BR112018013599A2 - método e dispositivo para criação planar de modificações em estados sólidos - Google Patents

método e dispositivo para criação planar de modificações em estados sólidos

Info

Publication number
BR112018013599A2
BR112018013599A2 BR112018013599A BR112018013599A BR112018013599A2 BR 112018013599 A2 BR112018013599 A2 BR 112018013599A2 BR 112018013599 A BR112018013599 A BR 112018013599A BR 112018013599 A BR112018013599 A BR 112018013599A BR 112018013599 A2 BR112018013599 A2 BR 112018013599A2
Authority
BR
Brazil
Prior art keywords
solid state
creation
planar
processing system
modifications
Prior art date
Application number
BR112018013599A
Other languages
English (en)
Inventor
Beyer Christian
Günther Christoph
Richter Jan
Swoboda Marko
Rieske Ralf
Original Assignee
Siltectra Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siltectra Gmbh filed Critical Siltectra Gmbh
Publication of BR112018013599A2 publication Critical patent/BR112018013599A2/pt

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0064—Devices for the automatic drive or the program control of the machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/16—Composite materials, e.g. fibre reinforced
    • B23K2103/166—Multilayered materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Laser Beam Processing (AREA)
  • Silicon Compounds (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Compositions Of Macromolecular Compounds (AREA)

Abstract

a presente invenção refere-se a um método para criar modificações em um estado sólido, em que uma região de orientação de trinca para guiar uma trinca para separar uma porção de estado sólido, em particular uma camada de estado sólido, a partir do corpo de estado sólido, é predeterminada pelas modificações. o método de acordo com a invenção compreende preferencialmente os passos: mover o estado sólido (1) em relação a um sistema de processamento a laser, então, gerando uma pluralidade de feixes de laser por meio do sistema de processamento a laser para criar pelo menos uma modificação, em que o sistema de processamento a laser é ajustado para a focalização definida dos feixes de laser continuamente como uma função de uma pluralidade de parâmetros, em particular pelo menos dois parâmetros. (figura 1)
BR112018013599A 2016-01-05 2016-12-12 método e dispositivo para criação planar de modificações em estados sólidos BR112018013599A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016000051.1A DE102016000051A1 (de) 2016-01-05 2016-01-05 Verfahren und Vorrichtung zum planaren Erzeugen von Modifikationen in Festkörpern
PCT/EP2016/080667 WO2017118533A1 (de) 2016-01-05 2016-12-12 Verfahren und vorrichtung zum planaren erzeugen von modifikationen in festkörpern

Publications (1)

Publication Number Publication Date
BR112018013599A2 true BR112018013599A2 (pt) 2019-01-08

Family

ID=57680223

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112018013599A BR112018013599A2 (pt) 2016-01-05 2016-12-12 método e dispositivo para criação planar de modificações em estados sólidos

Country Status (13)

Country Link
US (2) US11059202B2 (pt)
EP (1) EP3400110B1 (pt)
JP (2) JP6818755B2 (pt)
KR (1) KR102125439B1 (pt)
CN (1) CN108472766B (pt)
BR (1) BR112018013599A2 (pt)
CA (1) CA3010394A1 (pt)
DE (1) DE102016000051A1 (pt)
MX (1) MX2018009285A (pt)
MY (1) MY191384A (pt)
SG (1) SG11201805682WA (pt)
WO (1) WO2017118533A1 (pt)
ZA (1) ZA201804352B (pt)

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CN114423888A (zh) 2019-09-27 2022-04-29 学校法人关西学院 半导体衬底的制造方法和半导体衬底的制造装置
EP4036280A4 (en) 2019-09-27 2023-11-01 Kwansei Gakuin Educational Foundation METHOD FOR MANUFACTURING SIC SEMICONDUCTOR DEVICE, AND SIC SEMICONDUCTOR DEVICE
DE102019217021A1 (de) * 2019-11-05 2021-05-06 Photon Energy Gmbh Laserschneidverfahren und zugehörige Laserschneidvorrichtung
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CN111420938B (zh) * 2020-04-28 2022-03-15 株洲国创轨道科技有限公司 一种多激光头智能化激光清洗方法及装置
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Also Published As

Publication number Publication date
SG11201805682WA (en) 2018-08-30
KR102125439B1 (ko) 2020-06-22
US11059202B2 (en) 2021-07-13
EP3400110A1 (de) 2018-11-14
JP6818755B2 (ja) 2021-01-20
DE102016000051A1 (de) 2017-07-06
JP7271501B2 (ja) 2023-05-11
CN108472766A (zh) 2018-08-31
KR20180100063A (ko) 2018-09-06
JP2021061435A (ja) 2021-04-15
MY191384A (en) 2022-06-22
EP3400110B1 (de) 2021-04-07
US20210299910A1 (en) 2021-09-30
ZA201804352B (en) 2019-06-26
WO2017118533A1 (de) 2017-07-13
JP2019500220A (ja) 2019-01-10
MX2018009285A (es) 2019-02-28
CN108472766B (zh) 2021-02-09
US20190366586A1 (en) 2019-12-05
CA3010394A1 (en) 2017-07-13

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Legal Events

Date Code Title Description
B25G Requested change of headquarter approved

Owner name: SILTECTRA GMBH (DE)

B06U Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette]
B11B Dismissal acc. art. 36, par 1 of ipl - no reply within 90 days to fullfil the necessary requirements
B350 Update of information on the portal [chapter 15.35 patent gazette]