SG11201908148VA - Recovering spectral shape from spatial output - Google Patents

Recovering spectral shape from spatial output

Info

Publication number
SG11201908148VA
SG11201908148VA SG11201908148VA SG11201908148VA SG 11201908148V A SG11201908148V A SG 11201908148VA SG 11201908148V A SG11201908148V A SG 11201908148VA SG 11201908148V A SG11201908148V A SG 11201908148VA
Authority
SG
Singapore
Prior art keywords
international
light beam
spatial
thornmint
court
Prior art date
Application number
Other languages
English (en)
Inventor
Brian Edward King
Original Assignee
Cymer LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cymer LLC filed Critical Cymer LLC
Publication of SG11201908148VA publication Critical patent/SG11201908148VA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G01J2003/2806—Array and filter array

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Prostheses (AREA)
  • Lasers (AREA)
SG11201908148V 2017-04-09 2018-04-02 Recovering spectral shape from spatial output SG11201908148VA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201762483423P 2017-04-09 2017-04-09
US15/651,935 US10288483B2 (en) 2017-04-09 2017-07-17 Recovering spectral shape from spatial output
PCT/US2018/025738 WO2018191056A1 (en) 2017-04-09 2018-04-02 Recovering spectral shape from spatial output

Publications (1)

Publication Number Publication Date
SG11201908148VA true SG11201908148VA (en) 2019-10-30

Family

ID=63710880

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201908148V SG11201908148VA (en) 2017-04-09 2018-04-02 Recovering spectral shape from spatial output

Country Status (7)

Country Link
US (1) US10288483B2 (zh)
JP (1) JP7021243B2 (zh)
KR (1) KR102305320B1 (zh)
CN (1) CN110494722B (zh)
SG (1) SG11201908148VA (zh)
TW (1) TWI665431B (zh)
WO (1) WO2018191056A1 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2024760A (en) * 2019-02-25 2020-08-31 Asml Netherlands Bv Radiation measurement system
TWI704379B (zh) * 2019-07-05 2020-09-11 明達醫學科技股份有限公司 光譜儀
KR102590616B1 (ko) * 2021-10-06 2023-10-17 한국식품연구원 비파괴 분석기술 기반의 배추 연부병 진단용 다분광 영상장치 및 이의 제작방법
CN115096441B (zh) * 2022-08-25 2022-12-13 上海与光彩芯科技有限公司 光谱恢复方法

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5760910A (en) * 1995-06-07 1998-06-02 Masimo Corporation Optical filter for spectroscopic measurement and method of producing the optical filter
US6671294B2 (en) * 1997-07-22 2003-12-30 Cymer, Inc. Laser spectral engineering for lithographic process
US6260062B1 (en) * 1999-02-23 2001-07-10 Pathnet, Inc. Element management system for heterogeneous telecommunications network
US6603549B2 (en) 2000-02-25 2003-08-05 Cymer, Inc. Convolution method for measuring laser bandwidth
JP4094307B2 (ja) 2002-02-21 2008-06-04 ギガフォトン株式会社 ガスレーザ装置
TWI263412B (en) 2003-06-26 2006-10-01 Cymer Inc Improved bandwidth estimation
US7256893B2 (en) 2003-06-26 2007-08-14 Cymer, Inc. Method and apparatus for measuring bandwidth of an optical spectrum output of a very small wavelength very narrow bandwidth high power laser
WO2005033625A1 (en) 2003-09-30 2005-04-14 Cymer, Inc. Gas discharge mopa laser spectral analysis module
US7317536B2 (en) 2005-06-27 2008-01-08 Cymer, Inc. Spectral bandwidth metrology for high repetition rate gas discharge lasers
WO2009009077A2 (en) 2007-07-10 2009-01-15 Nanolambda, Inc. Digital filter spectrum sensor
FR2926635B1 (fr) 2008-01-21 2012-08-03 Silios Technologies Dispositif de spectroscopie en longueur d'onde a filtres integres
JP5141359B2 (ja) 2008-04-25 2013-02-13 株式会社ニコン スペクトル幅計測器の校正方法、スペクトル幅計測器の校正装置、狭帯域化レーザ装置、露光装置及び電子デバイスの製造方法
DE102009047198A1 (de) * 2009-11-26 2011-06-01 Universität Rostock Mikroarraybasiertes Ortsfilter
US9395244B2 (en) 2010-09-23 2016-07-19 Nanolambda, Inc. Spectrum reconstruction method for miniature spectrometers
CN103201682B (zh) 2010-11-12 2015-06-17 Asml荷兰有限公司 量测方法和设备、光刻系统和器件制造方法
US9207119B2 (en) 2012-04-27 2015-12-08 Cymer, Llc Active spectral control during spectrum synthesis
JP2014038042A (ja) 2012-08-17 2014-02-27 Seiko Epson Corp 分光計測方法、分光計測器、および変換行列の生成方法
JP5987573B2 (ja) * 2012-09-12 2016-09-07 セイコーエプソン株式会社 光学モジュール、電子機器、及び駆動方法
JP6260076B2 (ja) * 2012-09-19 2018-01-17 セイコーエプソン株式会社 分光装置
CN103776530B (zh) * 2012-10-28 2016-03-09 天津奇谱光电技术有限公司 一种使用可调谐法布里-珀罗滤波器的光谱分析设备
JP6182918B2 (ja) * 2013-03-18 2017-08-23 セイコーエプソン株式会社 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
EP4006542A1 (en) * 2013-08-02 2022-06-01 Verifood Ltd. Spectrometer comprising sample illuminator
CN103808410B (zh) * 2014-02-21 2016-02-24 清华大学 对偶编码压缩高光谱成像的装置
US9599510B2 (en) * 2014-06-04 2017-03-21 Cymer, Llc Estimation of spectral feature of pulsed light beam
GB201501731D0 (en) 2015-02-03 2015-03-18 Vito Nv Method and system for estimating an input spectrum from sensor data
US9778108B2 (en) 2015-05-22 2017-10-03 Cymer, Llc Metrology system and method having a plurality of sensors for estimating a spectral feature of a pulsed light beam
CN106331442B (zh) * 2015-07-02 2021-01-15 松下知识产权经营株式会社 摄像装置
KR102049373B1 (ko) * 2015-07-30 2019-11-27 테크놀로지 이노베이션 모멘텀 펀드 (이스라엘) 리미티드 파트너쉽 스펙트럼 영상처리 방법, 스펙트럼 영상처리 시스템 및 제어 유닛
EP3712553B1 (en) * 2015-09-14 2024-03-20 Thorlabs, Inc. Apparatus and methods for one or more wavelength swept lasers and the detection of signals thereof
CN205748636U (zh) * 2015-11-19 2016-11-30 中国科学院西安光学精密机械研究所 一种光学智能感知多维成像系统
CN105675136B (zh) * 2016-03-22 2018-10-16 深圳先进技术研究院 一种编码孔径光谱成像系统

