SG11201908429SA - Aluminum-scandium alloys with high uniformity and elemental content and articles thereof - Google Patents

Aluminum-scandium alloys with high uniformity and elemental content and articles thereof

Info

Publication number
SG11201908429SA
SG11201908429SA SG11201908429SA SG11201908429SA SG 11201908429S A SG11201908429S A SG 11201908429SA SG 11201908429S A SG11201908429S A SG 11201908429SA SG 11201908429S A SG11201908429S A SG 11201908429SA
Authority
SG
Singapore
Prior art keywords
ohio
international
heights
scandium
alloys
Prior art date
Application number
Inventor
Vitaliy Myasnikov
Heerden David Van
Matthew Komertz
Wieslaw Dylag
Arthur Testanero
Katharine Gardinier
Original Assignee
Materion Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Materion Corp filed Critical Materion Corp
Publication of SG11201908429SA publication Critical patent/SG11201908429SA/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D21/00—Casting non-ferrous metals or metallic compounds so far as their metallurgical properties are of importance for the casting procedure; Selection of compositions therefor
    • B22D21/02—Casting exceedingly oxidisable non-ferrous metals, e.g. in inert atmosphere
    • B22D21/04—Casting aluminium or magnesium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D21/00—Casting non-ferrous metals or metallic compounds so far as their metallurgical properties are of importance for the casting procedure; Selection of compositions therefor
    • B22D21/06—Casting non-ferrous metals with a high melting point, e.g. metallic carbides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D7/00—Casting ingots, e.g. from ferrous metals
    • B22D7/005—Casting ingots, e.g. from ferrous metals from non-ferrous metals
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0068—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for particular articles not mentioned below
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C21/00—Alloys based on aluminium
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/04—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material
    • H01J37/3429—Plural materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)

Abstract

Ece § 1 - - Vertical —Horizontal (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 20 September 2018 (20.09.2018) WI P0 I PCT omit VIII °nolo ominionoin Imo oimIE (10) International Publication Number WO 2018/169998 Al (51) International Patent Classification: C23C 14/34 (2006.01) B22D 21/06 (2006.01) B22D 7/00 (2006.01) (21) International Application Number: PCT/US2018/022237 (22) International Filing Date: 13 March 2018 (13.03.2018) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 62/470,646 13 March 2017 (13.03.2017) US (71) Applicant: MATERION CORPORATION [US/US]; 6070 Parkland Boulevard, Mayfield Heights, Ohio 44124 (US). (72) Inventors: MYASNIKOV, Vitaliy, V.; 6070 Parkland Boulevard, Mayfield Heights, Ohio 44124 (US). VAN HEERDEN, David, P.; 6070 Parkland Boulevard, May- field Heights, Ohio 44124 (US). KOMERTZ, Matthew, J.; 6070 Parkland Boulevard, Mayfield Heights, Ohio 44124 (US). DYLAG, Wieslaw; 6070 Parkland Boulevard, May- field Heights, Ohio 44124 (US). TESTANERO, Arthur, V.; 6070 Parkland Boulevard, Mayfield Heights, Ohio 44124 (US). GARDINIER, Katharine, S.; 6070 Parkland Boulevard, Mayfield Heights, Ohio 44124 (US). (74) Agent: KLEIN, Richard, M.; Fay Sharpe LLP, 1228 Eu- clid Avenue, 5th Floor, Cleveland, Ohio 44115 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, (54) Title: ALUMINUM-SCANDIUM ALLOYS WITH HIGH UNIFORMITY AND ELEMENTAL CONTENT AND ARTICLES THEREOF -8 -6 -4 -2 0 2 4 6 8 Radius, in FIG. 7 (57) : Disclosed herein are aluminum alloys with scandium as the alloying element. The alloys have a high scandium content, C:0) as measured by atomic percentage, and are highly uniform, as described herein. Methods of forming articles from these alloys are also \" disclosed, such articles including sputtering targets that can be used to form thin films containing high amounts of scandium. [Continued on next page] O WO 2018/169998 Al MIDEDIMOMOIDEIREEMOMOHIMIIIIMOIMEN UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))
SG11201908429S 2017-03-13 2018-03-13 Aluminum-scandium alloys with high uniformity and elemental content and articles thereof SG11201908429SA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201762470646P 2017-03-13 2017-03-13
PCT/US2018/022237 WO2018169998A1 (en) 2017-03-13 2018-03-13 Aluminum-scandium alloys with high uniformity and elemental content and articles thereof

