CN102955279A - Tunable Fabry-Perot filter - Google Patents

Tunable Fabry-Perot filter Download PDF

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Publication number
CN102955279A
CN102955279A CN2012102002290A CN201210200229A CN102955279A CN 102955279 A CN102955279 A CN 102955279A CN 2012102002290 A CN2012102002290 A CN 2012102002290A CN 201210200229 A CN201210200229 A CN 201210200229A CN 102955279 A CN102955279 A CN 102955279A
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China
Prior art keywords
catoptron
optical
glass sheet
liquid crystal
perot
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CN2012102002290A
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Chinese (zh)
Inventor
高培良
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Optoelectronic Technology Co Ltd Tianjin Odd Spectrum
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Optoelectronic Technology Co Ltd Tianjin Odd Spectrum
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Priority to CN2012102002290A priority Critical patent/CN102955279A/en
Priority to PCT/CN2012/078336 priority patent/WO2013189108A1/en
Publication of CN102955279A publication Critical patent/CN102955279A/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/213—Fabry-Perot type

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

The invention relates to a tunable Fabry-Perot filter which is mainly characterized by comprising a first reflecting mirror, a liquid crystal material, a second reflecting mirror and a driving circuit, wherein the liquid crystal material is arranged inside a Fabry-Perot chamber formed by the first reflecting mirror and the second reflecting mirror; and the driving circuit realizes the tunable function of the filter by controlling the effective refractive index of the liquid crystal material inside the Fabry-Perot chamber. The filter is reasonable in design; by putting the liquid crystal in the chamber of a Fabry-Perot standard instrument, the continuous, rapid and precise tunable function of linearly polarized light frequency of the Fabry-Perot filter is realized, the filter has the characteristics of being free of mechanical moving members, stable and reliable in performance, low in cost, small in size, easy to install and produce and the like, the reliable operation with small size and in extreme working environment is met, and thus the filter can be widely used in fields such as lasers, optic tests, optical fiber communication, biology, medical apparatuses and instruments, and optical fiber sensor networks.

