FR2926635B1 - Dispositif de spectroscopie en longueur d'onde a filtres integres - Google Patents

Dispositif de spectroscopie en longueur d'onde a filtres integres

Info

Publication number
FR2926635B1
FR2926635B1 FR0800281A FR0800281A FR2926635B1 FR 2926635 B1 FR2926635 B1 FR 2926635B1 FR 0800281 A FR0800281 A FR 0800281A FR 0800281 A FR0800281 A FR 0800281A FR 2926635 B1 FR2926635 B1 FR 2926635B1
Authority
FR
France
Prior art keywords
spectroscopy device
integrated filters
wavelength spectroscopy
wavelength
filters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0800281A
Other languages
English (en)
Other versions
FR2926635A1 (fr
Inventor
Stephane Tisserand
Marc Hubert
Laurent Roux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Silios Technologies SA
Original Assignee
Silios Technologies SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0800281A priority Critical patent/FR2926635B1/fr
Application filed by Silios Technologies SA filed Critical Silios Technologies SA
Priority to CN2009801072663A priority patent/CN101965505B/zh
Priority to CA2712636A priority patent/CA2712636A1/fr
Priority to EP09720812A priority patent/EP2235484A2/fr
Priority to US12/863,731 priority patent/US20110049340A1/en
Priority to JP2010542663A priority patent/JP2011510285A/ja
Priority to PCT/FR2009/000056 priority patent/WO2009112680A2/fr
Publication of FR2926635A1 publication Critical patent/FR2926635A1/fr
Application granted granted Critical
Publication of FR2926635B1 publication Critical patent/FR2926635B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
FR0800281A 2008-01-21 2008-01-21 Dispositif de spectroscopie en longueur d'onde a filtres integres Active FR2926635B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR0800281A FR2926635B1 (fr) 2008-01-21 2008-01-21 Dispositif de spectroscopie en longueur d'onde a filtres integres
CA2712636A CA2712636A1 (fr) 2008-01-21 2009-01-20 Dispositif de spectroscopie en longueur d'onde a filtres integres
EP09720812A EP2235484A2 (fr) 2008-01-21 2009-01-20 Dispositif de spectroscopie en longueur d'onde à filtres intégrés
US12/863,731 US20110049340A1 (en) 2008-01-21 2009-01-20 Wavelength spectroscopy device with integrated filters
CN2009801072663A CN101965505B (zh) 2008-01-21 2009-01-20 具有集成的滤波器的波长光谱学设备
JP2010542663A JP2011510285A (ja) 2008-01-21 2009-01-20 集積フィルタを備えた波長分光装置
PCT/FR2009/000056 WO2009112680A2 (fr) 2008-01-21 2009-01-20 Dispositif de spectroscopie en longueur d'onde à filtres intégrés

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0800281A FR2926635B1 (fr) 2008-01-21 2008-01-21 Dispositif de spectroscopie en longueur d'onde a filtres integres

Publications (2)

Publication Number Publication Date
FR2926635A1 FR2926635A1 (fr) 2009-07-24
FR2926635B1 true FR2926635B1 (fr) 2012-08-03

Family

ID=39712384

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0800281A Active FR2926635B1 (fr) 2008-01-21 2008-01-21 Dispositif de spectroscopie en longueur d'onde a filtres integres

Country Status (7)

