SG11202004968SA - Plasma etching method and plasma etching apparatus - Google Patents
Plasma etching method and plasma etching apparatusInfo
- Publication number
- SG11202004968SA SG11202004968SA SG11202004968SA SG11202004968SA SG11202004968SA SG 11202004968S A SG11202004968S A SG 11202004968SA SG 11202004968S A SG11202004968S A SG 11202004968SA SG 11202004968S A SG11202004968S A SG 11202004968SA SG 11202004968S A SG11202004968S A SG 11202004968SA
- Authority
- SG
- Singapore
- Prior art keywords
- plasma etching
- etching method
- etching apparatus
- plasma
- etching
- Prior art date
Links
- 238000001020 plasma etching Methods 0.000 title 2
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2001—Maintaining constant desired temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
- H01L21/30655—Plasma etching; Reactive-ion etching comprising alternated and repeated etching and passivation steps, e.g. Bosch process
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Drying Of Semiconductors (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Semiconductor Memories (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017240333 | 2017-12-15 | ||
PCT/JP2018/045461 WO2019117130A1 (ja) | 2017-12-15 | 2018-12-11 | プラズマエッチング方法及びプラズマエッチング装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202004968SA true SG11202004968SA (en) | 2020-07-29 |
Family
ID=66820859
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202004968SA SG11202004968SA (en) | 2017-12-15 | 2018-12-11 | Plasma etching method and plasma etching apparatus |
Country Status (8)
Country | Link |
---|---|
US (1) | US11120999B2 (zh) |
EP (1) | EP3726567A4 (zh) |
JP (1) | JP6976352B2 (zh) |
KR (1) | KR20200094751A (zh) |
CN (1) | CN111527591A (zh) |
SG (1) | SG11202004968SA (zh) |
TW (1) | TWI809020B (zh) |
WO (1) | WO2019117130A1 (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7413093B2 (ja) * | 2019-07-18 | 2024-01-15 | キオクシア株式会社 | エッチング方法、半導体製造装置、および半導体装置の製造方法 |
JP7437966B2 (ja) | 2020-02-21 | 2024-02-26 | 東京エレクトロン株式会社 | エッチング方法及びエッチング装置 |
KR20240047769A (ko) | 2022-10-05 | 2024-04-12 | 충남대학교산학협력단 | 가스 펄싱을 이용한 원자층 식각 방법 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03138369A (ja) * | 1989-10-24 | 1991-06-12 | Sony Corp | 低温処理装置 |
JPH03263827A (ja) | 1990-03-14 | 1991-11-25 | Yasuhiro Horiike | デジタルエツチング装置 |
JPH03276719A (ja) * | 1990-03-27 | 1991-12-06 | Yasuhiro Horiike | デジタルエツチング方法 |
JPH05217949A (ja) * | 1992-02-07 | 1993-08-27 | Oki Electric Ind Co Ltd | ドライエッチング装置及びその方法 |
JPH07106305A (ja) * | 1993-10-06 | 1995-04-21 | Hitachi Ltd | 原子層エッチング装置 |
JP6032033B2 (ja) * | 2013-02-01 | 2016-11-24 | セントラル硝子株式会社 | シリコンのドライエッチング方法 |
JP6396699B2 (ja) | 2014-02-24 | 2018-09-26 | 東京エレクトロン株式会社 | エッチング方法 |
US9609730B2 (en) * | 2014-11-12 | 2017-03-28 | Lam Research Corporation | Adjustment of VUV emission of a plasma via collisional resonant energy transfer to an energy absorber gas |
JP6818402B2 (ja) | 2015-07-17 | 2021-01-20 | 株式会社日立ハイテク | プラズマ処理装置 |
JP6212092B2 (ja) * | 2015-10-02 | 2017-10-11 | 東京エレクトロン株式会社 | 基板処理システム、フォーカスリングの温度制御方法及び基板のエッチング方法 |
US10566212B2 (en) * | 2016-12-19 | 2020-02-18 | Lam Research Corporation | Designer atomic layer etching |
US10134600B2 (en) * | 2017-02-06 | 2018-11-20 | Lam Research Corporation | Dielectric contact etch |
-
2018
- 2018-12-11 SG SG11202004968SA patent/SG11202004968SA/en unknown
- 2018-12-11 KR KR1020207016218A patent/KR20200094751A/ko not_active Application Discontinuation
- 2018-12-11 CN CN201880078824.7A patent/CN111527591A/zh active Pending
- 2018-12-11 US US16/770,084 patent/US11120999B2/en active Active
- 2018-12-11 WO PCT/JP2018/045461 patent/WO2019117130A1/ja unknown
- 2018-12-11 JP JP2019559649A patent/JP6976352B2/ja active Active
- 2018-12-11 EP EP18889001.6A patent/EP3726567A4/en active Pending
- 2018-12-14 TW TW107145219A patent/TWI809020B/zh active
Also Published As
Publication number | Publication date |
---|---|
KR20200094751A (ko) | 2020-08-07 |
TWI809020B (zh) | 2023-07-21 |
CN111527591A (zh) | 2020-08-11 |
US11120999B2 (en) | 2021-09-14 |
JP6976352B2 (ja) | 2021-12-08 |
EP3726567A1 (en) | 2020-10-21 |
EP3726567A4 (en) | 2021-08-25 |
US20200381264A1 (en) | 2020-12-03 |
TW201931465A (zh) | 2019-08-01 |
WO2019117130A1 (ja) | 2019-06-20 |
JPWO2019117130A1 (ja) | 2021-02-18 |
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