Description

A kind of tunable fabry-perot filter
Technical field
The invention belongs to field of photoelectric technology, especially a kind of tunable fabry-perot filter.
Background technology
Traditional optical method F-P etalon is a kind of filtering device that utilizes multiple-beam interference principle to make, and mainly contain two types: a kind of is the airspace, and a kind of is the optical glass interval.The multiple-beam interference effect of the high reflectance institute forming method Fabry-Perot-type cavity by multilayer dielectric film on two logical light faces, can be implemented in the multi-wavelength narrow-band filtering output in the broad spectrum, and have that stable performance, clear aperature are large, the luminous power damage threshold is high, simple in structure and the characteristic such as cost is low, therefore, be widely used in all kinds of laser instruments, optical gauge and the photoconductive fiber communication apparatus.
Utilize traditional optical method F-P etalon can realize the tuber function of transmitted light frequency.For the Fabry-Perot etalon of airspace, can be undertaken by the incident angle that changes light tuning, but the tuning range of this method is very little; Also can adopt the chamber progress row of using mechanical means (such as step motor) to change Fabry-Perot etalon tuning, this method can realize large tuning range, but tuning precision is low, and high to the accuracy requirement of mechanical part, and stability is bad.In addition, adopt PZT piezoelectric ceramics (lead zirconate titanate) technology long by the chamber that changes Fabry-Perot etalon, can improve tuning precision and speed, but be difficult for accomplishing miniaturization, and driving circuit is also complicated; The temperature that changes etalon also can realize in a big way tuning, and still, the shortcoming of the method is that speed is slow.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, the tunable fabry-perot filter that a kind of stability is strong, tuning precision is high, speed is fast and volume is little is provided.
The present invention solves existing technical matters and takes following technical scheme to realize:
A kind of tunable fabry-perot filter, comprise the first catoptron, liquid crystal material, the second catoptron and driving circuit, the logical light face arranged outside high reflectance multilayer dielectric film of described the first catoptron, the inboard ground floor of the logical light face of the first catoptron arranges optical anti-reflective film, at this optical anti-reflective film transparency electrode is set; The arranged outside high reflectance multilayer dielectric film of described the second catoptron, the inboard ground floor of the second catoptron arranges optical anti-reflective film, at this optical anti-reflective film transparency electrode is set, in this transparency electrode thickness being set is several microns to tens microns non-conducting material film, cover part and the wide passage that leads to the catoptron edge of a millimeter except clear aperature, and with first catoptron inboard to consist of a thickness be several microns to tens microns cavity, liquid crystal material is placed in this cavity; Described driving circuit is connected on two transparency electrodes, logical light face outside keeping parallelism and the mechanics Fabry-Perot-type multiple-beam interference chamber of the logical light face outside of the first catoptron and the second catoptron.
And what described liquid crystal material adopted is nematic phase type liquid crystal.
And described the first catoptron is optically transparent material and has identical optical index with the second catoptron.
And described driving circuit is that a kind of frequency is the square-wave pulse circuit that the hundreds of hertz arrives several KHz, and pulse voltage amplitude can be adjustable to 5 volts from 0 volt.
A kind of tunable fabry-perot filter comprises the first catoptron, the first optical clear glass sheet, liquid crystal material, the second optical clear glass sheet and the second catoptron; The logical light face arranged outside high reflectance multilayer dielectric film of described the first catoptron, the logical light face inboard of the first catoptron is the optical polish face; It is inboard that the first optical clear glass sheet is arranged on the first catoptron, the logical light face outside of the first optical clear glass sheet is the optical polish face, the inboard ground floor of the logical light face of the first optical clear glass sheet arranges optical anti-reflective film, at this optical anti-reflective film transparency electrode is set; The logical light face arranged outside high reflectance multilayer dielectric film of described the second catoptron, the logical light face inboard of the second catoptron is the optical polish face; It is inboard that the second optical clear glass sheet is arranged on the second catoptron, the logical light face outside of the second optical clear glass sheet is the optical polish face, the inboard ground floor of the second optical clear glass sheet arranges optical anti-reflective film, at this optical anti-reflective film transparency electrode is set, in this transparency electrode thickness being set is several microns to tens microns non-conducting material film, cover except clear aperature part and with thickness of first optical glass sheet inboard formation be several microns to tens microns cavity, liquid crystal material is placed in this cavity; Driving circuit is connected on the transparency electrode of the first optical clear glass sheet and the second optical clear glass sheet, logical light face outside keeping parallelism and the mechanics Fabry-Perot-type multiple-beam interference chamber of the logical light face outside of the first catoptron and the second catoptron.
And what described liquid crystal material adopted is nematic phase type liquid crystal.
And gluing being connected together mated with optics transparent refractive rate in the outside of the inboard of described the first catoptron and the first optical clear glass sheet; Gluing being connected together mated with optics transparent refractive rate in the outside of the inboard of described the second catoptron and the second optical clear glass sheet.
And described the first catoptron, the second catoptron, the first optical clear glass sheet and the second optical clear glass sheet are optically transparent material and have identical optical index.
