SG11201708455YA - Shutoff-opening device - Google Patents

Shutoff-opening device

Info

Publication number
SG11201708455YA
SG11201708455YA SG11201708455YA SG11201708455YA SG11201708455YA SG 11201708455Y A SG11201708455Y A SG 11201708455YA SG 11201708455Y A SG11201708455Y A SG 11201708455YA SG 11201708455Y A SG11201708455Y A SG 11201708455YA SG 11201708455Y A SG11201708455Y A SG 11201708455YA
Authority
SG
Singapore
Prior art keywords
shutoff
opening device
opening
Prior art date
Application number
SG11201708455YA
Other languages
English (en)
Inventor
Keisuke Ishibashi
Tsuyoshi Tanikawa
Michio Yamaji
Takashi Funakoshi
Hidenori Kiso
Tsuneyuki Okabe
Hiroaki Kikuchi
Kuniyasu Sakashita
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of SG11201708455YA publication Critical patent/SG11201708455YA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/30—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces specially adapted for pressure containers
    • F16K1/301—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces specially adapted for pressure containers only shut-off valves, i.e. valves without additional means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
    • F16K11/22—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members with an actuating member for each valve, e.g. interconnected to form multiple-way valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0236—Diaphragm cut-off apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K47/00—Means in valves for absorbing fluid energy
    • F16K47/08—Means in valves for absorbing fluid energy for decreasing pressure or noise level and having a throttling member separate from the closure member, e.g. screens, slots, labyrinths
    • F16K47/10—Means in valves for absorbing fluid energy for decreasing pressure or noise level and having a throttling member separate from the closure member, e.g. screens, slots, labyrinths in which the medium in one direction must flow through the throttling channel, and in the other direction may flow through a much wider channel parallel to the throttling channel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2215/00—Fluid-actuated devices for displacing a member from one position to another
    • F15B2215/30—Constructional details thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure
SG11201708455YA 2015-04-15 2016-04-05 Shutoff-opening device SG11201708455YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015082998A JP6539482B2 (ja) 2015-04-15 2015-04-15 遮断開放器
PCT/JP2016/061089 WO2016167154A1 (ja) 2015-04-15 2016-04-05 遮断開放器

Publications (1)

Publication Number Publication Date
SG11201708455YA true SG11201708455YA (en) 2017-11-29

Family

ID=57127087

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201708455YA SG11201708455YA (en) 2015-04-15 2016-04-05 Shutoff-opening device

Country Status (8)

Country Link
US (1) US10753497B2 (ja)
JP (1) JP6539482B2 (ja)
KR (1) KR102026006B1 (ja)
CN (1) CN107532741B (ja)
IL (1) IL254969B (ja)
SG (1) SG11201708455YA (ja)
TW (1) TWI672460B (ja)
WO (1) WO2016167154A1 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109891138B (zh) * 2016-10-24 2020-07-07 株式会社富士金 流体控制装置和使用该流体控制装置的制品制造方法
US20200284367A1 (en) * 2017-03-28 2020-09-10 Fujikin Incorporated Joint block and fluid control system using same
KR102242231B1 (ko) * 2017-06-22 2021-04-20 가부시키가이샤 후지킨 유량 제어 장치 및 유량 제어 장치의 유량 제어 방법
CN116697088A (zh) 2018-06-28 2023-09-05 斯瓦戈洛克公司 歧管主体、阀歧管组件、流体部件主体及相关制造方法
WO2020163190A1 (en) * 2019-02-05 2020-08-13 Swagelok Company Integrated actuator manifold for multiple valve assembly
JP7397470B2 (ja) 2019-12-26 2023-12-13 株式会社フジキン 流体制御装置
JP7393788B2 (ja) 2020-01-08 2023-12-07 アドバンス電気工業株式会社 弁構造体
DE102021108093A1 (de) * 2021-03-30 2022-10-06 Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft Membranventil

