SG11201900146VA - Tool health monitoring and matching - Google Patents

Tool health monitoring and matching

Info

Publication number
SG11201900146VA
SG11201900146VA SG11201900146VA SG11201900146VA SG11201900146VA SG 11201900146V A SG11201900146V A SG 11201900146VA SG 11201900146V A SG11201900146V A SG 11201900146VA SG 11201900146V A SG11201900146V A SG 11201900146VA SG 11201900146V A SG11201900146V A SG 11201900146VA
Authority
SG
Singapore
Prior art keywords
data
international
california
matching
states
Prior art date
Application number
SG11201900146VA
Other languages
English (en)
Inventor
Rao Ravichander Jayantha
Gary Taan
Andreas Russ
Roger Davis
Bryant Mantiply
Swati Ramanathan
Karen Biagini
Bjorn Brauer
Original Assignee
Kla Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kla Tencor Corp filed Critical Kla Tencor Corp
Publication of SG11201900146VA publication Critical patent/SG11201900146VA/en

Links

Classifications

    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • G06T7/0004Industrial image inspection
    • G06T7/001Industrial image inspection using an image reference approach
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/406Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by monitoring or safety
    • G05B19/4065Monitoring tool breakage, life or condition
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G05B19/4187Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow by tool management
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00Testing or monitoring of control systems or parts thereof
    • G05B23/02Electric testing or monitoring
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/20Pc systems
    • G05B2219/26Pc applications
    • G05B2219/2602Wafer processing
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/20Special algorithmic details
    • G06T2207/20048Transform domain processing
    • G06T2207/20056Discrete and fast Fourier transform, [DFT, FFT]
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
    • G06T2207/30108Industrial image inspection
    • G06T2207/30148Semiconductor; IC; Wafer
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
    • G06T2207/30108Industrial image inspection
    • G06T2207/30164Workpiece; Machine component
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10Measuring as part of the manufacturing process
    • H01L22/12Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Quality & Reliability (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Biochemistry (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Financial Or Insurance-Related Operations Such As Payment And Settlement (AREA)
SG11201900146VA 2017-07-11 2017-07-26 Tool health monitoring and matching SG11201900146VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/646,808 US10360671B2 (en) 2017-07-11 2017-07-11 Tool health monitoring and matching
PCT/US2017/044030 WO2019013828A1 (en) 2017-07-11 2017-07-26 MONITORING AND MATCHING TOOL HEALTH

Publications (1)

Publication Number Publication Date
SG11201900146VA true SG11201900146VA (en) 2019-02-27

Family

ID=64999515

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201900146VA SG11201900146VA (en) 2017-07-11 2017-07-26 Tool health monitoring and matching

Country Status (7)

Country Link
US (1) US10360671B2 (zh)
KR (1) KR102222982B1 (zh)
CN (1) CN109564422B (zh)
IL (1) IL264107B (zh)
SG (1) SG11201900146VA (zh)
TW (1) TWI720227B (zh)
WO (1) WO2019013828A1 (zh)

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US10402524B2 (en) * 2017-05-08 2019-09-03 Globalfoundries Inc. Prediction of process-sensitive geometries with machine learning
DE102019209110A1 (de) * 2019-06-24 2020-12-24 Sms Group Gmbh Industrielle Anlage, insbesondere Anlage der metallerzeugenden Industrie oder der Aluminium- oder Stahlindustrie und Verfahren zum Betreiben einer industriellen Anlage, insbesondere einer Anlage der metallerzeugenden Industrie oder der Aluminium- oder Stahlindustrie
US11100221B2 (en) 2019-10-08 2021-08-24 Nanotronics Imaging, Inc. Dynamic monitoring and securing of factory processes, equipment and automated systems
WO2021168308A1 (en) * 2020-02-21 2021-08-26 Nanotronics Imaging, Inc. Systems, methods, and media for manufacturing processes
US11086988B1 (en) 2020-02-28 2021-08-10 Nanotronics Imaging, Inc. Method, systems and apparatus for intelligently emulating factory control systems and simulating response data
KR20220132604A (ko) * 2020-03-30 2022-09-30 주식회사 히타치하이테크 진단 시스템
TWI724871B (zh) * 2020-04-17 2021-04-11 逢甲大學 智慧製造與先進排程決策輔助資訊管理系統
CN111787082B (zh) * 2020-06-22 2021-11-23 珠海格力电器股份有限公司 一种多级业务数据上报的方法、设备及系统
WO2023014708A1 (en) * 2021-08-02 2023-02-09 Arch Systems Inc. Method for manufacturing system analysis and/or maintenance
US11868971B2 (en) 2021-08-02 2024-01-09 Arch Systems Inc. Method for manufacturing system analysis and/or maintenance
WO2023101969A1 (en) * 2021-11-30 2023-06-08 Aveva Software, Llc Server, systems and methods for industrial process visual anomaly reporting
CN114419837B (zh) * 2021-12-07 2023-09-26 攀枝花钢城集团米易瑞地矿业有限公司 一种安全生产预警系统及其预警方法
CN114637270B (zh) 2022-05-17 2022-08-23 成都秦川物联网科技股份有限公司 基于集散控制的智能制造工业物联网及控制方法
US11886177B1 (en) 2022-08-26 2024-01-30 Arch Systems Inc. System and method for manufacturing system data analysis
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CN116300771B (zh) * 2023-05-18 2023-08-11 深圳市致尚科技股份有限公司 智能柔性装配方法、装置及存储介质
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Also Published As

Publication number Publication date
IL264107B (en) 2022-01-01
KR20200018822A (ko) 2020-02-20
US20190019280A1 (en) 2019-01-17
CN109564422B (zh) 2021-03-09
IL264107A (en) 2019-05-30
US10360671B2 (en) 2019-07-23
KR102222982B1 (ko) 2021-03-03
TW201908896A (zh) 2019-03-01
TWI720227B (zh) 2021-03-01
WO2019013828A1 (en) 2019-01-17
CN109564422A (zh) 2019-04-02

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