And the refractive index of described optical clear index matching glue is identical with the optically transparent material refractive index.
And described driving circuit is that a kind of frequency is the square-wave pulse circuit that the hundreds of hertz arrives several KHz, and pulse voltage amplitude can be adjustable to 5 volts from 0 volt.
Advantage of the present invention and good effect are:
The present invention is reasonable in design, liquid crystal is placed in the chamber of Fabry-Perot etalon and utilizes the electro-optic birefringent effect of liquid crystal and the linearly polarized light of a certain particular polarization of incident is produced the optical phase modulation, realization to the linearly polarized light frequency that sees through fabry-perot filter continuously, fast and fine tune, and the fast precise of the light frequency in broad spectrum is tuning.Because the thickness of liquid crystal material is very thin, wideband adjustable fabry-perot filter that therefore can manufactured size is little, Free Spectral Range is large.This wave filter have the machinery-free moving-member, stable and reliable for performance, cost is low, size is little, be easy to install and the characteristics such as production, can satisfy for the reliability service that requires under the little and extreme working environment of size, can be widely used in the fields such as laser instrument, optic test, optical-fibre communications, biology, medicine equipment and Fibre Optical Sensor network.
Description of drawings
Fig. 1 is the synoptic diagram of a common law F-P etalon;
Fig. 2 is a kind of structural representation of the present invention;
Fig. 3 is that the phase place of light transmission liquid crystal material is with the change curve of extra electric field;
Fig. 4 is another kind of structural representation of the present invention;
Fig. 5 is the transmitted spectrum synoptic diagram of common law F-P etalon;
Fig. 6 is transmitted spectrum synoptic diagram of the present invention.
Embodiment
Below in conjunction with accompanying drawing the embodiment of the invention is further described.
Fig. 1 has provided a kind of synoptic diagram of common Fabry-Perot (Fabry-Perot) light standard tool 100.The material of this Fabry-Perot light standard tool 100 generally adopts to resemble near infrared and visible light wave range and melts quartz or the such optical glass of BK7, the refractive index of supposing material is n, two logical light faces 2 and 4 all plate highly reflecting films, its reflectivity is R, thickness is h, light is with the incident angle incident near zero degree, then the Free Spectral Range FSR of light standard tool 100 1Can be expressed as: Δ λ=λ 2/ (2nh), or use frequency representation: Δ ν=c/ (2nh), wherein c is the light velocity.The crest frequency of transmitted light can be expressed as: ν=mc/ (2nh), and wherein m is order of interference, transmission light frequency broadband can be expressed as: Δ ν (FWHM)=c (1-R)/(2nhR 1/2), wherein c is the light velocity.
Can find out the Free Spectral Range FSR of light standard tool 100 from above-mentioned two formula 1With thickness be that h is inversely proportional to.The refractive index of supposing material is n=1.5, realize FSR 1=100GHz, 1 millimeter of thickness h ≈.Free Spectral Range FSR 1Larger, its thickness is just less.After the material of etalon and thickness were determined, transmission light frequency broadband was main relevant with reflectivity R, and reflectivity is higher, and (finesse) is less for frequency broadband or acutance.The characteristics of the transmitted spectrum of Fabry-Perot (Fabry-Perot) light standard tool are that the bandwidth of each transmission spectrum is very narrow, and the frequency interval of transmitted spectrum equates and the non-constant width of optical frequency bandwidth, generally can cover the optical frequency bands of a spectrum of 100 nanometers, as shown in Figure 5.
Because general liquid crystal material as photoelectric device has high resistivity, therefore, can be considered to desirable dielectric substance.Because consist of the orderly orientation of molecule and the form of extension elongation, liquid crystal has anisotropic dielectric characteristic and mono-symmetry, as a uniaxial crystal, the direction of its optical axis is consistent with the oriented of molecule.Under the effect of liquid crystal molecule at external electrical field, can form electric dipole.Under the formed moment loading of electric dipole, so that the orientation of liquid crystal molecule turns to the direction of electric field, can by changing the power of electric field, change the direction of the optical axis of liquid crystal.Therefore, can utilize this characteristic of liquid crystal to make optical phase modulator, tunable optic filter or other photoelectric devices are such as photoswitch and light intensity modulator etc.The general thickness that is used as the liquid crystal rete of photoelectric device is several microns to tens microns.The present invention formally utilizes liquid crystal this characteristics design of refractive index generation change to linearly polarized light under electric field action to form.
As shown in Figure 2, a kind of tunable fabry-perot filter 200 comprises the first catoptron 10, liquid crystal material 18, the second catoptron 20 and driving circuit 14, the first catoptron 10 and the second catoptron 20 are optically transparent material and are coated with the high reflectance multilayer dielectric film at logical light face outer surface 8 and 22, forming method Fabry-Perot-type (Fabry-Perot) chamber between two high reflectance multilayer dielectric films; Logical light face inboard at the first catoptron 10 is provided with optical anti-reflective film 12 and transparency electrode rete 16 from outside to inside successively; Logical light face inboard at the second catoptron 20 is provided with optical anti-reflective film 24, transparency electrode 26 and non-conducting material film 19 from outside to inside successively, and optical anti-reflective film 12 and optical anti-reflective film 24 are plated in respectively the logical light face inside surface of the first catoptron 10 and at the logical light face inside surface of the second catoptron 20.The thickness of non-conducting material film 19 is several microns to tens microns, covers other parts and the wide passage that leads to the catoptron edge of a millimeter except clear aperature, and purpose is to provide an exit passageway for being