SG11202004931PA - Storage device - Google Patents

Storage device

Info

Publication number
SG11202004931PA
SG11202004931PA SG11202004931PA SG11202004931PA SG11202004931PA SG 11202004931P A SG11202004931P A SG 11202004931PA SG 11202004931P A SG11202004931P A SG 11202004931PA SG 11202004931P A SG11202004931P A SG 11202004931PA SG 11202004931P A SG11202004931P A SG 11202004931PA
Authority
SG
Singapore
Prior art keywords
storage device
storage
Prior art date
Application number
SG11202004931PA
Other languages
English (en)
Inventor
Minoru Mizutani
Masafumi Hayakawa
Hiroyasu Tomita
Masataka Hayashi
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of SG11202004931PA publication Critical patent/SG11202004931PA/en

Links

Classifications

    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47B—TABLES; DESKS; OFFICE FURNITURE; CABINETS; DRAWERS; GENERAL DETAILS OF FURNITURE
    • A47B49/00—Revolving cabinets or racks; Cabinets or racks with revolving parts
    • A47B49/008—Revolving cabinets or racks; Cabinets or racks with revolving parts with motorisation means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47B—TABLES; DESKS; OFFICE FURNITURE; CABINETS; DRAWERS; GENERAL DETAILS OF FURNITURE
    • A47B49/00—Revolving cabinets or racks; Cabinets or racks with revolving parts
    • A47B49/004—Cabinets with compartments provided with trays revolving on a vertical axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/12—Storage devices mechanical with separate article supports or holders movable in a closed circuit to facilitate insertion or removal of articles the articles being books, documents, forms or the like
    • B65G1/133—Storage devices mechanical with separate article supports or holders movable in a closed circuit to facilitate insertion or removal of articles the articles being books, documents, forms or the like the circuit being confined in a horizontal plane
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J50/00—Circuit arrangements or systems for wireless supply or distribution of electric power
    • H02J50/10—Circuit arrangements or systems for wireless supply or distribution of electric power using inductive coupling
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J50/00—Circuit arrangements or systems for wireless supply or distribution of electric power
    • H02J50/70—Circuit arrangements or systems for wireless supply or distribution of electric power involving the reduction of electric, magnetic or electromagnetic leakage fields

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mechanical Engineering (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Library & Information Science (AREA)
  • Electromagnetism (AREA)
  • Charge And Discharge Circuits For Batteries Or The Like (AREA)
  • Warehouses Or Storage Devices (AREA)
SG11202004931PA 2017-11-27 2018-10-29 Storage device SG11202004931PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017226460 2017-11-27
PCT/JP2018/040063 WO2019102795A1 (fr) 2017-11-27 2018-10-29 Dispositif de stockage

Publications (1)

Publication Number Publication Date
SG11202004931PA true SG11202004931PA (en) 2020-06-29

Family

ID=66631582

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202004931PA SG11202004931PA (en) 2017-11-27 2018-10-29 Storage device

Country Status (8)

Country Link
US (1) US11533991B2 (fr)
EP (1) EP3718930B1 (fr)
JP (1) JP6895133B2 (fr)
KR (1) KR102380467B1 (fr)
CN (1) CN111372873B (fr)
SG (1) SG11202004931PA (fr)
TW (1) TWI760579B (fr)
WO (1) WO2019102795A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102389318B1 (ko) * 2020-10-16 2022-04-21 우성엔씨주식회사 공간활용성이 증대된 무동력 스토커 시스템

