SG11201807432YA - A piezoelectric thin film element - Google Patents

A piezoelectric thin film element

Info

Publication number
SG11201807432YA
SG11201807432YA SG11201807432YA SG11201807432YA SG11201807432YA SG 11201807432Y A SG11201807432Y A SG 11201807432YA SG 11201807432Y A SG11201807432Y A SG 11201807432YA SG 11201807432Y A SG11201807432Y A SG 11201807432YA SG 11201807432Y A SG11201807432Y A SG 11201807432YA
Authority
SG
Singapore
Prior art keywords
thin film
international
park
oxr
cambridge
Prior art date
Application number
SG11201807432YA
Inventor
Peter Mardilovich
Song-Won Ko
Susan Trolier-Mckinstry
Trent Borman
Wanlin Zhu
Original Assignee
Xaar Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xaar Technology Ltd filed Critical Xaar Technology Ltd
Publication of SG11201807432YA publication Critical patent/SG11201807432YA/en

Links

Classifications

    • H10N30/708—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
    • H10N30/078—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition by sol-gel deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/079—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing using intermediate layers, e.g. for growth control
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead based oxides
    • H10N30/8554—Lead zirconium titanate based
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type

Abstract

INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -, Organization 11111111011110111010101111101011111011101111011111111111011111111101111011111 International Bureau .. .... ..Yejd (10) International Publication Number ..... .....!;,,, (43) International Publication Date WO 2017/158344 Al 21 September 2017 (21.09.2017) WIP0 I PCT (51) International Patent Classification: (74) Agent: TLIP LTD; Leeds Innovation Centre, 103 Claren- HO1L 41/187 (2006.01) HO1L 41/318 (2013.01) don Road, Leeds Yorkshire LS2 9DF (GB). (21) International Application Number: (81) Designated States (unless otherwise indicated, for every PCT/GB2017/050695 kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, (22) International Filing Date: BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, 14 March 2017 (14.03.2017) DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, (25) Filing Language: English HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, (26) Publication Language: English MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, (30) Priority Data: NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, 16160657.9 16 March 2016 (16.03.2016) EP RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, (71) Applicant: XAAR TECHNOLOGY LIMITED ZA, ZM, ZW. [GB/GB]; 316 Science Park, Cambridge CB4 OXR (GB). (84) Designated States (unless otherwise indicated, for every (72) Inventors: MARDILOVICH, Peter; c/o Xaar Technology kind of regional protection available): ARIPO (BW, GH, Limited, 316 Science Park, Cambridge CB4 OXR (GB). GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, KO, Song-Won; c/o Xaar Technology Limited, 316 Sci- TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, ence Park, Cambridge CB4 OXR (GB). TRO- TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, LIER-MCKINSTRY, Susan; The Pennsylvania State DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, _ University, N-227 Millennium Science Complex, Univer- LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, — _ sity Park, Philadelphia, Pennsylvania 16802 (US). BOR- SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, MAN, Trent; c/o Xaar Technology Limited, 316 Science GW, KM, ML, MR, NE, SN, TD, TG). Park, Cambridge CB4 OXR (GB). ZHU, Wanlin; c/o Xaar Technology Limited, 316 Science Park, Cambridge CB4 Published: OXR (GB). — with international search report (Art. 21(3)) = = = (54) Title: A PIEZOELECTRIC THIN FILM ELEMENT = — i#2. RTP = = -1--- PH = --- RTP = _ 13 = ,.. 1 3 = •••---..................„ 1--- 133 to 13 ----- 13 z, = t--- 131 13 --- RTP _ \ 1z1 ' F1 ' I ii ,-, 7r 7r M cc kin ,—, N (57) : A method for the manufacture of a piezoelectric thin film element comprising a first electrode,a second electrode and 1-1 C one or more piezoelectric thin films there between which method comprises forming a piezoelectric thin film comprising PZT by a ei chemical solution deposition using three solutions wherein the forming of the PZT thin film comprises forming a bulk PZT thin film O layer from the three solutions, wherein each solution has a Zr/Ti content which is different from that of any other solution and at ,1 . least one solution has an excess lead content greater than that of any other solution, such that the bulk PZT thin film layer has a sub - .,. stantially uniform lead content and Zr/(Zr+Ti) ratio in its thickness direction.
SG11201807432YA 2016-03-16 2017-03-14 A piezoelectric thin film element SG11201807432YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP16160657.9A EP3220430B1 (en) 2016-03-16 2016-03-16 A piezoelectric thin film element
PCT/GB2017/050695 WO2017158344A1 (en) 2016-03-16 2017-03-14 A piezoelectric thin film element