Publications (1)

Publication Number Publication Date
SG11201908429SA true SG11201908429SA (en) 2019-10-30

Family

ID=61873949

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201908429S SG11201908429SA (en) 2017-03-13 2018-03-13 Aluminum-scandium alloys with high uniformity and elemental content and articles thereof

Country Status (9)

Country Link
US (2) US20180261439A1 (en)
EP (1) EP3596246A1 (en)
JP (1) JP7060610B2 (en)
KR (2) KR102614644B1 (en)
CN (1) CN110621805A (en)
IL (1) IL269333B1 (en)
SG (1) SG11201908429SA (en)
TW (1) TWI752189B (en)
WO (1) WO2018169998A1 (en)

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JP7203064B2 (en) * 2019-12-27 2023-01-12 株式会社フルヤ金属 sputtering target
US20220275499A1 (en) * 2019-07-31 2022-09-01 Furuya Metal Co., Ltd. Sputtering target
JP7203065B2 (en) * 2019-12-27 2023-01-12 株式会社フルヤ金属 sputtering target
JP7096291B2 (en) * 2019-11-26 2022-07-05 株式会社フルヤ金属 Sputtering target
CN110714142A (en) * 2019-11-06 2020-01-21 长沙迅洋新材料科技有限公司 Al-Sc-X multi-element alloy target and preparation method thereof
CN113373414B (en) * 2020-02-25 2023-10-27 湖南东方钪业股份有限公司 Preparation method and application of aluminum scandium alloy sputtering target
US20230203622A1 (en) 2020-06-05 2023-06-29 Materion Corporation Aluminum-Scandium Composite, Aluminum-Scandium Composite Sputtering Target And Methods Of Making
DE102020208782A1 (en) 2020-07-14 2022-01-20 Taniobis Gmbh Oxygen-poor AlSc alloy powders and methods for their production
US20220259703A1 (en) * 2021-02-18 2022-08-18 Sandy Janice Peters-Phillips Fabrication method and the monolithic binary rare-earth-aluminum, REE-Aloy, matrices thereof
CN113584333B (en) * 2021-07-14 2022-05-13 先导薄膜材料有限公司 Method for improving uniformity of aluminum-scandium alloy target material
WO2024220750A1 (en) 2023-04-20 2024-10-24 Materion Corporation Al-sc alloys and sputtering targets and processes for consolidating

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WO1997013885A1 (en) * 1995-10-12 1997-04-17 Kabushiki Kaisha Toshiba Wiring film, sputter target for forming the wiring film and electronic component using the same
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US8002912B2 (en) * 2008-04-18 2011-08-23 United Technologies Corporation High strength L12 aluminum alloys
US20100143177A1 (en) * 2008-12-09 2010-06-10 United Technologies Corporation Method for forming high strength aluminum alloys containing L12 intermetallic dispersoids
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Publication number Publication date
EP3596246A1 (en) 2020-01-22
CN110621805A (en) 2019-12-27
US20180261439A1 (en) 2018-09-13
JP7060610B2 (en) 2022-04-26
TW201839148A (en) 2018-11-01
KR102614644B1 (en) 2023-12-18
KR20190125447A (en) 2019-11-06
WO2018169998A1 (en) 2018-09-20
TWI752189B (en) 2022-01-11
JP2020514551A (en) 2020-05-21
KR20230173737A (en) 2023-12-27
IL269333A (en) 2019-11-28
IL269333B1 (en) 2024-09-01
US20240194463A1 (en) 2024-06-13

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