Also Published As

Publication number Publication date
US20180292263A1 (en) 2018-10-11
US10288483B2 (en) 2019-05-14
KR102305320B1 (ko) 2021-09-24
CN110494722A (zh) 2019-11-22
TW201903369A (zh) 2019-01-16
CN110494722B (zh) 2023-06-13
KR20190127855A (ko) 2019-11-13
WO2018191056A1 (en) 2018-10-18
TWI665431B (zh) 2019-07-11
JP7021243B2 (ja) 2022-02-16
JP2020516861A (ja) 2020-06-11

Similar Documents

Publication Publication Date Title
SG11201908148VA (en) Recovering spectral shape from spatial output
SG11201900804WA (en) System and method for generating multi-channel tunable illumination from a broadband source
SG11201900509YA (en) Simultaneous capturing of overlay signals from multiple targets
SG11201901334SA (en) Convolutional neural network-based mode selection and defect classification for image fusion
SG11201903904VA (en) Image-based vehicle loss assessment method, apparatus, and system, and electronic device
SG11201903098XA (en) Multiparty reconciliation systems and methods
SG11201900274VA (en) Event trigger for independent links
SG11201903302UA (en) Bispecific heterodimeric fusion proteins containing il-15/il-15ralpha fc-fusion proteins and pd-1 antibody fragments
SG11201903787YA (en) Exploiting input data sparsity in neural network compute units
SG11201805281YA (en) Resource allocation for computer processing
SG11201806723PA (en) Security system
SG11201809556WA (en) Wedges for light transformation
SG11201903836QA (en) Image-based vehicle damage determining method, apparatus, and electronic device
SG11201900246TA (en) Determining drivability of objects for autonomous vehicles
SG11201907669UA (en) Fluid flow cell including a spherical lens
SG11201907383QA (en) Systems and methods for vehicle sharing service
SG11201907912YA (en) An appliance operation signal processing system and method
SG11201804771WA (en) Systems and methods for providing financial data to financial instruments in a distributed ledger system
SG11201901858QA (en) Techniques for contending for access to a radio frequency spectrum band using a coordinated listen before talk procedure
SG11201811333RA (en) Solid inspection apparatus and method of use
SG11201901644TA (en) Optical detection of vibrations
SG11201902667UA (en) Methods and systems for chromatography data analysis
SG11202000495YA (en) Methods and systems for environmental credit scoring
SG11201908549RA (en) Automated quality control and spectral error correction for sample analysis instruments
SG11201909671TA (en) Method of living body detection and terminal device