infused in liquid crystal unnecessary in the chamber.The cavity that it is tens microns in several microns roads that the inboard of this non-conducting material film and described first transparent optical material consists of a thickness is used for arranging liquid crystal material 18, what this liquid crystal material 18 adopted is nematic phase type liquid crystal, and the thickness of this liquid crystal material is about several microns to tens microns.Because therefore the thickness very little (several microns to tens microns) of liquid crystal, can make the tunable fabry-perot filter of intrinsic Free Spectral Range (i.e. the Free Spectral Range of the tunable optic filter without extra electric field the time).Two transparency electrodes are connected with driving circuit 14, and the driving signal that is produced by driving circuit forms the driving electric field between two transparency electrode retes; Utilize the effective refractive index n of electric field change Fabry-Perot intraluminal fluid crystalline substance, regulate light frequency ν and the Free Spectral Range (FSR) of the transmitted light of fabry-perot filter.Common driving electric field is that voltage is several volts, and frequency is several hertz of square-wave signals that arrive several KHz.
In Fig. 2, the light beam 6 that incides wave filter 200 is a branch of in the z-direction propagation, and polarization axle is the linearly polarized light of x direction, the refractive index of supposing light transparent materials is n, and two logical light faces 8 and 22 all plate highly reflecting films, suppose that reflectivity is R, thickness is D, then the Free Spectral Range FSR of wave filter 200 2Be respectively with the transmitted light frequency: Δ λ=λ 2/ (2nD+ Γ), or use frequency representation: Δ ν=c/ (2nD+ Γ), wherein c is the light velocity, the Γ representative changes light path that incident light produced by refraction by liquid crystal under DC Electric Field.The crest frequency of transmitted light can be expressed as: ν=mc/ (2nD+ Γ), and wherein m is order of interference, transmission light frequency broadband can be expressed as: Δ ν (FWHM)=c (1-R)/((2nD+ Γ) R 1/2), wherein c is the light velocity.
Fig. 3 provided a thickness be 10 microns nematic phase type liquid crystal under the driving of 1KHz square-wave voltage, to optical wavelength be 1550 nanometer optical wave phase places change concern synoptic diagram.The maximum light phase of about 6 π of can realizing postpones.According to above-mentioned formula, tunable fabry-perot filter 200 can obtain the tuning range of the transmitted light frequency of about 100GHz for the linearly polarized light near zero degree incident.Comparatively speaking, according to top formula, the change in the frequency band broadband of Free Spectral Range Δ ν and transmitted light is much smaller.The transmitted spectrum synoptic diagram of tunable fabry-perot filter as shown in Figure 6.
This shows that tunable fabry-perot filter 200 can be realized transmitted light crest frequency tuning in a big way and substantially do not change transmission light frequency broadband and Free Spectral Range under the effect of extra electric field.This characteristic is for in tunable fabry-perot filter 200 many application, and is significant such as laser instrument and frequency spectrum instrument etc.
Because tunable fabry-perot filter 200 requires the logical light face outside surface 8 of two optically transparent materials strictly parallel with 22 surface when making, and brings certain difficulty in this assembling for tuning fabry-perot filter 200.For this reason, we have designed another tunable fabry-perot filter 300, as shown in Figure 4.Tunable fabry-perot filter 300 comprises the first catoptron 32, the first optical glass sheet 36, liquid crystal material 41, the second optical glass sheet 50, the second catoptron 46 and driving circuit 56.The difference of wave filter 300 and wave filter 200 is, in the wave filter 300, at first liquid crystal material 41 is positioned between two optical clear glass sheet 36 and 50, above-mentioned two optical clear glass sheet 36 and 50 logical light face inboard are coated with respectively antireflection layer 38 and 52, transparency electrode 40 and 54, and the inboard of the thin layer 41 that one deck non-conducting material is set at optical clear glass sheet 50 and first optical clear glass sheet 36 cavity that to consist of a thickness be tens microns in several microns roads is used for placing liquid crystal material.Above-mentioned two optical clear glass sheet 36 and another logical light face of 50 be plated film not, optical clear glass sheet 36 and 50 and liquid crystal material 42 consist of a liquid crystal cell.In assembling during above-mentioned liquid crystal cell, do not need optical clear glass sheet 36 is kept strictly parallel with 50 face, like this, be easier to operation at assembling time ratio.The logical light face 30 of the first catoptron 32 is coated with high reflection film, and another logical light face does not have plated film.At first the first catoptron 32 is bonded together with optical clear glass sheet 36 usefulness index matching glue 34.The logical light face 44 of the second catoptron 46 is coated with high reflection film, and another logical light face does not have plated film.Then the second catoptron 46 usefulness index matching glue 48 are bonded together with optical clear glass sheet 50, in this process, just the face 30 and 44 of two optical clear glass sheet 32 and 46 two plating highly reflecting films need to be adjusted strictly parallel, with the effect of the multiple-beam interference of realizing Fabry-Perot etalon.Generally, because the identical optically transparent material that adopts, index matching glue 48 also is identical with index matching glue 34.This technical scheme is more convenient than the first design proposal in assembling.
It is emphasized that above-mentioned explanation only plays demonstration and description, is not an in detail exhaustively explanation, and also intention does not limit the present invention on the described concrete form.Through top description, all may occur many changes of the present invention and variation.Selected implementation only is in order better to explain the application in principle of the present invention and the reality.This explanation can make the people who is familiar with this field can better utilize the present invention, designs according to actual needs different implementations and changes accordingly.