Publications (1)

Publication Number Publication Date
SG11201807432YA true SG11201807432YA (en) 2018-09-27

Family

ID=55542508

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201807432YA SG11201807432YA (en) 2016-03-16 2017-03-14 A piezoelectric thin film element

Country Status (5)

Country Link
EP (1) EP3220430B1 (en)
JP (1) JP7138049B2 (en)
CN (1) CN108780840A (en)
SG (1) SG11201807432YA (en)
WO (1) WO2017158344A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2573534A (en) * 2018-05-08 2019-11-13 Xaar Technology Ltd An electrical element comprising a multilayer thin film ceramic member, an electrical component comprising the same, and uses thereof
CN110601673B (en) * 2019-08-12 2021-08-13 清华大学 Surface acoustic wave device and film bulk acoustic wave device based on hafnium-based ferroelectric film
JP7424113B2 (en) * 2020-03-06 2024-01-30 株式会社リコー Piezoelectric body and liquid ejection head

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH064699B2 (en) 1986-07-04 1994-01-19 有機合成薬品工業株式会社 1,2,2-Trimethyl-1-phenylpolydisilane and method for producing the same
EP0867952B8 (en) * 1997-03-27 2003-05-28 Seiko Epson Corporation Process of producing a piezoelectric element
US6080499A (en) * 1997-07-18 2000-06-27 Ramtron International Corporation Multi-layer approach for optimizing ferroelectric film performance
JP4182329B2 (en) 2001-09-28 2008-11-19 セイコーエプソン株式会社 Piezoelectric thin film element, manufacturing method thereof, and liquid discharge head and liquid discharge apparatus using the same
KR20040070564A (en) * 2003-02-04 2004-08-11 삼성전자주식회사 Ferroelectric capacitor and method of manufacturing the same
DE102007010239A1 (en) * 2007-03-02 2008-09-04 Epcos Ag Piezoelectric material comprising a metal containing material useful in piezoelectric building elements and in piezoelectric-multi layered actuators
JP2009252786A (en) * 2008-04-01 2009-10-29 Seiko Epson Corp Oxide source material solution, oxide film, piezoelectric element, method for forming oxide film and method for manufacturing piezoelectric element
JP5892406B2 (en) 2011-06-30 2016-03-23 株式会社リコー Electromechanical transducer, droplet discharge head, and droplet discharge device
JP2013063580A (en) * 2011-09-16 2013-04-11 Ricoh Co Ltd Method and apparatus for manufacturing inkjet recording apparatus
JP6156068B2 (en) * 2013-03-14 2017-07-05 株式会社リコー Piezoelectric thin film element, ink jet recording head, and ink jet image forming apparatus
JP2015065430A (en) * 2013-08-27 2015-04-09 三菱マテリアル株式会社 PNbZT THIN FILM MANUFACTURING METHOD
JP6347085B2 (en) * 2014-02-18 2018-06-27 アドバンストマテリアルテクノロジーズ株式会社 Ferroelectric film and manufacturing method thereof

Also Published As

Publication number Publication date
CN108780840A (en) 2018-11-09
JP2019508900A (en) 2019-03-28
EP3220430B1 (en) 2019-10-30
WO2017158344A1 (en) 2017-09-21
JP7138049B2 (en) 2022-09-15
EP3220430A1 (en) 2017-09-20

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