WO2009112680A2 - Dispositif de spectroscopie en longueur d'onde à filtres intégrés - Google Patents
Dispositif de spectroscopie en longueur d'onde à filtres intégrés Download PDFInfo
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- WO2009112680A2 WO2009112680A2 PCT/FR2009/000056 FR2009000056W WO2009112680A2 WO 2009112680 A2 WO2009112680 A2 WO 2009112680A2 FR 2009000056 W FR2009000056 W FR 2009000056W WO 2009112680 A2 WO2009112680 A2 WO 2009112680A2
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- 238000004611 spectroscopical analysis Methods 0.000 title claims abstract description 10
- 239000012528 membrane Substances 0.000 claims abstract description 25
- 238000001914 filtration Methods 0.000 claims abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 101100077149 Human herpesvirus 8 type P (isolate GK18) K5 gene Proteins 0.000 claims abstract description 4
- 102100038546 Fibronectin type III and SPRY domain-containing protein 1 Human genes 0.000 claims abstract description 3
- 101001030521 Homo sapiens Fibronectin type III and SPRY domain-containing protein 1 Proteins 0.000 claims abstract description 3
- 125000006850 spacer group Chemical group 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 5
- 238000005516 engineering process Methods 0.000 claims description 5
- 230000005855 radiation Effects 0.000 claims description 5
- 238000003384 imaging method Methods 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 239000011159 matrix material Substances 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 101001022847 Homo sapiens E3 ubiquitin-protein ligase MYCBP2 Proteins 0.000 description 4
- 101001126102 Homo sapiens Pleckstrin homology domain-containing family B member 1 Proteins 0.000 description 4
- 102100030462 Pleckstrin homology domain-containing family B member 1 Human genes 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 230000008520 organization Effects 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 101100491376 Arabidopsis thaliana APL gene Proteins 0.000 description 2
- 101100243901 Halobacterium salinarum (strain ATCC 700922 / JCM 11081 / NRC-1) phr gene Proteins 0.000 description 2
- 101100385336 Natronomonas pharaonis (strain ATCC 35678 / DSM 2160 / CIP 103997 / JCM 8858 / NBRC 14720 / NCIMB 2260 / Gabara) cry gene Proteins 0.000 description 2
- 101150049436 PHR2 gene Proteins 0.000 description 2
- 230000002745 absorbent Effects 0.000 description 2
- 239000002250 absorbent Substances 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 102100031476 Cytochrome P450 1A1 Human genes 0.000 description 1
- 102100026533 Cytochrome P450 1A2 Human genes 0.000 description 1
- 101000941690 Homo sapiens Cytochrome P450 1A1 Proteins 0.000 description 1
- 101000855342 Homo sapiens Cytochrome P450 1A2 Proteins 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000012804 iterative process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229940072033 potash Drugs 0.000 description 1
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Substances [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 1
- 235000015320 potassium carbonate Nutrition 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/863,731 US20110049340A1 (en) | 2008-01-21 | 2009-01-20 | Wavelength spectroscopy device with integrated filters |
CN2009801072663A CN101965505B (zh) | 2008-01-21 | 2009-01-20 | 具有集成的滤波器的波长光谱学设备 |
EP09720812A EP2235484A2 (fr) | 2008-01-21 | 2009-01-20 | Dispositif de spectroscopie en longueur d'onde à filtres intégrés |
JP2010542663A JP2011510285A (ja) | 2008-01-21 | 2009-01-20 | 集積フィルタを備えた波長分光装置 |
CA2712636A CA2712636A1 (fr) | 2008-01-21 | 2009-01-20 | Dispositif de spectroscopie en longueur d'onde a filtres integres |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0800281 | 2008-01-21 | ||
FR0800281A FR2926635B1 (fr) | 2008-01-21 | 2008-01-21 | Dispositif de spectroscopie en longueur d'onde a filtres integres |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2009112680A2 true WO2009112680A2 (fr) | 2009-09-17 |
WO2009112680A3 WO2009112680A3 (fr) | 2009-10-29 |
Family
ID=39712384
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/FR2009/000056 WO2009112680A2 (fr) | 2008-01-21 | 2009-01-20 | Dispositif de spectroscopie en longueur d'onde à filtres intégrés |
Country Status (7)
Country | Link |
---|---|
US (1) | US20110049340A1 (fr) |
EP (1) | EP2235484A2 (fr) |
JP (1) | JP2011510285A (fr) |
CN (1) | CN101965505B (fr) |