Claims (10)

1. tunable fabry-perot filter, it is characterized in that: comprise the first catoptron, liquid crystal material, the second catoptron and driving circuit, the logical light face arranged outside high reflectance multilayer dielectric film of described the first catoptron, the inboard ground floor of the logical light face of the first catoptron arranges optical anti-reflective film, at this optical anti-reflective film transparency electrode is set; The arranged outside high reflectance multilayer dielectric film of described the second catoptron, the inboard ground floor of the second catoptron arranges optical anti-reflective film, at this optical anti-reflective film transparency electrode is set, in this transparency electrode thickness being set is several microns to tens microns non-conducting material film, cover the wide passage that leads to the catoptron edge of part except clear aperature and millimeter and with thickness of first catoptron inboard formation be several microns to tens microns cavity, liquid crystal material is placed in this cavity; Described driving circuit is connected on two transparency electrodes, logical light face outside keeping parallelism and the mechanics Fabry-Perot-type multiple-beam interference chamber of the logical light face outside of the first catoptron and the second catoptron.
2. a kind of tunable fabry-perot filter according to claim 1 is characterized in that: what described liquid crystal material adopted is nematic phase type liquid crystal.
3. a kind of tunable fabry-perot filter according to claim 1, it is characterized in that: described the first catoptron is optically transparent material and has identical optical index with the second catoptron.
4. according to claim 1 to 3 each described a kind of tunable fabry-perot filters, it is characterized in that: described driving circuit is that a kind of frequency is the square-wave pulse circuit that the hundreds of hertz arrives several KHz, and pulse voltage amplitude can be adjustable to 5 volts from 0 volt.
5. a tunable fabry-perot filter is characterized in that: comprise the first catoptron, the first optical clear glass sheet, liquid crystal material, the second optical clear glass sheet and the second catoptron; The logical light face arranged outside high reflectance multilayer dielectric film of described the first catoptron, the logical light face inboard of the first catoptron is the optical polish face; It is inboard that the first optical clear glass sheet is arranged on the first catoptron, the logical light face outside of the first optical clear glass sheet is the optical polish face, the inboard ground floor of the logical light face of the first optical clear glass sheet arranges optical anti-reflective film, at this optical anti-reflective film transparency electrode is set; The logical light face arranged outside high reflectance multilayer dielectric film of described the second catoptron, the logical light face inboard of the second catoptron is the optical polish face; It is inboard that the second optical clear glass sheet is arranged on the second catoptron, the logical light face outside of the second optical clear glass sheet is the optical polish face, the inboard ground floor of the second optical clear glass sheet arranges optical anti-reflective film, at this optical anti-reflective film transparency electrode is set, in this transparency electrode thickness being set is several microns to tens microns non-conducting material film, cover except clear aperature part and with thickness of first optical glass sheet inboard formation be several microns to tens microns cavity, liquid crystal material is placed in this cavity; Driving circuit is connected on the transparency electrode of the first optical clear glass sheet and the second optical clear glass sheet, logical light face outside keeping parallelism and the mechanics Fabry-Perot-type multiple-beam interference chamber of the logical light face outside of the first catoptron and the second catoptron.
6. a kind of tunable fabry-perot filter according to claim 5 is characterized in that: what described liquid crystal material adopted is nematic phase type liquid crystal.
7. a kind of tunable fabry-perot filter according to claim 5 is characterized in that: the outside of the inboard of described the first catoptron and the first optical clear glass sheet is with gluing being connected together of optics transparent refractive rate coupling; Gluing being connected together mated with optics transparent refractive rate in the outside of the inboard of described the second catoptron and the second optical clear glass sheet.
8. a kind of tunable fabry-perot filter according to claim 7, it is characterized in that: described the first catoptron, the second catoptron, the first optical clear glass sheet and the second optical clear glass sheet are optically transparent material and have identical optical index.
9. a kind of tunable fabry-perot filter according to claim 8, it is characterized in that: the refractive index of described optical clear index matching glue is identical with the optically transparent material refractive index.
10. according to claim 5 to 9 each described a kind of tunable fabry-perot filters, it is characterized in that: described driving circuit is that a kind of frequency is the square-wave pulse circuit that the hundreds of hertz arrives several KHz, and pulse voltage amplitude can be adjustable to 5 volts from 0 volt.
CN2012102002290A 2012-06-18 2012-06-18 Tunable Fabry-Perot filter Pending CN102955279A (en)

