SG11201906523QA - Ferromagnetic material sputtering target - Google Patents

Ferromagnetic material sputtering target

Info

Publication number
SG11201906523QA
SG11201906523QA SG11201906523QA SG11201906523QA SG11201906523QA SG 11201906523Q A SG11201906523Q A SG 11201906523QA SG 11201906523Q A SG11201906523Q A SG 11201906523QA SG 11201906523Q A SG11201906523Q A SG 11201906523QA SG 11201906523Q A SG11201906523Q A SG 11201906523QA
Authority
SG
Singapore
Prior art keywords
sputtering target
ferromagnetic material
material sputtering
ferromagnetic
target
Prior art date
Application number
SG11201906523QA
Inventor
Shin-Ichi Ogino
Original Assignee
Jx Nippon Mining & Metals Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jx Nippon Mining & Metals Corp filed Critical Jx Nippon Mining & Metals Corp
Publication of SG11201906523QA publication Critical patent/SG11201906523QA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Powder Metallurgy (AREA)
SG11201906523QA 2018-09-11 2018-09-11 Ferromagnetic material sputtering target SG11201906523QA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2018/033698 WO2020053973A1 (en) 2018-09-11 2018-09-11 Ferromagnetic material sputtering target

Publications (1)

Publication Number Publication Date
SG11201906523QA true SG11201906523QA (en) 2020-04-29

Family

ID=69776659

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201906523QA SG11201906523QA (en) 2018-09-11 2018-09-11 Ferromagnetic material sputtering target

Country Status (5)

Country Link
JP (1) JPWO2020053973A1 (en)
CN (1) CN111183244B (en)
MY (1) MY191072A (en)
SG (1) SG11201906523QA (en)
WO (1) WO2020053973A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2021235380A1 (en) * 2020-05-18 2021-11-25

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5111320B2 (en) * 2008-10-03 2013-01-09 田中貴金属工業株式会社 Pd-Cr-W-based sputtering target and method for producing the same
JP2011174174A (en) * 2010-01-26 2011-09-08 Mitsubishi Materials Corp Sputtering target for forming magnetic recording medium film, and method for producing the same
MY150826A (en) * 2010-07-20 2014-02-28 Jx Nippon Mining & Metals Corp Sputtering target of perromagnetic material with low generation of particles
SG188601A1 (en) * 2010-12-09 2013-04-30 Jx Nippon Mining & Metals Corp Ferromagnetic material sputtering target
US20130213804A1 (en) * 2010-12-17 2013-08-22 Jx Nippon Mining & Metals Corporation Ferromagnetic material sputtering target
JP6305881B2 (en) * 2014-09-05 2018-04-04 Ｊｘ金属株式会社 Sputtering target for magnetic recording media

Also Published As

Publication number Publication date
WO2020053973A1 (en) 2020-03-19
JPWO2020053973A1 (en) 2020-10-22
CN111183244A (en) 2020-05-19
CN111183244B (en) 2022-03-08
MY191072A (en) 2022-05-30

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