SG11201700713QA - Device inspection method, probe card, interposer, and inspection apparatus - Google Patents

Device inspection method, probe card, interposer, and inspection apparatus

Info

Publication number
SG11201700713QA
SG11201700713QA SG11201700713QA SG11201700713QA SG11201700713QA SG 11201700713Q A SG11201700713Q A SG 11201700713QA SG 11201700713Q A SG11201700713Q A SG 11201700713QA SG 11201700713Q A SG11201700713Q A SG 11201700713QA SG 11201700713Q A SG11201700713Q A SG 11201700713QA
Authority
SG
Singapore
Prior art keywords
interposer
probe card
inspection apparatus
inspection method
inspection
Prior art date
Application number
SG11201700713QA
Other languages
English (en)
Inventor
Tetsuya Kagami
Kanji Suzuki
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of SG11201700713QA publication Critical patent/SG11201700713QA/en

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
    • G11C29/08—Functional testing, e.g. testing during refresh, power-on self testing [POST] or distributed testing
    • G11C29/10—Test algorithms, e.g. memory scan [MScan] algorithms; Test patterns, e.g. checkerboard patterns 
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C29/56004—Pattern generation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C29/56008—Error analysis, representation of errors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C29/56012—Timing aspects, clock generation, synchronisation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C29/56016—Apparatus features
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C2029/5602—Interface to device under test

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Environmental & Geological Engineering (AREA)
  • Power Engineering (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
SG11201700713QA 2014-08-01 2015-06-10 Device inspection method, probe card, interposer, and inspection apparatus SG11201700713QA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014157753A JP2016035957A (ja) 2014-08-01 2014-08-01 デバイスの検査方法、プローブカード、インターポーザ及び検査装置
PCT/JP2015/066660 WO2016017292A1 (ja) 2014-08-01 2015-06-10 デバイスの検査方法、プローブカード、インターポーザ及び検査装置

Publications (1)

Publication Number Publication Date
SG11201700713QA true SG11201700713QA (en) 2017-03-30

Family

ID=55217197

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201700713QA SG11201700713QA (en) 2014-08-01 2015-06-10 Device inspection method, probe card, interposer, and inspection apparatus

Country Status (7)

Country Link
US (1) US20170256324A1 (enrdf_load_stackoverflow)
JP (1) JP2016035957A (enrdf_load_stackoverflow)
KR (1) KR20170038050A (enrdf_load_stackoverflow)
CN (1) CN106662613A (enrdf_load_stackoverflow)
SG (1) SG11201700713QA (enrdf_load_stackoverflow)
TW (1) TWI660183B (enrdf_load_stackoverflow)
WO (1) WO2016017292A1 (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6738236B2 (ja) * 2016-08-12 2020-08-12 東京エレクトロン株式会社 デバイス検査回路、デバイス検査装置及びプローブカード
US10333260B2 (en) * 2016-08-31 2019-06-25 Semiconductor Components Industries, Llc High contact resistance detection
JP2018194356A (ja) * 2017-05-15 2018-12-06 東京エレクトロン株式会社 デバイスの検査方法
US10677815B2 (en) * 2018-06-08 2020-06-09 Teradyne, Inc. Test system having distributed resources
KR102577446B1 (ko) * 2019-02-12 2023-09-11 삼성전자주식회사 테스트 보드 및 이의 제조 방법, 테스트 보드를 이용한 소자 검사 장비, 및 테스트 보드를 이용한 반도체 장치의 제조 방법
US11899550B2 (en) * 2020-03-31 2024-02-13 Advantest Corporation Enhanced auxiliary memory mapped interface test systems and methods
KR102797672B1 (ko) 2020-05-28 2025-04-17 삼성전자주식회사 번 인 보드 테스트 장치 및 시스템
US11486926B1 (en) * 2020-12-04 2022-11-01 Xilinx, Inc. Wearout card use count
FR3130066B1 (fr) * 2021-12-07 2024-07-19 Hprobe Dispositif et procédé de test de mémoire
KR20230155656A (ko) * 2022-05-03 2023-11-13 삼성디스플레이 주식회사 표시 장치의 검사 방법 및 표시 장치의 검사 장치

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0743426B2 (ja) * 1989-12-20 1995-05-15 三菱電機株式会社 超音波障害物センサ
CA2174784C (en) * 1996-04-23 1999-07-13 George Guozhen Zhong Automatic multi-probe pwb tester
JPH11311661A (ja) * 1998-04-30 1999-11-09 Nec Corp 半導体装置試験システムおよび半導体装置試験方法
JP2000346910A (ja) * 1999-06-07 2000-12-15 Yamada Denon Kk Ｉｃの多数並列同時テスト用測定装置
US6798225B2 (en) * 2002-05-08 2004-09-28 Formfactor, Inc. Tester channel to multiple IC terminals
DE10306620B4 (de) * 2003-02-18 2007-04-19 Infineon Technologies Ag Integrierte Testschaltung in einer integrierten Schaltung
JP3767829B1 (ja) * 2005-06-09 2006-04-19 エスティケイテクノロジー株式会社 半導体デバイスの検査装置
WO2008044391A1 (fr) * 2006-10-05 2008-04-17 Advantest Corporation Dispositif de contrôle, procédé de contrôle et procédé de fabrication
JP5193975B2 (ja) * 2009-09-04 2013-05-08 富士通株式会社 半導体試験回路、半導体試験用冶具、半導体試験装置及び半導体試験方法

Also Published As

Publication number Publication date
TW201617633A (zh) 2016-05-16
KR20170038050A (ko) 2017-04-05
US20170256324A1 (en) 2017-09-07
CN106662613A (zh) 2017-05-10
WO2016017292A1 (ja) 2016-02-04
JP2016035957A (ja) 2016-03-17
TWI660183B (zh) 2019-05-21

Similar Documents

Publication Publication Date Title
IL249468B (en) Test device, test method and method for preparing the device
SG11201705053YA (en) Device verification method and apparatus
SG11201700713QA (en) Device inspection method, probe card, interposer, and inspection apparatus
SG11201702570TA (en) Position accuracy inspecting method, position accuracy inspecting apparatus, and position inspecting unit
ZA201501154B (en) A portable testing apparatus and method
PL3213095T3 (pl) Urządzenie do testowania transformatora i sposób testowania transformatora
GB2542341B (en) Method and apparatus for pathogen testing
PL3113729T3 (pl) Urządzenie mechanoterapeutyczne i sposób pomiaru
SG11201607222RA (en) High-planarity probe card for a testing apparatus for electronic devices
GB2534277B (en) Friction testing apparatus and method
GB201505999D0 (en) Measurement method and apparatus
GB201510765D0 (en) Method, apparatus and electrochemical test device
SG11201706514VA (en) Method and apparatus for testing immune state
SG10201400508TA (en) Method and test system for testing wireless lan devices
ZA201702133B (en) Test device and method
GB2545541B (en) Sample testing apparatus and method
SG11201705393QA (en) Pre-alignment measuring device and method
GB201413080D0 (en) Apparatus and method for testing materials
GB201518615D0 (en) Test methods and apparatus
TWI560461B (en) Test apparatus and method for testing a device under test
GB201517837D0 (en) Measuring device and related method
GB201615078D0 (en) Measurement device and method
PL3358944T3 (pl) Aparat diagnostyczny i sposób badania
GB201500918D0 (en) Measuring apparatus and method
PL3031432T3 (pl) Sposób testowania tamponu i aparat