CN103776530B - A kind of spectral analysis apparatus using tunable fabry-perot filter - Google Patents
A kind of spectral analysis apparatus using tunable fabry-perot filter Download PDFInfo
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Abstract
The present invention relates to a kind of spectral analysis apparatus using tunable fabry-perot filter, comprise an optical isolator, a polarizing beam splitter, parallel lines polarized light tunable fabry-perot filter, perpendicular linear polarization optic tunable fabry-perot filter, two Electro-Optical Sensor Sets and a drived control and a data analysis system.Described tunable fabry-perot filter comprises two kinds of design proposals: the technical characteristics of the first design proposal is: comprise the first bandpass filter, liquid crystal phase modulator, the second bandpass filter and driving circuit, and driving circuit realizes the tuber function of wave filter by the effective refractive index of liquid crystal material in control methods Fabry-Perot-type cavity.The second design proposal from the difference of the first design proposal is: described first and second bandpass filter respectively by a long-pass and a short-pass and have different end the phase step type wave filter of frequency spectrum substitute.
Description
Technical field
The invention belongs to field of photoelectric technology, especially a kind of spectral analysis apparatus that have employed tunable fabry-perot filter.
Background technology
Because traditional grating can have very high spectral resolution in large spectral range, therefore, traditional spectral measurement and analytical equipment generally adopt reflection-type or transmission-type grating.Its shortcoming, generally need to drive grating to scan with accurate step motor.Therefore, conventional grating spectrum analytical equipment size is larger, easily by the impact of mechanical shock, and expensive.
Traditional optical method F-P etalon is a kind of filtering device utilizing multiple-beam interference principle to make, and mainly contains two types: a kind of is airspace, and a kind of is optical glass interval.By the multiple-beam interference effect of the high reflectance institute forming method Fabry-Perot-type cavity of multilayer dielectric film on two logical light faces, the multi-wavelength narrow-band filtering that can be implemented in broad spectrum exports, and there is stable performance, the characteristic such as clear aperature is large, luminous power damage threshold is high, structure is simple and cost is low, therefore, be widely used in all kinds of laser instrument, optical gauge and photoconductive fiber communication apparatus.
Utilize traditional optical method F-P etalon can realize the tuber function of transmitted light frequency.For the Fabry-Perot etalon of airspace, undertaken tuning by the incident angle changing light, but the tuning range of this method is very little; Also (as step motor) can be adopted mechanically to change the chamber progress row of Fabry-Perot etalon tuning, this method can realize large tuning range, but tuning precision is low, and high to the accuracy requirement of mechanical part, and stability is bad.In addition, adopt PZT piezoelectric ceramics (lead zirconate titanate) technology long by the chamber changing Fabry-Perot etalon, tuning precision and speed can be improved, but not easily accomplish miniaturization, and driving circuit is also more complicated; What change that the temperature of etalon also can realize in a big way is tuning, but the shortcoming of the method is that speed is slow.Meanwhile, the filtering output characteristics of simplex method F-P etalon is the multimode output that a light frequency is spaced apart Free Spectral Range.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, what realize the linearly polarized light frequency of penetrant method Fabry-Perot filters in chamber liquid crystal phase modulator being placed on Fabry-Perot etalon is continuous, fast and fine tune function, and two of Fabry-Perot-type cavity reflectings surface are set to bandpass filter or phase step type wave filter and realize the single-mode output of described tunable fabry-perot filter according to the Free Spectral Range that the transmission bandwidth of set described bandpass filter or the transmission bandwidth of described phase step type wave filter arrange Fabry-Perot-type cavity.
The present invention solves existing technical matters and takes following technical scheme to realize:
The first structure: a kind of optical isolator using the spectral analysis apparatus of tunable fabry-perot filter to comprise to install successively, a polarizing beam splitter, a parallel polarized light tunable fabry-perot filter, an orthogonal polarized light tunable fabry-perot filter, first Electro-Optical Sensor Set, second Electro-Optical Sensor Set, the drive source of described parallel polarized light tunable fabry-perot filter, the drive source of described orthogonal polarized light tunable fabry-perot filter, the driving of described first photodetector and signal receiving circuit, the driving of described second photodetector and signal receiving circuit and drived control and data analysis system, incident light is first by after described optical isolator, through described polarizing beam splitter, incident light is divided into parallel polarized light and orthogonal polarized light, described parallel polarized light is by after described parallel polarized light tunable fabry-perot filter, received by described first Electro-Optical Sensor Set, described orthogonal polarized light is by after described orthogonal polarized light tunable fabry-perot filter, received by described second Electro-Optical Sensor Set, frequency spectrum data analysis is carried out by described drived control and data analysis system.
