PL3475625T3 - Cleanroom control system and method - Google Patents

Cleanroom control system and method

Info

Publication number
PL3475625T3
PL3475625T3 PL17734432T PL17734432T PL3475625T3 PL 3475625 T3 PL3475625 T3 PL 3475625T3 PL 17734432 T PL17734432 T PL 17734432T PL 17734432 T PL17734432 T PL 17734432T PL 3475625 T3 PL3475625 T3 PL 3475625T3
Authority
PL
Poland
Prior art keywords
control system
cleanroom
cleanroom control
control
Prior art date
Application number
PL17734432T
Other languages
Polish (pl)
Inventor
Robert Wallace
Shuji CHEN
Original Assignee
Energy Efficiency Consultancy Group Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Energy Efficiency Consultancy Group Limited filed Critical Energy Efficiency Consultancy Group Limited
Publication of PL3475625T3 publication Critical patent/PL3475625T3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L1/00—Enclosures; Chambers
    • B01L1/04—Dust-free rooms or enclosures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/30—Control or safety arrangements for purposes related to the operation of the system, e.g. for safety or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/62—Control or safety arrangements characterised by the type of control or by internal processing, e.g. using fuzzy logic, adaptive control or estimation of values
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/14—Process control and prevention of errors
    • B01L2200/143—Quality control, feedback systems
    • B01L2200/146—Employing pressure sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/14—Process control and prevention of errors
    • B01L2200/143—Quality control, feedback systems
    • B01L2200/147—Employing temperature sensors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/30—Control or safety arrangements for purposes related to the operation of the system, e.g. for safety or monitoring
    • F24F11/46—Improving electric energy efficiency or saving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2110/00—Control inputs relating to air properties
    • F24F2110/50—Air quality properties

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Fuzzy Systems (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Air Conditioning Control Device (AREA)
  • Ventilation (AREA)
  • Medicinal Preparation (AREA)
PL17734432T 2016-06-27 2017-06-23 Cleanroom control system and method PL3475625T3 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1611107.2A GB2551714A (en) 2016-06-27 2016-06-27 Cleanroom control system and method
PCT/GB2017/051837 WO2018002589A1 (en) 2016-06-27 2017-06-23 Cleanroom control system and method
EP17734432.2A EP3475625B1 (en) 2016-06-27 2017-06-23 Cleanroom control system and method

Publications (1)

Publication Number Publication Date
PL3475625T3 true PL3475625T3 (en) 2022-04-19

Family

ID=56891618

Family Applications (1)

Application Number Title Priority Date Filing Date
PL17734432T PL3475625T3 (en) 2016-06-27 2017-06-23 Cleanroom control system and method

Country Status (10)

Country Link
US (1) US20190234631A1 (en)
EP (1) EP3475625B1 (en)
CN (1) CN109312941B (en)
AU (1) AU2017289701B2 (en)
DK (1) DK3475625T3 (en)
ES (1) ES2902870T3 (en)
GB (1) GB2551714A (en)
PL (1) PL3475625T3 (en)
SG (1) SG11201811173VA (en)
WO (1) WO2018002589A1 (en)