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR930002562B1 (ko) 1986-11-20 1993-04-03 시미즈 겐세쯔 가부시끼가이샤 클린룸내에서 사용되는 방진저장 캐비넷장치
ES2130295T3 (es) 1989-10-20 1999-07-01 Applied Materials Inc Aparato de tipo robot.
JPH0738407B2 (ja) 1989-12-28 1995-04-26 株式会社荏原製作所 保管庫
KR930002562A (ko) * 1991-07-04 1993-02-23 정진수 극소 장력 단절 검출장치
JPH1143223A (ja) * 1997-07-24 1999-02-16 Dainippon Screen Mfg Co Ltd 基板搬送装置
JP2987148B1 (ja) * 1999-01-26 1999-12-06 国際電気株式会社 基板処理装置
US6374748B1 (en) * 1999-10-28 2002-04-23 Murata Kikai Kabushiki Kaisha Tracking cart system
US6632068B2 (en) * 2000-09-27 2003-10-14 Asm International N.V. Wafer handling system
JP2002171698A (ja) 2000-11-30 2002-06-14 Itoki Crebio Corp 搬送車の給電装置
EP1354028B1 (fr) * 2001-01-26 2007-09-19 Liconic Ag Armoire de stockage climatisee
CH695872A5 (de) 2002-07-29 2006-09-29 Brooks Pri Automation Switzerl Reticle-Handhabungsvorrichtung.
US8167522B2 (en) 2005-03-30 2012-05-01 Brooks Automation, Inc. Substrate transport apparatus with active edge gripper
US7197113B1 (en) 2005-12-01 2007-03-27 General Electric Company Contactless power transfer system
KR101474572B1 (ko) 2006-06-19 2014-12-18 엔테그리스, 아이엔씨. 레티클 스토리지 정화시스템
JP5331687B2 (ja) 2006-07-26 2013-10-30 テック・セム アーゲー 基板を処理することによる電子部品の製造における対象物用保存装置
JP4215079B2 (ja) 2006-07-31 2009-01-28 村田機械株式会社 クリーンストッカと物品の保管方法
JP5501375B2 (ja) * 2009-01-11 2014-05-21 アプライド マテリアルズ インコーポレイテッド ロボットおよびロボットの電気エンドエフェクタに電気的に接続するシステム、装置、および方法
US8759084B2 (en) * 2010-01-22 2014-06-24 Michael J. Nichols Self-sterilizing automated incubator
JP2011169043A (ja) * 2010-02-19 2011-09-01 Toyota Industries Corp 自動車用自動倉庫及び非接触充電用アダプタ
JP5655860B2 (ja) * 2010-10-26 2015-01-21 村田機械株式会社 搬送システム
EP2727859A4 (fr) 2011-06-28 2015-01-21 Murata Machinery Ltd Dispositif d'emmagasinage et procédé d'emmagasinage
JP2013110805A (ja) * 2011-11-18 2013-06-06 Nec Corp 非接触給電システム及び給電方法
JP5965148B2 (ja) * 2012-01-05 2016-08-03 日東電工株式会社 無線電力伝送を用いたモバイル端末用受電モジュール及び当該モバイル端末用受電モジュールを備えたモバイル端末用充電池
JP6310258B2 (ja) * 2014-01-16 2018-04-11 矢崎総業株式会社 スライドシートの給電機構
WO2015108152A1 (fr) * 2014-01-20 2015-07-23 日立オートモティブシステムズ株式会社 Dispositif d'alimentation d'énergie sans contact de corps rotatif et capteur de couple
JP6428575B2 (ja) * 2015-11-18 2018-11-28 株式会社ダイフク 搬送設備

Also Published As

Publication number Publication date
TWI760579B (zh) 2022-04-11
TW201936468A (zh) 2019-09-16
KR102380467B1 (ko) 2022-04-01
JPWO2019102795A1 (ja) 2020-11-19
US20210076817A1 (en) 2021-03-18
JP6895133B2 (ja) 2021-06-30
EP3718930A4 (fr) 2021-08-11
CN111372873A (zh) 2020-07-03
CN111372873B (zh) 2021-05-25
KR20200047656A (ko) 2020-05-07
EP3718930A1 (fr) 2020-10-07
US11533991B2 (en) 2022-12-27
WO2019102795A1 (fr) 2019-05-31
EP3718930B1 (fr) 2023-08-02

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