And, described parallel polarized light tunable fabry-perot filter comprises the first bandpass filter, liquid crystal phase modulator and the second bandpass filter, liquid crystal phase modulator is arranged in the chamber of the fabry-perot filter be made up of the first bandpass filter and the second bandpass filter, realizes the tuber function of wave filter by liquid crystal phase modulator in control methods Fabry-Perot-type cavity.
And, the first described bandpass filter and the second bandpass filter are a kind of bandpass filter of the multilayer dielectric film arranged on the inside surface of optically transparent material and have identical transmission bandwidth, different reflectivity can be set according to the requirement of the acutance coefficient to transmitted light in the passband of described bandpass filter, reflectivity is higher, the frequency spectrum of transmitted light is narrower, generally for the application of spectral analysis, this reflectivity is arranged between 70% and 95%, arrange beyond passband 100% or close to 100% reflectivity, and optical anti-reflective film is set on the outside surface of optically transparent material.
And the first described bandpass filter and the passband width of the second bandpass filter are less than the Free Spectral Range of described fabry-perot filter, the light signal through described tunable narrow-band optically filtering equipment is made to be single-mode optics signal.
The second structure: a kind of spectral analysis apparatus of tunable fabry-perot filter that uses comprises a long-pass step filter, liquid crystal phase modulator and a short-pass step filter, liquid crystal phase modulator is arranged in the chamber of the fabry-perot filter be made up of described long-pass step filter and described short-pass step filter, the tuber function of wave filter is realized by controlling liquid crystal phase modulator in described Fabry-Perot-type cavity, according to the requirement of required transmitted light bandwidth, by arranging different cut-off light frequencies and the Free Spectral Range of described tunable fabry-perot filter to described long-pass step filter and short-pass step filter, the quantity of the mould of the light signal through described tunable narrow-band optically filtering equipment can be controlled.
And, described long-pass step filter and short-pass step filter are a kind of optical filters of the multilayer dielectric film arranged on the inside surface of optically transparent material, described long-pass step filter for the light being less than cutoff frequency have 100% or close to 100% reflectivity, described short-pass step filter for the light being greater than cutoff frequency have 100% or close to 100% reflectivity, different reflectivity can be set according to the acutance coefficient of transmitted light in the passband of described long-pass step filter and short-pass step filter, generally for the application of spectral analysis, this reflectivity is arranged between 70% and 95%, and optical anti-reflective film is set on the outside surface of optically transparent material, the cutoff frequency of described long-pass step filter is less than the cutoff frequency of described short-pass step filter, the free transmission range of described fabry-perot filter is made up of the cutoff frequency of described long-pass step filter and the cutoff frequency of described short-pass step filter, this free transmission range is greater than the Free Spectral Range of described fabry-perot filter to realize single-mode output.
And what described liquid crystal phase modulator adopted is nematic phase type liquid crystal material, and the thickness of liquid crystal material is several microns to tens microns.
And described orthogonal polarized light tunable fabry-perot filter has identical structure with described parallel polarized light tunable fabry-perot filter, but optical axis is vertical with described parallel polarized light tunable fabry-perot filter.
And, described control circuit and data analysis system comprise system that one is core with digital signal processor and embedded software for controlling the drive source of the humorous fabry-perot filter of described parallel adjustable, the drive source of described vertical tunable fabry-perot filter, drive the optical power signals of the first photodetector and reception the first photodetector, drive the second photodetector and receive the optical power signals of the second photodetector and receive extraneous control signal and output signal, to realize the power of described spectral analysis apparatus to incident light and the measuring ability of spectrum.