CA (1) | CA2712636A1 (fr) |
FR (1) | FR2926635B1 (fr) |
WO (1) | WO2009112680A2 (fr) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2984489B1 (fr) | 2011-12-15 | 2017-09-15 | Office Nat D'etudes Et De Rech Aerospatiales | Lame interferometrique a deux ondes comportant une cavite pleine partiellement resonante et son procede de fabrication |
DE102013213219B4 (de) | 2013-07-05 | 2021-12-23 | Siemens Healthcare Gmbh | Vorrichtung zur Bestimmung einer Verformungsinformation für ein mit einer Last beaufschlagtes Brett |
EP3112828B1 (fr) | 2015-06-30 | 2022-10-05 | IMEC vzw | Circuit intégré et procédé de fabrication de circuit intégré |
EP3182079B1 (fr) * | 2015-12-14 | 2023-08-23 | ams AG | Dispositif de détection optique et procédé de fabrication d'un tel appareil |
FR3050831B1 (fr) * | 2016-04-29 | 2018-04-27 | Silios Technologies | Dispositif d'imagerie multispectrale |
FR3053464B1 (fr) * | 2016-06-30 | 2020-08-14 | Office National D'etudes Et De Rech Aerospatiales | Spectro-imageur multivoie a transformee de fourier |
EP3339821A1 (fr) | 2016-12-23 | 2018-06-27 | IMEC vzw | Capteur d'imagerie |
US10288483B2 (en) * | 2017-04-09 | 2019-05-14 | Cymer, Llc | Recovering spectral shape from spatial output |
CA3075646C (fr) * | 2017-09-13 | 2024-03-26 | Materion Corporation | Resine photosensible en tant que masque d'ouverture opaque sur des reseaux de filtres multispectraux |
EP3462148B1 (fr) * | 2017-09-28 | 2023-09-06 | ams AG | Dispositif de détection optique et procédé de fabrication d'un tel appareil |
US10677972B2 (en) | 2017-12-08 | 2020-06-09 | Viavi Solutions Inc. | Multispectral sensor response balancing |
US11156753B2 (en) | 2017-12-18 | 2021-10-26 | Viavi Solutions Inc. | Optical filters |
US11789188B2 (en) * | 2019-07-19 | 2023-10-17 | Viavi Solutions Inc. | Optical filter |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2215038A (en) * | 1988-02-05 | 1989-09-13 | Plessey Co Plc | Improvements relating to optical sensing arrangements |
US20060209413A1 (en) * | 2004-08-19 | 2006-09-21 | University Of Pittsburgh | Chip-scale optical spectrum analyzers with enhanced resolution |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6031653A (en) * | 1997-08-28 | 2000-02-29 | California Institute Of Technology | Low-cost thin-metal-film interference filters |
JP2002082048A (ja) * | 2000-09-07 | 2002-03-22 | Shimadzu Corp | 非接触式物性測定方法およびその装置 |
US7474350B2 (en) * | 2003-09-08 | 2009-01-06 | Sanyo Electric Co., Ltd. | Solid state image pickup device comprising lenses for condensing light on photodetection parts |
US7256922B2 (en) * | 2004-07-02 | 2007-08-14 | Idc, Llc | Interferometric modulators with thin film transistors |
US7553684B2 (en) * | 2004-09-27 | 2009-06-30 | Idc, Llc | Method of fabricating interferometric devices using lift-off processing techniques |
JP4806197B2 (ja) * | 2005-01-17 | 2011-11-02 | パナソニック株式会社 | 固体撮像装置 |
US8574823B2 (en) * | 2005-10-05 | 2013-11-05 | Hewlett-Packard Development Company, L.P. | Multi-level layer |
US7315667B2 (en) * | 2005-12-22 | 2008-01-01 | Palo Alto Research Center Incorporated | Propagating light to be sensed |
JP2007317750A (ja) * | 2006-05-23 | 2007-12-06 | Matsushita Electric Ind Co Ltd | 撮像装置 |
-
2008
- 2008-01-21 FR FR0800281A patent/FR2926635B1/fr active Active
-
2009
- 2009-01-20 US US12/863,731 patent/US20110049340A1/en not_active Abandoned
- 2009-01-20 CA CA2712636A patent/CA2712636A1/fr not_active Abandoned
- 2009-01-20 CN CN2009801072663A patent/CN101965505B/zh active Active
- 2009-01-20 EP EP09720812A patent/EP2235484A2/fr not_active Ceased
- 2009-01-20 JP JP2010542663A patent/JP2011510285A/ja active Pending
- 2009-01-20 WO PCT/FR2009/000056 patent/WO2009112680A2/fr active Application Filing
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2215038A (en) * | 1988-02-05 | 1989-09-13 | Plessey Co Plc | Improvements relating to optical sensing arrangements |
US20060209413A1 (en) * | 2004-08-19 | 2006-09-21 | University Of Pittsburgh | Chip-scale optical spectrum analyzers with enhanced resolution |
Also Published As
Publication number | Publication date |
---|---|
CN101965505A (zh) | 2011-02-02 |
JP2011510285A (ja) | 2011-03-31 |
FR2926635B1 (fr) | 2012-08-03 |
EP2235484A2 (fr) | 2010-10-06 |
FR2926635A1 (fr) | 2009-07-24 |
CN101965505B (zh) | 2013-03-27 |
US20110049340A1 (en) | 2011-03-03 |
CA2712636A1 (fr) | 2009-09-17 |
WO2009112680A3 (fr) | 2009-10-29 |
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