SG11201811173VA - Cleanroom control system and method - Google Patents

Cleanroom control system and method

Info

Publication number
SG11201811173VA
SG11201811173VA SG11201811173VA SG11201811173VA SG11201811173VA SG 11201811173V A SG11201811173V A SG 11201811173VA SG 11201811173V A SG11201811173V A SG 11201811173VA SG 11201811173V A SG11201811173V A SG 11201811173VA SG 11201811173V A SG11201811173V A SG 11201811173VA
Authority
SG
Singapore
Prior art keywords
international
cleanroom
macclesfield
consultancy
cheshire
Prior art date
Application number
SG11201811173VA
Inventor
Robert Wallace
Shuji Chen
Original Assignee
Energy Efficiency Consultancy Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Energy Efficiency Consultancy Group Ltd filed Critical Energy Efficiency Consultancy Group Ltd
Publication of SG11201811173VA publication Critical patent/SG11201811173VA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L1/00—Enclosures; Chambers
    • B01L1/04—Dust-free rooms or enclosures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/30—Control or safety arrangements for purposes related to the operation of the system, e.g. for safety or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/62—Control or safety arrangements characterised by the type of control or by internal processing, e.g. using fuzzy logic, adaptive control or estimation of values
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/14—Process control and prevention of errors
    • B01L2200/143—Quality control, feedback systems
    • B01L2200/146—Employing pressure sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/14—Process control and prevention of errors
    • B01L2200/143—Quality control, feedback systems
    • B01L2200/147—Employing temperature sensors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/30—Control or safety arrangements for purposes related to the operation of the system, e.g. for safety or monitoring
    • F24F11/46—Improving electric energy efficiency or saving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2110/00—Control inputs relating to air properties
    • F24F2110/50—Air quality properties

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Combustion & Propulsion (AREA)
  • Mathematical Physics (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • Fuzzy Systems (AREA)
  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Air Conditioning Control Device (AREA)
  • Ventilation (AREA)
  • Medicinal Preparation (AREA)

Abstract

N O O GC O N O (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 04 January 2018 (04.01.2018) W I PO I PCT ~~~~~~~~~~~~~ 011101010VIIIOH olo 11o1 Em Eno iflo oimIE (10) International Publication Number WO 2018/002589 Al (51) International Patent Classification: F24F 3/16 (2006.01) F24F 11/00 (2006.01) (21) International Application Number: PCT/GB2017/051837 (22) International Filing Date: 23 June 2017 (23.06.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 1611107.2 27 June 2016 (27.06.2016) GB (71) Applicant: ENERGY EFFICIENCY CONSULTANCY GROUP LIMITED [GB/GB]; Suite 9, The Green, Foun- tain Street, Macclesfield, Cheshire SK10 1JN (GB). (72) Inventors: WALLACE, Robert; c/o Energy Efficiency Consultancy Group Limited, Suite 9, The Green, Fountain Street, Macclesfield, Cheshire SK10 1JN (GB). CHEN, Shuji; c/o Energy Efficiency Consultancy Group Limited, Suite 9, The Green, Fountain Street, Macclesfield, Cheshire SK10 UN (GB). (74) Agent: PRICHARD, Leslie Stephen; Culverstons, 20 Dawlish Road, Wirral, Merseyside CH61 2XP (GB). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, (54) Title: CLEANROOM CONTROL SYSTEM AND METHOD 100 .1 1 M. 6 (57) : The present invention relates to a control system for controlling air volume to maintain a desired concentration of airborne contamination in a cleanroom supplied by a HVAC system being operative to supply treated air to the cleanroom, comprising: sensing means for sensing a concentration of non-viable particles and/or viable particles in real time or near real time; and processing means for comparing the sensed concentration of non-viable particles and/or viable particles against the desired concentration of airborne contamination and outputting at least one control signal to the HVAC system based on the comparison. [Continued on next page] WO 2018/002589 Al MIDEDIM1111011111111111111111111111111111111111111111101111111110111110111111111111 TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))
SG11201811173VA 2016-06-27 2017-06-23 Cleanroom control system and method SG11201811173VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1611107.2A GB2551714A (en) 2016-06-27 2016-06-27 Cleanroom control system and method
PCT/GB2017/051837 WO2018002589A1 (en) 2016-06-27 2017-06-23 Cleanroom control system and method

Publications (1)

Publication Number Publication Date
SG11201811173VA true SG11201811173VA (en) 2019-01-30

Family

ID=56891618

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201811173VA SG11201811173VA (en) 2016-06-27 2017-06-23 Cleanroom control system and method