Advantage of the present invention and good effect are:
The present invention is reasonable in design, realization carries out continuous, quick and accurate test to the power of institute's light signal and frequency spectrum, have that structure is simple, mechanical moving-member, stable and reliable for performance, cost is low, size is little, be easy to install and the feature such as production, the reliability service for requiring under the little and extreme operating environments of size can being met, can be widely used in the fields such as laser instrument, optic test, optical-fibre communications, biology, medicine equipment and Fibre Optical Sensor network.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of a common law F-P etalon;
Fig. 2 is a kind of structural representation of liquid crystal phase modulator;
Fig. 3 is the change curve of phase place with extra electric field of light transmission liquid crystal phase modulator;
Fig. 4 is the schematic diagram of the driving electric signal of liquid crystal phase modulator;
Fig. 5 is a kind of structural representation of tunable fabry-perot filter;
Fig. 6 is the schematic diagram of the transmitted spectrum of the first and second bandpass filter;
Fig. 7 is the transmitted spectrum schematic diagram of long-pass step filter;
Fig. 8 is the transmitted spectrum schematic diagram of short-pass step filter;
Fig. 9 is the transmitted spectrum schematic diagram of common law F-P etalon;
Figure 10 is the transmitted spectrum schematic diagram of tunable fabry-perot filter;
Figure 11 is schematic diagram of the present invention;
Figure 12 is the schematic diagram of Systematical control of the present invention and data analysis system.
Embodiment
Below in conjunction with accompanying drawing, the embodiment of the present invention is further described.
Fig. 1 gives a kind of schematic diagram of common Fabry-Perot (Fabry-Perot) light standard tool 100.The material of this Fabry-Perot light standard tool 100 generally uses to resemble near infrared and visible light wave range and melts quartz or the such optical glass of BK7, suppose that the refractive index of material is n, highly reflecting films are all plated in two logical light faces 2 and 4, its reflectivity is R, thickness is h, and light with the incident angles close to zero degree, then only has and meets 2nh=m λ, could through etalon, wherein m is the level time of transmitted light.The Free Spectral Range FSR of light standard tool 100
1can be expressed as: Δ λ=λ
2/ (2nh), or with frequency representation: Δ ν=c/ (2nh), wherein c is the light velocity.The crest frequency of transmitted light can be expressed as: ν=mc/ (2nh), and wherein m is order of interference, and the frequency bandwidth of transmitted light can be expressed as:
Δ ν
1/2(FWHM)=c (1-R)/(2nhR
1/2), wherein c is the light velocity.
As can be seen from above-mentioned two formula, the Free Spectral Range FSR of light standard tool 100
1be that h is inversely proportional to thickness.Suppose that the refractive index of material is n=1.5, FSR be realized
1=100GHz, thickness h ≈ 1 millimeter.Free Spectral Range FSR
1larger, its thickness is less.After the material of etalon and thickness are determined, the frequency bandwidth of transmitted light is main relevant with reflectivity R, and reflectivity is higher, frequency broadband or acutance (finesse) less.The feature of the transmitted spectrum of Fabry-Perot (Fabry-Perot) light standard tool is that the bandwidth of each transmission spectrum can be accomplished very narrow, equal and the non-constant width of light bands width of the frequency interval of transmitted spectrum, generally can cover the optical spectral of more than 100 nanometers, as shown in Figure 9.
Because the liquid crystal material being generally used as photoelectric device has high resistivity, therefore, desirable dielectric substance can be considered to.Owing to forming the orderly orientation of molecule and the form of extension elongation, liquid crystal has anisotropic dielectric characteristic and mono-symmetry, and as a uniaxial crystal, the direction of its optical axis is consistent with the oriented of molecule.When under the effect of liquid crystal molecule at external electrical field, electric dipole can be formed.Under the moment loading that electric dipole is formed, making the orientation of liquid crystal molecule turn to the direction of electric field, by changing the power of electric field, the direction of the optical axis of liquid crystal can be changed.Therefore, this characteristic of liquid crystal can be utilized to make optical phase modulator, and tunable optic filter or other photoelectric devices, as photoswitch and light intensity modulator etc.The general thickness being used as the liquid crystal coatings of photoelectric device is several microns to tens microns.The present invention utilizes liquid crystal to produce this characteristics design of change to the refractive index of linearly polarized light just under electric field action and forms.
