SG11201908148VA - Recovering spectral shape from spatial output - Google Patents

Abstract

INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 18 October 2018 (18.10.2018) WIP0 I PCT 0111111010 0111 °nolo mu °Iola iflo oimIE (10) International Publication Number WO 2018/191056 Al 130 125 I 140.---- 135(1) (51) International Patent Classification: GO1J 3/45 (2006.01) GO1J 3/28 (2006.01) (21) International Application Number: PCT/US2018/025738 (22) International Filing Date: 02 April 2018 (02.04.2018) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 62/483,423 09 April 2017 (09.04.2017) US 15/651,935 17 July 2017 (17.07.2017) US (71) Applicant: CYMER, LLC [US/US]; 17075 Thornmint Court, San Diego, California 92127-2413 (US). (72) Inventor: KING, Brian Edward; 17075 Thornmint Court, San Diego, California 92127-2413 (US). (74) Agent: NGUYEN, Joseph A.; CYMER, LLC, 17075 Thornmint Court, Corporate IP Department, M/S 4-2C, San Diego, California 92127-2413 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17: as to applicant's entitlement to apply for and be granted a patent (Rule 4. 17(ii)) Published: — with international search report (Art. 21(3)) (54) Title: RECOVERING SPECTRAL SHAPE FROM SPATIAL OUTPUT (57) : A method is performed for estimating the optical spec- 35(2 , trum of a tight beam. The method includes: projecting the light beam onto distinct spatial areas of a spectrometer, wherein each spatial area vooN receives a different filtered version of the optical spectrum; detecting a characteristic of the projected light beam at each of the distinct spatial ..1 ) areas of the spectrometer; receiving a two-dimensional matrix in which 11144: , each entry of the matrix provides a relationship between one or more spatial areas and each spectral feature, wherein the two-dimensional ma- trix is related to the input-output relationship of the spectrometer; and estimating the optical spectrum of the light beam based on an analysis that uses both the detected light beam characteristics and the received two-dimensional matrix. 105 W O 20 18/ 19 105 6 Al 150 eo 101 155 Fig. 1 wits)