SG11201609845VA - Single- and/or multi-charged gas ion beam treatment method for producing an anti-glare sapphire material - Google Patents

Single- and/or multi-charged gas ion beam treatment method for producing an anti-glare sapphire material

Info

Publication number
SG11201609845VA
SG11201609845VA SG11201609845VA SG11201609845VA SG11201609845VA SG 11201609845V A SG11201609845V A SG 11201609845VA SG 11201609845V A SG11201609845V A SG 11201609845VA SG 11201609845V A SG11201609845V A SG 11201609845VA SG 11201609845V A SG11201609845V A SG 11201609845VA
Authority
SG
Singapore
Prior art keywords
producing
ion beam
treatment method
beam treatment
gas ion
Prior art date
Application number
SG11201609845VA
Other languages
English (en)
Inventor
Denis Busardo
Frédéric Guernalec
Original Assignee
Quertech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR1401172A external-priority patent/FR3021332B1/fr
Priority claimed from FR1402293A external-priority patent/FR3027120B1/fr
Application filed by Quertech filed Critical Quertech
Publication of SG11201609845VA publication Critical patent/SG11201609845VA/en

Links

Classifications

    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01FCOMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F7/00Compounds of aluminium
    • C01F7/02Aluminium oxide; Aluminium hydroxide; Aluminates
    • C01F7/021After-treatment of oxides or hydroxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48Ion implantation
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/16Oxides
    • C30B29/20Aluminium oxides
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/04After-treatment of single crystals or homogeneous polycrystalline material with defined structure using electric or magnetic fields or particle radiation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/12Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5826Treatment with charged particles
    • C23C14/5833Ion beam bombardment
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Theoretical Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
SG11201609845VA 2014-05-23 2015-03-23 Single- and/or multi-charged gas ion beam treatment method for producing an anti-glare sapphire material SG11201609845VA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1401172A FR3021332B1 (fr) 2014-05-23 2014-05-23 Procede de traitement par un faisceau d'ions d'un gaz mono et multicharges pour produire des materiaux en saphir synthetique antireflet
FR1402293A FR3027120B1 (fr) 2014-10-09 2014-10-09 Dalle tactile capacitive a haute transmission dans le domaine visible et inrayable
PCT/EP2015/056116 WO2015176850A1 (en) 2014-05-23 2015-03-23 Single- and/or multi-charged gas ion beam treatment method for producing an anti-glare sapphire material

Publications (1)

Publication Number Publication Date
SG11201609845VA true SG11201609845VA (en) 2016-12-29

Family

ID=52727135

Family Applications (2)

Application Number Title Priority Date Filing Date
SG11201609845VA SG11201609845VA (en) 2014-05-23 2015-03-23 Single- and/or multi-charged gas ion beam treatment method for producing an anti-glare sapphire material
SG11201609846RA SG11201609846RA (en) 2014-05-23 2015-05-22 Treatment method for modifying the reflected colour of a sapphire material surface

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG11201609846RA SG11201609846RA (en) 2014-05-23 2015-05-22 Treatment method for modifying the reflected colour of a sapphire material surface

Country Status (10)

Country Link
US (2) US10982312B2 (ru)
EP (2) EP3146086B1 (ru)
JP (2) JP6878009B2 (ru)
KR (2) KR102320294B1 (ru)
CN (2) CN106662958B (ru)
AU (2) AU2015263472B2 (ru)
CA (2) CA2949923A1 (ru)
EA (2) EA035316B9 (ru)
SG (2) SG11201609845VA (ru)
WO (2) WO2015176850A1 (ru)

