SG11201900607WA - Process for the generation of thin inorganic films - Google Patents
Process for the generation of thin inorganic filmsInfo
- Publication number
- SG11201900607WA SG11201900607WA SG11201900607WA SG11201900607WA SG11201900607WA SG 11201900607W A SG11201900607W A SG 11201900607WA SG 11201900607W A SG11201900607W A SG 11201900607WA SG 11201900607W A SG11201900607W A SG 11201900607WA SG 11201900607W A SG11201900607W A SG 11201900607WA
- Authority
- SG
- Singapore
- Prior art keywords
- international
- generation
- inorganic films
- group
- ludwigshafen
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 5
- 125000003342 alkenyl group Chemical group 0.000 abstract 2
- 125000000217 alkyl group Chemical group 0.000 abstract 2
- 125000003118 aryl group Chemical group 0.000 abstract 2
- 239000003795 chemical substances by application Substances 0.000 abstract 2
- 125000003808 silyl group Chemical group [H][Si]([H])([H])[*] 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000000231 atomic layer deposition Methods 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 229910052736 halogen Inorganic materials 0.000 abstract 1
- 150000002367 halogens Chemical class 0.000 abstract 1
- 239000003446 ligand Substances 0.000 abstract 1
- 230000008520 organization Effects 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45553—Atomic layer deposition [ALD] characterized by the use of precursors specially adapted for ALD
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F15/00—Compounds containing elements of Groups 8, 9, 10 or 18 of the Periodic Table
- C07F15/06—Cobalt compounds
- C07F15/065—Cobalt compounds without a metal-carbon linkage
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Vapour Deposition (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP16186628 | 2016-08-31 | ||
| PCT/EP2017/071236 WO2018041695A1 (en) | 2016-08-31 | 2017-08-23 | Process for the generation of thin inorganic films |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11201900607WA true SG11201900607WA (en) | 2019-03-28 |
Family
ID=56888941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201900607WA SG11201900607WA (en) | 2016-08-31 | 2017-08-23 | Process for the generation of thin inorganic films |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US11180852B2 (he) |
| EP (1) | EP3507293B1 (he) |
| KR (1) | KR102467795B1 (he) |
| CN (1) | CN109641927B (he) |
| IL (1) | IL264704B (he) |
| SG (1) | SG11201900607WA (he) |
| TW (1) | TWI757325B (he) |
| WO (1) | WO2018041695A1 (he) |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6777565B2 (en) * | 2000-06-29 | 2004-08-17 | Board Of Trustees, The University Of Illinois | Organometallic compounds and their use as precursors for forming films and powders of metal or metal derivatives |
| KR100643637B1 (ko) * | 2005-01-25 | 2006-11-10 | 한국화학연구원 | 니켈 아미노알콕사이드 선구 물질을 사용하는 원자층침착법으로 니켈 산화물 박막을 제조하는 방법 |
| KR100704914B1 (ko) * | 2005-08-24 | 2007-04-06 | 한국화학연구원 | 니켈 아미노알콕사이드 선구 물질을 사용하여 금속 유기물화학 증착법으로 니켈 산화물 박막을 제조하는 방법 |
| KR20110137400A (ko) * | 2006-11-01 | 2011-12-22 | 더 스테이트 오브 오레곤 액팅 바이 앤드 쓰루 더 스테이트 보드 오브 하이어 에쥬케이션 온 비해프 오브 오레곤 스테이트 유니버시티 | 용액 처리된 박막들 및 적층체들, 상기 박막들 및 적층체들을 포함하는 장치들, 및 그들의 사용 방법 및 제조 방법 |
| US20090022661A1 (en) | 2007-07-16 | 2009-01-22 | Young David S F | Cancerous disease modifying antibodies |
| US20090226612A1 (en) | 2007-10-29 | 2009-09-10 | Satoko Ogawa | Alkaline earth metal containing precursor solutions |
| EP2707375A4 (en) | 2011-05-13 | 2015-01-07 | Greenct Canada | MONO-METALLIC GROUP-11 PRECURSOR COMPOUNDS AND USE THEREOF IN A METAL SEPARATION |
| TWI615497B (zh) * | 2013-02-28 | 2018-02-21 | 應用材料股份有限公司 | 金屬胺化物沉積前驅物及具有惰性安瓿襯裡之該前驅物的穩定化 |
| JP6734841B2 (ja) | 2014-08-04 | 2020-08-05 | ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ | 無機薄膜の生成方法 |
-
2017
- 2017-08-23 WO PCT/EP2017/071236 patent/WO2018041695A1/en unknown
- 2017-08-23 US US16/322,999 patent/US11180852B2/en active Active
- 2017-08-23 CN CN201780052824.5A patent/CN109641927B/zh active Active
- 2017-08-23 SG SG11201900607WA patent/SG11201900607WA/en unknown
- 2017-08-23 EP EP17755200.7A patent/EP3507293B1/en active Active
- 2017-08-23 KR KR1020197009120A patent/KR102467795B1/ko active IP Right Grant
- 2017-08-29 TW TW106129345A patent/TWI757325B/zh active
-
2019
- 2019-02-07 IL IL264704A patent/IL264704B/he unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TW201819677A (zh) | 2018-06-01 |
| KR102467795B1 (ko) | 2022-11-18 |
| IL264704B (he) | 2022-03-01 |
| CN109641927A (zh) | 2019-04-16 |
| CN109641927B (zh) | 2023-01-10 |
| US20190177844A1 (en) | 2019-06-13 |
| US11180852B2 (en) | 2021-11-23 |
| TWI757325B (zh) | 2022-03-11 |
| KR20190046916A (ko) | 2019-05-07 |
| EP3507293A1 (en) | 2019-07-10 |
| WO2018041695A1 (en) | 2018-03-08 |
| EP3507293B1 (en) | 2021-03-31 |
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