Fig. 2 is the structural representation of a liquid crystal phase modulator 200, comprises outer optically transparent material 12 and 24, transparent electrode layer 16 and 26, and separation layer 19 and liquid crystal layer 18. be both side surface 5 and 7 plating optical anti-reflective film inside and outside optically transparent material 12 and 24 generally.Two transparency electrodes 16 of liquid crystal phase tuner are connected with driving circuit 14 with 26, the drive singal produced by driving circuit is formed and drives electric field between two transparency electrode retes, utilize electric field to change the effective refractive index n of Fabry-Perot intraluminal fluid crystalline substance, regulate light frequency ν and the Free Spectral Range (FSR) of the transmitted light of fabry-perot filter.Fig. 3 gives a thickness and is about the nematic phase type liquid crystal of 10 microns at 2KHz, and amplitude peak is (as shown in Figure 4) under the driving of the square-wave voltage of +/-5 volts, is the relation schematic diagram of 1550 nanometer optical wave phase place changes to optical wavelength.The maximum light phase realizing about 2 π postpones.
It is the first structure of tunable fabry-perot filter shown in Fig. 5, tunable fabry-perot filter 300 comprises the first bandpass filter 10, liquid crystal phase modulator 200, second bandpass filter 20 and driving circuit 14, first bandpass filter 10 and the second bandpass filter 20 and is respectively and plates multilayer dielectric film to realize on the outside surface 8 and 22 or inside surface 11 and 21 of optically transparent material 9 and 23.First bandpass filter 10 and the second bandpass filter 20 have identical filtering characteristic, as shown in Figure 6, at free transmission range ν
1with ν
2between (filtering interval 32), reflectivity is R, and reflectivity is higher, transmitted spectrum about narrow (generally for optical communication application, this reflectivity between 70% to 95%, for other application, then as requested specially arrange), be less than ν
1(filtering interval 30) or be greater than ν
2(filtering interval 34) reflectivity is 100% or close to 100%, and modern coating technique can be accomplished this passband frequency spectrum scope to be greater than 100 nanometers.
The first Design of Bandpass scheme: as plated bandpass filter multilayer dielectric film on the outside surface 8 and 22 of optically transparent material 9 and 23, the length in forming method Fabry-Perot-type (Fabry-Perot) chamber is D between two wave filters 10 and 20
1.The second Design of Bandpass scheme: as plated bandpass filter multilayer dielectric film on the inside surface 11 and 21 of optically transparent material 9 and 23, then the length in forming method Fabry-Perot-type (Fabry-Perot) chamber is D between two wave filters 10 and 20
2, obviously, due to D
1be greater than D
2.Therefore, the Free Spectral Range of fabry-perot filter that the first Design of Bandpass scheme can realize is less than the second design proposal.Certainly, also can realize by direct plating multilayer thin-film-filter between the inner side of optically transparent material 12 and 24 and transparent electrode layer 16 and 26, like this, due to the thickness of liquid crystal very little (several microns to tens microns), therefore, can realize the tunable fabry-perot filter that intrinsic Free Spectral Range (namely at the Free Spectral Range without tunable optic filter during extra electric field) is larger, but wave filter manufacture difficulty is larger.
For the first Design of Bandpass scheme above-mentioned, in Figure 5, the light beam 6 inciding wave filter 300 a branch ofly to propagate in the z-direction, polarization axle is the linearly polarized light in x direction, identical with the optical axis direction of liquid crystal phase modulator 200, suppose that the refractive index of light transparent materials is n, then at free transmission range ν
1with ν
2between, only have and meet 2nD
1the light of+Γ=m λ could through etalon, and wherein m is the level time of transmitted light.The Free Spectral Range FSR of wave filter 300
2for: Δ λ=λ
2/ (2nD
1+ Γ), or with frequency representation: Δ ν=c/ (2nD
1+ Γ), wherein c is the light velocity, and Γ representative is changed the light path produced incident light under DC Electric Field by refraction by liquid crystal, the crest frequency of transmitted light can be expressed as: ν=mc/ (2nD
1+ Γ), wherein m is order of interference, and the frequency broadband of transmitted light can be expressed as:
Δ ν (FWHM)=c (1-R)/((2nD
1+ Γ) R
1/2), wherein c is the light velocity.