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WO2017104443A1 (ja) * 2015-12-16 2017-06-22 株式会社アルバック サファイア基板の製造方法及びサファイア基板
TWI653266B (zh) * 2016-05-19 2019-03-11 香港浸會大學 藍寶石薄膜塗布基材
FR3062855B1 (fr) * 2017-02-14 2019-04-19 Sa Quertech Procede de traitement par un faisceau d ions pour produire un saphir antifreflet a haute transmittance resistant a la rayure.
EP3389078A1 (fr) * 2017-04-13 2018-10-17 The Swatch Group Research and Development Ltd Procédé d'implantation d'ions multichargés sur une surface d'un objet à traiter et installation pour la mise en oeuvre de ce procédé
FR3067275B1 (fr) 2017-06-07 2022-08-12 Timothee Boitouzet Procede de delignification partielle par voie supercritique ou subcritique et de remplissage d'un materiau ligno-cellulosique
EP3632876A1 (fr) * 2017-10-12 2020-04-08 The Swatch Group Research and Development Ltd Particules de poudre céramique revetue
EP3843123A1 (fr) * 2017-12-20 2021-06-30 The Swatch Group Research and Development Ltd Installation pour la mise en oeuvre d'un procédé d'implantation d'ions sur une surface d'un objet à traiter
FR3077895B1 (fr) * 2018-02-09 2020-02-28 Sas Woodoo Dispositif de detection tactile avec interface tactile en materiau composite
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EP3556911A1 (fr) * 2018-04-19 2019-10-23 Comadur S.A. Procédé de structuration d'un motif décoratif ou technique dans un objet réalisé en un matériau amorphe, semi-cristallin ou cristallin au moins partiellement transparent
WO2019238868A1 (en) * 2018-06-14 2019-12-19 Agc Glass Europe Reflectance reduction of substrate for transmitting infrared light
EP3636796A1 (fr) * 2018-10-10 2020-04-15 Comadur S.A. Procede de durcissement d'un traitement antireflet depose sur un substrat transparent et substrat transparent comprenant un traitement antireflet durci
TW202038326A (zh) * 2019-01-11 2020-10-16 日商索尼半導體解決方案公司 氧化物半導體膜之蝕刻方法
EP3696151A1 (fr) * 2019-02-18 2020-08-19 Rolex Sa Glace de montre colorée
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EA201892161A1 (ru) * 2016-04-12 2019-04-30 Агк Гласс Юроп Са Противоотражающая стеклянная подложка нейтрального цвета и способ ее изготовления
EA201892122A1 (ru) * 2016-04-12 2019-06-28 Агк Гласс Юроп Противоотражающая стеклянная подложка и способ ее изготовления
FR3062658B1 (fr) * 2017-02-03 2022-06-24 Sa Quertech Procede de traitement antireflectif et resistant a la rayure dans un saphir synthetique
FR3062855B1 (fr) * 2017-02-14 2019-04-19 Sa Quertech Procede de traitement par un faisceau d ions pour produire un saphir antifreflet a haute transmittance resistant a la rayure.
EP3389078A1 (fr) * 2017-04-13 2018-10-17 The Swatch Group Research and Development Ltd Procédé d'implantation d'ions multichargés sur une surface d'un objet à traiter et installation pour la mise en oeuvre de ce procédé

Also Published As

Publication number Publication date
JP2017516737A (ja) 2017-06-22
JP6878009B2 (ja) 2021-05-26
EA201692406A1 (ru) 2017-04-28
JP6626008B2 (ja) 2019-12-25
EA035316B9 (ru) 2020-07-27
AU2015261820B2 (en) 2020-09-10
EP3146086A1 (en) 2017-03-29
CA2949923A1 (en) 2015-11-26
KR102363999B1 (ko) 2022-02-16
WO2015177334A1 (en) 2015-11-26
WO2015176850A1 (en) 2015-11-26
AU2015263472A1 (en) 2016-12-08
US10196731B2 (en) 2019-02-05
KR20170008302A (ko) 2017-01-23
KR102320294B1 (ko) 2021-11-01
EA035316B1 (ru) 2020-05-27
CN106661724B (zh) 2020-06-30
KR20170008851A (ko) 2017-01-24
CN106662958B (zh) 2020-03-06
CN106662958A (zh) 2017-05-10
EP3146086B1 (en) 2019-10-02
US20170114442A1 (en) 2017-04-27
JP2017518440A (ja) 2017-07-06
AU2015263472B2 (en) 2019-06-27
EA201692408A1 (ru) 2017-04-28
US10982312B2 (en) 2021-04-20
EA034019B1 (ru) 2019-12-19
US20170107641A1 (en) 2017-04-20
AU2015261820A1 (en) 2016-12-08
SG11201609846RA (en) 2016-12-29
CN106661724A (zh) 2017-05-10
CA2949878A1 (en) 2015-11-26
EP3146416A1 (en) 2017-03-29

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