Country Status (10)

Country Link
US (1) US20190234631A1 (en)
EP (1) EP3475625B1 (en)
CN (1) CN109312941B (en)
AU (1) AU2017289701B2 (en)
DK (1) DK3475625T3 (en)
ES (1) ES2902870T3 (en)
GB (1) GB2551714A (en)
PL (1) PL3475625T3 (en)
SG (1) SG11201811173VA (en)
WO (1) WO2018002589A1 (en)

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US11745033B2 (en) * 2019-03-17 2023-09-05 Brett Patrick Process and apparatus to preclude unfiltered atmospheric gases and human respiration products including carbon-dioxide with carbon-14 from entering controlled greenhouse atmospheric gases
JP7325066B2 (en) * 2019-06-28 2023-08-14 パナソニックＩｐマネジメント株式会社 Air conditioning system and its control method
EP4042268A4 (en) * 2019-10-07 2023-01-18 Particle Measuring Systems, Inc. Particle detectors with remote alarm monitoring and control
CN110767917A (en) * 2019-11-21 2020-02-07 四川新敏雅电池科技有限公司 Automatic control system for battery production environment and control method of control system
BE1027785B1 (en) * 2019-11-25 2021-06-22 Advipro Bvba PROCEDURE FOR CONTROL OF PRESSURE DIFFERENCES, TEMPERATURE AND HUMIDITY IN A DUST-FREE ROOM
BE1027790B1 (en) * 2019-11-25 2021-06-23 Advipro Bvba DEVICE FOR MONITORING AND CONTROL OF A DUST-FREE SPACE
CN111693409B (en) * 2020-05-27 2023-08-15 北京蛙鸣华清环保科技有限公司 Gas and biological aerosol calibration system and method
FR3111282A1 (en) * 2020-06-12 2021-12-17 Airinspace Clean room with particle level monitoring
JP7487034B2 (en) 2020-07-28 2024-05-20 清水建設株式会社 DESIGN METHOD, DESIGN SYSTEM, AND PROGRAM
EP3985317A1 (en) * 2020-10-16 2022-04-20 Neuroplast Beheer B.V. A clean room system as well as a computer implemented method for controlling such clean room system
CN113110318A (en) * 2020-10-24 2021-07-13 陈彦均 Production index variable obtaining method based on cosmetics and readable signal medium
US11852364B2 (en) * 2021-03-18 2023-12-26 Life Balance Technologies Llc HVAC air balance monitoring and testing system
FR3129460B1 (en) * 2021-11-22 2024-02-02 Commissariat Energie Atomique Protection installation against pollutants present in the air within an industrial building
CN114413546A (en) * 2022-03-03 2022-04-29 四川科特空调净化有限责任公司 Intelligent environment protection system for low-temperature operation clean room
CN117742279B (en) * 2024-02-20 2024-05-07 广州诗妃生物科技有限公司 Cosmetic production control method and system

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US5195922A (en) * 1990-08-29 1993-03-23 Intelligent Enclosures Corporation Environmental control system
US5538471A (en) * 1994-11-15 1996-07-23 Innovative Air Systems, Inc. Dynamic particulate control system and method of operation
US6503462B1 (en) * 2001-06-19 2003-01-07 Honeywell International Inc. Smart air cleaning system and method thereof
KR20050007588A (en) * 2002-06-03 2005-01-19 가부시기가이샤 산교세이기 세이사꾸쇼 Clean assembling module device, production system formed with the module, industrial robot, and pollution spred prevention system
CN100432561C (en) * 2004-07-08 2008-11-12 乐金电子(天津)电器有限公司 Air volume control method of ventilation system
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US9285792B2 (en) * 2012-11-09 2016-03-15 Veltek Associates, Inc. Programmable logic controller-based control center and user interface for air sampling in controlled environments
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EP3584666B1 (en) * 2013-04-19 2021-12-01 Google LLC Controlling an hvac system in association with a demand-response event
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Also Published As

Publication number Publication date
AU2017289701B2 (en) 2020-12-03
EP3475625B1 (en) 2021-10-13
CN109312941A (en) 2019-02-05
WO2018002589A1 (en) 2018-01-04
CN109312941B (en) 2022-06-17
PL3475625T3 (en) 2022-04-19
GB2551714A (en) 2018-01-03
US20190234631A1 (en) 2019-08-01
AU2017289701A1 (en) 2019-01-31
DK3475625T3 (en) 2022-01-10
EP3475625A1 (en) 2019-05-01
ES2902870T3 (en) 2022-03-30
GB201611107D0 (en) 2016-08-10

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