According to above-mentioned formula, tunable fabry-perot filter 300, for the linearly polarized light close to zero degree incidence, supposes n=1.5, D
1=1 millimeter, λ=1550 nanometer, the tuning range that can obtain the transmitted light crest frequency of about 150GHz (is about the intrinsic Free Spectral Range FSR of wave filter 300
11.5 times).Comparatively speaking, according to formula above, the change of the bandwidth of Free Spectral Range Δ ν and transmitted light is much smaller.The transmitted spectrum schematic diagram of tunable fabry-perot filter as shown in Figure 10.
As can be seen here, tunable fabry-perot filter 300, under the effect of extra electric field, can realize the tuning of transmitted light crest frequency in a big way and substantially not change frequency broadband and the Free Spectral Range of transmitted light.This characteristic is for many application of tunable fabry-perot filter 300, as significant in being applied to laser instrument and frequency spectrum instrument etc.Similarly, also identical analysis can be done to the second Design of Bandpass scheme.At free transmission range ν
1with ν
2between spectrum region in addition 30 and 34, the reflectivity due to bandpass filter 10 and 20 is 100% or close to 100%, therefore, the filtered device 300 of this part incident light prevents.
Analyzed, as the intrinsic Free Spectral Range FSR of wave filter 300 as can be seen from above
1be greater than free transmission range ν
2-ν
1time, only have a mould through wave filter 300; Work as FSR
2be less than free transmission range ν
2-ν
1, and be greater than (the ν of 0.5 times
2-ν
1) time; only have 2 moulds through wave filter 300. therefore; after the free transmission range of the first bandpass filter 10 and the second bandpass filter 20 is determined; can by arranging intrinsic Free Spectral Range FSR; realize in this free transmission range, the single mode of wave filter 300 or 2 and 2 are with the tunable output of patrix.Due to Fig. 6 display is the filter characteristic of a desirable wave filter, in fact, above-mentioned bandpass filter is between spectrum region 30 and 32,32 and 34 transition time, can not be a saltus step, but exist between a zone of transition, therefore, when arranging the free transmission range of the first bandpass filter 10 and the second bandpass filter 20, also above-mentioned factor to be considered.
For free transmission range ν
2-ν
1larger situation, as being greater than 50 nanometers, the manufacture difficulty of bandpass filter 10 and bandpass filter 20 is larger, and particularly, as required situation little between the zone of transition of between spectrum region 30 and 32,32 and 34, then difficulty is larger.For this reason, the second structure of tunable fabry-perot filter is devised: this structure adopts a kind of phase step type wave filter.This project organization employs two phase step type wave filters with different filter range and replaces the first bandpass filter 10 and the second bandpass filter 20 respectively.As shown in Figure 7, be a long-pass phase step type wave filter, light frequency is greater than ν
1light to have reflectivity be R, and light frequency is less than ν
1light to have reflectivity be 100% or close to 100%, replace bandpass filter 10 by this long wave pass.Shown in Fig. 8 is a short-pass phase step type wave filter, and light frequency is less than ν
2light to have reflectivity be R, and light frequency is greater than ν
2light to have reflectivity be 100% or close to 100%, bandpass filter 20 is replaced with this short wave-pass filter, obviously, this uses the structure of long-pass and short-pass phase step type wave filter to be identical to the function of wave filter 300 with the design proposal of above-mentioned use bandpass filter.
The advantage of the second structure of this use long-pass and short-pass phase step type wave filter is: (1) relatively easily realizes large free transmission range (ν
2-ν
1), (2) relatively easily realize smaller from by the end of passband or the frequency spectrum transition from passband to rejection zone, because wave filter 300 has the reversibility of symmetry and light path, therefore, above-mentioned two phase step type wave filters are exchanged, does not affect the performance of wave filter 300.