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EP3645949A1 (en) * 2017-06-29 2020-05-06 American Air Filter Company, Inc. Sensor array environment for an air handling unit
US11745033B2 (en) * 2019-03-17 2023-09-05 Brett Patrick Process and apparatus to preclude unfiltered atmospheric gases and human respiration products including carbon-dioxide with carbon-14 from entering controlled greenhouse atmospheric gases
US10997845B2 (en) * 2019-10-07 2021-05-04 Particle Measuring Systems, Inc. Particle detectors with remote alarm monitoring and control
CN110767917A (en) * 2019-11-21 2020-02-07 四川新敏雅电池科技有限公司 Automatic control system for battery production environment and control method of control system
BE1027785B1 (en) * 2019-11-25 2021-06-22 Advipro Bvba PROCEDURE FOR CONTROL OF PRESSURE DIFFERENCES, TEMPERATURE AND HUMIDITY IN A DUST-FREE ROOM
BE1027790B1 (en) * 2019-11-25 2021-06-23 Advipro Bvba DEVICE FOR MONITORING AND CONTROL OF A DUST-FREE SPACE
CN111693409B (en) * 2020-05-27 2023-08-15 北京蛙鸣华清环保科技有限公司 Gas and biological aerosol calibration system and method
FR3111282A1 (en) * 2020-06-12 2021-12-17 Airinspace Clean room with particle level monitoring
JP7487034B2 (en) 2020-07-28 2024-05-20 清水建設株式会社 DESIGN METHOD, DESIGN SYSTEM, AND PROGRAM
EP3985317A1 (en) * 2020-10-16 2022-04-20 Neuroplast Beheer B.V. A clean room system as well as a computer implemented method for controlling such clean room system
CN112255983B (en) * 2020-10-24 2021-12-21 陈彦均 Big data processing method and production data processing center based on cosmetic production
US11852364B2 (en) * 2021-03-18 2023-12-26 Life Balance Technologies Llc HVAC air balance monitoring and testing system
FR3129460B1 (en) * 2021-11-22 2024-02-02 Commissariat Energie Atomique Protection installation against pollutants present in the air within an industrial building
CN114413546A (en) * 2022-03-03 2022-04-29 四川科特空调净化有限责任公司 Intelligent environment protection system for low-temperature operation clean room
CN117742279B (en) * 2024-02-20 2024-05-07 广州诗妃生物科技有限公司 Cosmetic production control method and system

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4530272A (en) * 1984-01-13 1985-07-23 International Business Machines Corporation Method for controlling contamination in a clean room
US5195922A (en) * 1990-08-29 1993-03-23 Intelligent Enclosures Corporation Environmental control system
US5538471A (en) * 1994-11-15 1996-07-23 Innovative Air Systems, Inc. Dynamic particulate control system and method of operation
US6503462B1 (en) * 2001-06-19 2003-01-07 Honeywell International Inc. Smart air cleaning system and method thereof
AU2003241884A1 (en) * 2002-06-03 2003-12-19 Sankyo Seiki Mfg. Co., Ltd. Clean assembling module device, production system formed with the module, industrial robot, and pollution spred prevention system
CN100432561C (en) * 2004-07-08 2008-11-12 乐金电子(天津)电器有限公司 Air volume control method of ventilation system
WO2006099125A2 (en) * 2005-03-10 2006-09-21 Aircuity, Inc. Dynamic control of dilution ventilation in one-pass, critical environments
US9581347B2 (en) * 2011-02-16 2017-02-28 John L. Fiorita, JR. Clean room control system and method
JP2012247078A (en) * 2011-05-25 2012-12-13 Omron Corp Method for controlling air quality adjustment, method for controlling ventilation air flow, and ventilation air flow controlling system
US9285792B2 (en) * 2012-11-09 2016-03-15 Veltek Associates, Inc. Programmable logic controller-based control center and user interface for air sampling in controlled environments
US9109981B2 (en) * 2013-03-15 2015-08-18 Aircuity, Inc. Methods and apparatus for indoor air contaminant monitoring
WO2014172374A1 (en) * 2013-04-19 2014-10-23 Nest Labs, Inc. Controlling an hvac system during demand response events
KR101489221B1 (en) * 2013-07-16 2015-02-04 주식회사 시스웍 Control device with clean air-conditioning functions
US9280884B1 (en) * 2014-09-03 2016-03-08 Oberon, Inc. Environmental sensor device with alarms
EP2995875B1 (en) * 2014-09-11 2018-06-20 Weiss Klimatechnik GmbH Method for operating a clean-room and control device
CN104482634A (en) * 2014-12-24 2015-04-01 上海市建筑科学研究院(集团)有限公司 Indoor air quality multi-parameter comprehensive control system

Also Published As

Publication number Publication date
EP3475625A1 (en) 2019-05-01
GB2551714A (en) 2018-01-03
EP3475625B1 (en) 2021-10-13
CN109312941B (en) 2022-06-17
CN109312941A (en) 2019-02-05
AU2017289701A1 (en) 2019-01-31
WO2018002589A1 (en) 2018-01-04
GB201611107D0 (en) 2016-08-10
ES2902870T3 (en) 2022-03-30
US20190234631A1 (en) 2019-08-01
AU2017289701B2 (en) 2020-12-03
DK3475625T3 (en) 2022-01-10
SG11201811173VA (en) 2019-01-30

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