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CN2012102002290A CN102955279A (en) 2012-06-18 2012-06-18 Tunable Fabry-Perot filter
PCT/CN2012/078336 WO2013189108A1 (en) 2012-06-18 2012-07-09 Tunable fabry-pérot filter

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103915753A (en) * 2013-01-08 2014-07-09 佳能株式会社 Tunable Laser And Photoacoustic Device Including The Same
CN109343027A (en) * 2018-10-18 2019-02-15 华北水利水电大学 A kind of laser radar multi-dimensional scanning control device and control method
CN112097680A (en) * 2020-09-15 2020-12-18 安徽大学 Surface topography testing device and testing method based on multi-cavity FP interferometer

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US5113275A (en) * 1991-07-03 1992-05-12 Bell Communications Research, Inc. Temperature compensation of liquid-crystal etalon filters
JPH04140714A (en) * 1990-10-02 1992-05-14 Nippon Telegr & Teleph Corp <Ntt> Variable wavelength filter module
US5710655A (en) * 1993-07-21 1998-01-20 Apeldyn Corporation Cavity thickness compensated etalon filter
US5719654A (en) * 1993-04-30 1998-02-17 Videojet Systems International, Inc. Liquid crystal fabry perot filter device having a peak operating wavelength of 10.6 microns
CN1325502A (en) * 1998-11-02 2001-12-05 斯马特显示器株式会社 Unpolarization sensitive Fabry-Perot wavelength tunable filter with nematic liquid crystal
CN101063726A (en) * 2006-04-26 2007-10-31 胜华科技股份有限公司 Colourful optical filter

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04140714A (en) * 1990-10-02 1992-05-14 Nippon Telegr & Teleph Corp <Ntt> Variable wavelength filter module
US5113275A (en) * 1991-07-03 1992-05-12 Bell Communications Research, Inc. Temperature compensation of liquid-crystal etalon filters
US5719654A (en) * 1993-04-30 1998-02-17 Videojet Systems International, Inc. Liquid crystal fabry perot filter device having a peak operating wavelength of 10.6 microns
US5710655A (en) * 1993-07-21 1998-01-20 Apeldyn Corporation Cavity thickness compensated etalon filter
CN1325502A (en) * 1998-11-02 2001-12-05 斯马特显示器株式会社 Unpolarization sensitive Fabry-Perot wavelength tunable filter with nematic liquid crystal
CN101063726A (en) * 2006-04-26 2007-10-31 胜华科技股份有限公司 Colourful optical filter

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103915753A (en) * 2013-01-08 2014-07-09 佳能株式会社 Tunable Laser And Photoacoustic Device Including The Same
CN109343027A (en) * 2018-10-18 2019-02-15 华北水利水电大学 A kind of laser radar multi-dimensional scanning control device and control method
CN109343027B (en) * 2018-10-18 2022-11-25 华北水利水电大学 Laser radar multi-dimensional scanning control device and control method
CN112097680A (en) * 2020-09-15 2020-12-18 安徽大学 Surface topography testing device and testing method based on multi-cavity FP interferometer

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Application publication date: 20130306