SG11201805682WA - Method and device for producing planar modifications in solid bodies - Google Patents

Method and device for producing planar modifications in solid bodies

Info

Publication number
SG11201805682WA
SG11201805682WA SG11201805682WA SG11201805682WA SG11201805682WA SG 11201805682W A SG11201805682W A SG 11201805682WA SG 11201805682W A SG11201805682W A SG 11201805682WA SG 11201805682W A SG11201805682W A SG 11201805682WA SG 11201805682W A SG11201805682W A SG 11201805682WA
Authority
SG
Singapore
Prior art keywords
modifications
solid
processing system
solid bodies
laser processing
Prior art date
Application number
SG11201805682WA
Other languages
English (en)
Inventor
Ralf Rieske
Christian Beyer
Christoph Günther
Jan Richter
Marko Swoboda
Original Assignee
Siltectra Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siltectra Gmbh filed Critical Siltectra Gmbh
Publication of SG11201805682WA publication Critical patent/SG11201805682WA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0064—Devices for the automatic drive or the program control of the machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/16—Composite materials, e.g. fibre reinforced
    • B23K2103/166—Multilayered materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Laser Beam Processing (AREA)
  • Silicon Compounds (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
SG11201805682WA 2016-01-05 2016-12-12 Method and device for producing planar modifications in solid bodies SG11201805682WA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016000051.1A DE102016000051A1 (de) 2016-01-05 2016-01-05 Verfahren und Vorrichtung zum planaren Erzeugen von Modifikationen in Festkörpern
PCT/EP2016/080667 WO2017118533A1 (de) 2016-01-05 2016-12-12 Verfahren und vorrichtung zum planaren erzeugen von modifikationen in festkörpern

Publications (1)

Publication Number Publication Date
SG11201805682WA true SG11201805682WA (en) 2018-08-30

Family

ID=57680223

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201805682WA SG11201805682WA (en) 2016-01-05 2016-12-12 Method and device for producing planar modifications in solid bodies

Country Status (13)

Country Link
US (2) US11059202B2 (ja)
EP (1) EP3400110B1 (ja)
JP (2) JP6818755B2 (ja)
KR (1) KR102125439B1 (ja)
CN (1) CN108472766B (ja)
BR (1) BR112018013599A2 (ja)
CA (1) CA3010394A1 (ja)
DE (1) DE102016000051A1 (ja)
MX (1) MX2018009285A (ja)
MY (1) MY191384A (ja)
SG (1) SG11201805682WA (ja)
WO (1) WO2017118533A1 (ja)
ZA (1) ZA201804352B (ja)

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DE102018005218A1 (de) * 2018-03-20 2019-09-26 Innolite Gmbh Verfahren und Vorrichtung zum Verändern eines Materials in einem Volumenkörper
DE102018119313B4 (de) * 2018-08-08 2023-03-30 Rogers Germany Gmbh Verfahren zum Bearbeiten eines Metall-Keramik-Substrats und Anlage zum Durchführen des Verfahrens
JP7203863B2 (ja) * 2018-12-21 2023-01-13 東京エレクトロン株式会社 基板処理装置及び基板処理方法
WO2021060365A1 (ja) 2019-09-27 2021-04-01 学校法人関西学院 半導体基板の製造方法及び半導体基板の製造装置
EP4036280A4 (en) 2019-09-27 2023-11-01 Kwansei Gakuin Educational Foundation METHOD FOR MANUFACTURING SIC SEMICONDUCTOR DEVICE, AND SIC SEMICONDUCTOR DEVICE
DE102019217021A1 (de) * 2019-11-05 2021-05-06 Photon Energy Gmbh Laserschneidverfahren und zugehörige Laserschneidvorrichtung
JP7443053B2 (ja) * 2019-12-26 2024-03-05 株式会社ディスコ レーザー加工装置
CN111420938B (zh) * 2020-04-28 2022-03-15 株洲国创轨道科技有限公司 一种多激光头智能化激光清洗方法及装置
CN114800899A (zh) * 2022-04-19 2022-07-29 广东高景太阳能科技有限公司 一种单晶硅片色差改善方法、系统、存储介质及电子设备

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Also Published As

Publication number Publication date
JP2021061435A (ja) 2021-04-15
KR102125439B1 (ko) 2020-06-22
CN108472766B (zh) 2021-02-09
MX2018009285A (es) 2019-02-28
US20210299910A1 (en) 2021-09-30
BR112018013599A2 (pt) 2019-01-08
EP3400110B1 (de) 2021-04-07
EP3400110A1 (de) 2018-11-14
US11059202B2 (en) 2021-07-13
DE102016000051A1 (de) 2017-07-06
JP2019500220A (ja) 2019-01-10
CA3010394A1 (en) 2017-07-13
KR20180100063A (ko) 2018-09-06
JP6818755B2 (ja) 2021-01-20
JP7271501B2 (ja) 2023-05-11
WO2017118533A1 (de) 2017-07-13
MY191384A (en) 2022-06-22
US20190366586A1 (en) 2019-12-05
ZA201804352B (en) 2019-06-26
CN108472766A (zh) 2018-08-31

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