2 (en) * 2010-05-26 2014-07-02 昭和電工株式会社 Magnetic recording medium and magnetic recording / reproducing apparatus
JP4885333B1 (en) 2010-09-03 2012-02-29 Ｊｘ日鉱日石金属株式会社 Ferromagnetic sputtering target
JP2012117147A (en) 2010-11-12 2012-06-21 Jx Nippon Mining & Metals Corp Sputtering target with remained cobalt oxide
JP5394575B2 (en) * 2010-12-17 2014-01-22 Ｊｘ日鉱日石金属株式会社 Ferromagnetic sputtering target
US20130213802A1 (en) 2010-12-22 2013-08-22 Jx Nippon Mining & Metals Corporation Sintered Compact Sputtering Target
JP5801496B2 (en) * 2013-03-12 2015-10-28 Jx日鉱日石金属株式会社 Sputtering target
JP6490589B2 (en) 2013-10-29 2019-03-27 田中貴金属工業株式会社 Target for magnetron sputtering
CN105917021B (en) * 2014-03-25 2018-04-17 捷客斯金属株式会社 Sb Te base alloy sinter sputtering targets
JP6284126B2 (en) 2014-12-15 2018-02-28 昭和電工株式会社 Vertical recording medium, vertical recording / reproducing apparatus
JP6626732B2 (en) * 2015-06-29 2019-12-25 山陽特殊製鋼株式会社 Sputtering target material
TWI727322B (en) 2018-08-09 2021-05-11 日商Ｊｘ金屬股份有限公司 Sputtering target and magnetic film
US11618944B2 (en) * 2018-08-09 2023-04-04 Jx Nippon Mining & Metals Corporation Sputtering target, magnetic film, and perpendicular magnetic recording medium
JPWO2020031459A1 (en) 2018-08-09 2021-08-02 Ｊｘ金属株式会社 Sputtering target, granular film and vertical magnetic recording medium

Also Published As

Publication number Publication date
JP7153729B2 (en) 2022-10-14
US20200357438A1 (en) 2020-11-12
JPWO2020031461A1 (en) 2021-08-26
WO2020031461A1 (en) 2020-02-13
TWI727322B (en) 2021-05-11
CN111566253B (en) 2023-06-27
TW202009307A (en) 2020-03-01
US11894221B2 (en) 2024-02-06
CN111566253A (en) 2020-08-21

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