Figure 11 is schematic diagram of the present invention.A kind of spectral analysis apparatus 500 comprises an optical isolator 42, polarizing beam splitter 46, tunable fabry-perot filter 300, first photodetector 52, tunable fabry-perot filter 400, second photodetector 56 and one control and data analysis system, as shown in figure 12, this system comprises the drive source 60 and 62 of tunable fabry-perot filter 300 and 400, the driving of the first photodetector 52 and signal receiving circuit 64, the driving of the second photodetector 56 and signal receiving circuit 66, with control circuit and data analysis system 68, it should be noted that tunable fabry-perot filter 400 has identical structure with tunable fabry-perot filter 300, there is single-mode output characteristic, but optical axis becomes 90 degree with it, optical isolator 42 is the reflected light impacts on system under test (SUT) for preventing spectral analysis apparatus 500, for isolating the light beam from reflection such as polarizing beam splitter 46 grade, certain Insertion Loss is produced to incident light simultaneously.
A branch of broadband collimated light beam 40 enters to inject polarizing beam splitter 46 through optical isolator 42, be divided into the orthogonal P light 48 of two bundle polarization states and S light 54, P light 48 is through entering the first photodetector 52 after tunable fabry-perot filter 300, S light 54 is through entering the second photodetector 56 after tunable fabry-perot filter 400, when drive source 60 and 62 carries out tuning to tunable fabry-perot filter 300 and 400 simultaneously, namely the frequency spectrum of the two light polarization components (P light 48 and S light 54) of incident light 40 is scanned, its output intensity is detected by the first photodetector 52 and the second photodetector 56 respectively and obtains, the frequency spectrum data that data analysis provides light beam 40 is carried out again by control circuit and data analysis system 68.The polarization state of the present invention to incident light is insensitive.
It is emphasized that above-mentioned explanation only plays demonstration and describes, be not one and exhaustively illustrate in detail, be not also intended to limit the present invention on described concrete form.Through description above, all may occur many changes of the present invention and change.Selected concrete enforcement is only used to the application better explained in principle of the present invention and reality.This explanation can make the people being familiar with this field better can utilize the present invention, designs different concrete enforcement according to actual needs and changes accordingly.
Claims (9)
1. one kind uses the spectral analysis apparatus of tunable fabry-perot filter, it is characterized in that: comprise the optical isolator installed successively, a polarizing beam splitter, a parallel polarized light tunable fabry-perot filter, an orthogonal polarized light tunable fabry-perot filter, first Electro-Optical Sensor Set, second Electro-Optical Sensor Set, the drive source of described parallel polarized light tunable fabry-perot filter, the drive source of described orthogonal polarized light tunable fabry-perot filter, the driving of described first photodetector and signal receiving circuit, the driving of described second photodetector and signal receiving circuit and drived control and data analysis system, incident light is first by after described optical isolator, through described polarizing beam splitter, incident light is divided into parallel polarized light and orthogonal polarized light, described parallel polarized light is by after described parallel polarized light tunable fabry-perot filter, received by described first Electro-Optical Sensor Set, described orthogonal polarized light is by after described orthogonal polarized light tunable fabry-perot filter, received by described second Electro-Optical Sensor Set, frequency spectrum data analysis is carried out by described drived control and data analysis system.
2. a kind of spectral analysis apparatus using tunable fabry-perot filter according to claim 1, it is characterized in that: described parallel polarized light tunable fabry-perot filter comprises the first bandpass filter, liquid crystal phase modulator and the second bandpass filter, liquid crystal phase modulator is arranged in the chamber of the fabry-perot filter be made up of the first bandpass filter and the second bandpass filter, realizes the tuber function of wave filter by liquid crystal phase modulator in control methods Fabry-Perot-type cavity.
3. a kind of spectral analysis apparatus using tunable fabry-perot filter according to claim 2, it is characterized in that: the first described bandpass filter and the second bandpass filter are a kind of bandpass filter of the multilayer dielectric film arranged on the inside surface of optically transparent material and have identical transmission bandwidth, different reflectivity can be set according to the requirement of the acutance coefficient to transmitted light in the passband of described bandpass filter, reflectivity is higher, the frequency spectrum of transmitted light is narrower, generally for the application of spectral analysis, this reflectivity is arranged between 70% and 95%, arrange beyond passband 100% or close to 100% reflectivity, and optical anti-reflective film is set on the outside surface of optically transparent material.