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US4356840A (en) * 1976-05-24 1982-11-02 Powell Industries, Inc. Digital fluid flow control system
US5605179A (en) * 1995-03-17 1997-02-25 Insync Systems, Inc. Integrated gas panel
JP3650859B2 (ja) * 1996-06-25 2005-05-25 忠弘 大見 遮断開放器およびこれを備えた流体制御装置
JP3737869B2 (ja) * 1997-05-13 2006-01-25 シーケーディ株式会社 プロセスガス供給ユニット
JP3871438B2 (ja) * 1997-06-06 2007-01-24 シーケーディ株式会社 プロセスガス供給ユニット
US6152175A (en) * 1997-06-06 2000-11-28 Ckd Corporation Process gas supply unit
US6363958B1 (en) * 1999-05-10 2002-04-02 Parker-Hannifin Corporation Flow control of process gas in semiconductor manufacturing
US6578435B2 (en) 1999-11-23 2003-06-17 Nt International, Inc. Chemically inert flow control with non-contaminating body
JP3455800B2 (ja) 2000-03-10 2003-10-14 株式会社東芝 遮断開放器
WO2003048617A1 (fr) * 2001-12-06 2003-06-12 Asahi Organic Chemicals Industry Co., Ltd. Soupape de collecteur
WO2003062490A2 (en) * 2002-01-17 2003-07-31 Sundew Technologies, Llc Ald apparatus and method
JP4832428B2 (ja) * 2005-04-21 2011-12-07 株式会社フジキン 流体制御装置
CN101198815B (zh) * 2005-08-10 2010-05-12 株式会社富士金 流体控制装置
JP4742762B2 (ja) * 2005-09-12 2011-08-10 株式会社フジキン 流体制御装置
US20070205384A1 (en) * 2006-03-02 2007-09-06 Smc Kabushiki Kaisha Flow Rate Control Apparatus
JP2008291941A (ja) * 2007-05-25 2008-12-04 Surpass Kogyo Kk 流体機器ユニット構造
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JP5301983B2 (ja) * 2008-12-26 2013-09-25 株式会社フジキン ガスケット型オリフィス及びこれを用いた圧力式流量制御装置
JP5508875B2 (ja) 2010-01-26 2014-06-04 株式会社フジキン 流体制御器および流量制御装置
KR101599344B1 (ko) * 2011-09-30 2016-03-03 가부시키가이샤 후지킨 가스 공급 장치
JP6012247B2 (ja) * 2012-04-27 2016-10-25 株式会社フジキン 流体制御装置
US8985152B2 (en) * 2012-06-15 2015-03-24 Novellus Systems, Inc. Point of use valve manifold for semiconductor fabrication equipment
KR101801674B1 (ko) * 2013-02-01 2017-11-27 가부시키가이샤 후지킨 개스킷 일체형 세라믹 오리피스 플레이트
JP5847106B2 (ja) * 2013-03-25 2016-01-20 株式会社フジキン 流量モニタ付圧力式流量制御装置。
JP6216389B2 (ja) * 2013-10-31 2017-10-18 株式会社フジキン 圧力式流量制御装置
JP6321972B2 (ja) * 2014-01-21 2018-05-09 株式会社フジキン 圧力式流量制御装置及びその流量制御開始時のオーバーシュート防止方法

Also Published As

Publication number Publication date
KR102026006B1 (ko) 2019-09-26
US20180112788A1 (en) 2018-04-26
IL254969B (en) 2019-12-31
CN107532741A (zh) 2018-01-02
WO2016167154A1 (ja) 2016-10-20
CN107532741B (zh) 2019-05-17
KR20170133504A (ko) 2017-12-05
TWI672460B (zh) 2019-09-21
US10753497B2 (en) 2020-08-25
TW201700888A (zh) 2017-01-01
JP6539482B2 (ja) 2019-07-03
JP2016205409A (ja) 2016-12-08
IL254969A0 (en) 2017-12-31

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