Country Link
US (1) US20110049340A1 (fr)
EP (1) EP2235484A2 (fr)
JP (1) JP2011510285A (fr)
CN (1) CN101965505B (fr)
CA (1) CA2712636A1 (fr)
FR (1) FR2926635B1 (fr)
WO (1) WO2009112680A2 (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2984489B1 (fr) 2011-12-15 2017-09-15 Office Nat D'etudes Et De Rech Aerospatiales Lame interferometrique a deux ondes comportant une cavite pleine partiellement resonante et son procede de fabrication
DE102013213219B4 (de) 2013-07-05 2021-12-23 Siemens Healthcare Gmbh Vorrichtung zur Bestimmung einer Verformungsinformation für ein mit einer Last beaufschlagtes Brett
EP3112828B1 (fr) 2015-06-30 2022-10-05 IMEC vzw Circuit intégré et procédé de fabrication de circuit intégré
EP3182079B1 (fr) * 2015-12-14 2023-08-23 ams AG Dispositif de détection optique et procédé de fabrication d'un tel appareil
FR3050831B1 (fr) 2016-04-29 2018-04-27 Silios Technologies Dispositif d'imagerie multispectrale
FR3053464B1 (fr) * 2016-06-30 2020-08-14 Office National D'etudes Et De Rech Aerospatiales Spectro-imageur multivoie a transformee de fourier
EP3339821A1 (fr) 2016-12-23 2018-06-27 IMEC vzw Capteur d'imagerie
US10288483B2 (en) 2017-04-09 2019-05-14 Cymer, Llc Recovering spectral shape from spatial output
JP7245232B2 (ja) * 2017-09-13 2023-03-23 マテリオン コーポレイション マルチスペクトルフィルタアレイ上の不透明開口マスクとしてのフォトレジスト
EP3462148B1 (fr) * 2017-09-28 2023-09-06 ams AG Dispositif de détection optique et procédé de fabrication d'un tel appareil
US10677972B2 (en) 2017-12-08 2020-06-09 Viavi Solutions Inc. Multispectral sensor response balancing
US11156753B2 (en) 2017-12-18 2021-10-26 Viavi Solutions Inc. Optical filters
FR3084459B1 (fr) * 2018-07-30 2020-07-10 Silios Technologies Capteur d'imagerie multispectrale pourvu de moyens de limitation de la diaphonie
US11789188B2 (en) * 2019-07-19 2023-10-17 Viavi Solutions Inc. Optical filter

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2215038B (en) * 1988-02-05 1992-01-08 Plessey Co Plc Improvements relating to optical sensing arrangements
US6031653A (en) * 1997-08-28 2000-02-29 California Institute Of Technology Low-cost thin-metal-film interference filters
JP2002082048A (ja) * 2000-09-07 2002-03-22 Shimadzu Corp 非接触式物性測定方法およびその装置
US7474350B2 (en) * 2003-09-08 2009-01-06 Sanyo Electric Co., Ltd. Solid state image pickup device comprising lenses for condensing light on photodetection parts
US7256922B2 (en) * 2004-07-02 2007-08-14 Idc, Llc Interferometric modulators with thin film transistors
WO2006130164A2 (fr) * 2004-08-19 2006-12-07 University Of Pittsburgh Analyseurs de spectre optiques, de la dimension d'une puce, a resolution accrue
US7553684B2 (en) * 2004-09-27 2009-06-30 Idc, Llc Method of fabricating interferometric devices using lift-off processing techniques
JP4806197B2 (ja) * 2005-01-17 2011-11-02 パナソニック株式会社 固体撮像装置
US8574823B2 (en) * 2005-10-05 2013-11-05 Hewlett-Packard Development Company, L.P. Multi-level layer
US7315667B2 (en) * 2005-12-22 2008-01-01 Palo Alto Research Center Incorporated Propagating light to be sensed
JP2007317750A (ja) * 2006-05-23 2007-12-06 Matsushita Electric Ind Co Ltd 撮像装置

Also Published As

Publication number Publication date
JP2011510285A (ja) 2011-03-31
WO2009112680A3 (fr) 2009-10-29
CN101965505A (zh) 2011-02-02
EP2235484A2 (fr) 2010-10-06
CA2712636A1 (fr) 2009-09-17
FR2926635A1 (fr) 2009-07-24
US20110049340A1 (en) 2011-03-03
CN101965505B (zh) 2013-03-27
WO2009112680A2 (fr) 2009-09-17

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