4. a kind of spectral analysis apparatus using tunable fabry-perot filter according to claim 2, it is characterized in that: the first described bandpass filter and the passband width of the second bandpass filter are less than the Free Spectral Range of described fabry-perot filter, make the light signal through described tunable narrow-band optically filtering equipment be single-mode optics signal.
5. a kind of spectral analysis apparatus using tunable fabry-perot filter according to claim 1, it is characterized in that: described parallel polarized light tunable fabry-perot filter comprises a long-pass step filter, liquid crystal phase modulator and a short-pass step filter, liquid crystal phase modulator is arranged in the chamber of the fabry-perot filter be made up of described long-pass step filter and described short-pass step filter, the tuber function of wave filter is realized by controlling liquid crystal phase modulator in described Fabry-Perot-type cavity, according to the requirement of required transmitted light bandwidth, by arranging different cut-off light frequencies and the Free Spectral Range of described tunable fabry-perot filter to described long-pass step filter and short-pass step filter, the quantity of the mould of the light signal through described tunable narrow-band optically filtering equipment can be controlled.
6. a kind of spectral analysis apparatus using tunable fabry-perot filter according to claim 5, it is characterized in that: described long-pass step filter and short-pass step filter are a kind of optical filters of the multilayer dielectric film arranged on the inside surface of optically transparent material, described long-pass step filter for the light being less than cutoff frequency have 100% or close to 100% reflectivity, described short-pass step filter for the light being greater than cutoff frequency have 100% or close to 100% reflectivity, different reflectivity can be set according to the acutance coefficient of transmitted light in the passband of described long-pass step filter and short-pass step filter, generally for the application of spectral analysis, this reflectivity is arranged between 70% and 95%, and optical anti-reflective film is set on the outside surface of optically transparent material, the cutoff frequency of described long-pass step filter is less than the cutoff frequency of described short-pass step filter, the free transmission range of described fabry-perot filter is made up of the cutoff frequency of described long-pass step filter and the cutoff frequency of described short-pass step filter, this free transmission range is greater than the Free Spectral Range of described fabry-perot filter to realize single-mode output.
7. a kind of spectral analysis apparatus using tunable fabry-perot filter according to claim 2, is characterized in that: what described liquid crystal phase modulator adopted is nematic phase type liquid crystal material, and the thickness of liquid crystal material is several microns to tens microns.
8. a kind of spectral analysis apparatus using tunable fabry-perot filter according to claim 1, it is characterized in that: described orthogonal polarized light tunable fabry-perot filter has identical structure with described parallel polarized light tunable fabry-perot filter, but optical axis is vertical with described parallel polarized light tunable fabry-perot filter.
9. a kind of spectral analysis apparatus using tunable fabry-perot filter according to claim 1, it is characterized in that: described drived control and data analysis system comprise system that one is core with digital signal processor and embedded software for controlling the drive source of the humorous fabry-perot filter of described parallel adjustable, the drive source of described vertical tunable fabry-perot filter, drive the optical power signals of the first photodetector and reception the first photodetector, drive the second photodetector and receive the optical power signals of the second photodetector and receive extraneous control signal and output signal, to realize the power of described spectral analysis apparatus to incident light and the measuring ability of spectrum.
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| US10962822B2 (en) * | 2018-06-06 | 2021-03-30 | Viavi Solutions Inc. | Liquid-crystal selectable bandpass filter |
| TWI733579B (en) * | 2019-09-09 | 2021-07-11 | 全新光電科技股份有限公司 | Measurement method of vertical cavity surface emitting laser diode(vcsel) and epitaxial text fixture |
| JP2022053088A (en) * | 2020-09-24 | 2022-04-05 | セイコーエプソン株式会社 | Optical filter, spectroscopic module, and spectrometric method |
| CN112964361B (en) * | 2021-02-05 | 2022-12-02 | 上海新产业光电技术有限公司 | Tunable filter, spectrum detection device and spectrum information acquisition method |
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