SG11201609223XA - Method for manufacturing large ceramic co-fired articles - Google Patents
Method for manufacturing large ceramic co-fired articlesInfo
- Publication number
- SG11201609223XA SG11201609223XA SG11201609223XA SG11201609223XA SG11201609223XA SG 11201609223X A SG11201609223X A SG 11201609223XA SG 11201609223X A SG11201609223X A SG 11201609223XA SG 11201609223X A SG11201609223X A SG 11201609223XA SG 11201609223X A SG11201609223X A SG 11201609223XA
- Authority
- SG
- Singapore
- Prior art keywords
- manufacturing large
- large ceramic
- fired articles
- fired
- articles
- Prior art date
Links
- 239000000919 ceramic Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
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- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
- C04B37/021—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles in a direct manner, e.g. direct copper bonding [DCB]
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/638—Removal thereof
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
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- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
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- H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
- H05B3/143—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds applied to semiconductors, e.g. wafers heating
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/68—Forming laminates or joining articles wherein at least one substrate contains at least two different parts of macro-size, e.g. one ceramic substrate layer containing an embedded conductor or electrode
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/706—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the metallic layers or articles
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/632—Organic additives
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/017—Manufacturing methods or apparatus for heaters
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
- Surface Heating Bodies (AREA)
- Treatment Of Sludge (AREA)
- Magnetic Ceramics (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201461989656P | 2014-05-07 | 2014-05-07 | |
PCT/EP2015/060126 WO2015169929A2 (en) | 2014-05-07 | 2015-05-07 | Improved method for manufacturing large co-fired articles |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201609223XA true SG11201609223XA (en) | 2016-12-29 |
Family
ID=53175489
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201609223XA SG11201609223XA (en) | 2014-05-07 | 2015-05-07 | Method for manufacturing large ceramic co-fired articles |
Country Status (7)
Country | Link |
---|---|
US (3) | US20170057880A1 (en) |
EP (1) | EP3140119A2 (en) |
JP (1) | JP2017526187A (en) |
KR (1) | KR102427144B1 (en) |
CN (1) | CN107207367A (en) |
SG (1) | SG11201609223XA (en) |
WO (1) | WO2015169929A2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017526187A (en) * | 2014-05-07 | 2017-09-07 | モーガン・アドヴァンスド・セラミックス・インコーポレイテッドMorgan Advanced Ceramics, Inc. | Improved method for producing large co-fired articles |
US10636690B2 (en) * | 2016-07-20 | 2020-04-28 | Applied Materials, Inc. | Laminated top plate of a workpiece carrier in micromechanical and semiconductor processing |
ES2966467T3 (en) * | 2018-05-08 | 2024-04-22 | Seco Tools Ab | A method of manufacturing a sintered body |
GB2583911A (en) | 2019-05-03 | 2020-11-18 | Morgan Advanced Ceramics Inc | High density corrosion resistant layer arrangement for electrostatic chucks |
Family Cites Families (31)
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US4786342A (en) * | 1986-11-10 | 1988-11-22 | Coors Porcelain Company | Method for producing cast tape finish on a dry-pressed substrate |
US5452177A (en) | 1990-06-08 | 1995-09-19 | Varian Associates, Inc. | Electrostatic wafer clamp |
US5411563A (en) * | 1993-06-25 | 1995-05-02 | Industrial Technology Research Institute | Strengthening of multilayer ceramic/glass articles |
JPH07302728A (en) * | 1994-04-28 | 1995-11-14 | Tokin Corp | Multilayered ceramic capacitor and its manufacture |
US5855995A (en) * | 1997-02-21 | 1999-01-05 | Medtronic, Inc. | Ceramic substrate for implantable medical devices |
US6529362B2 (en) * | 1997-03-06 | 2003-03-04 | Applied Materials Inc. | Monocrystalline ceramic electrostatic chuck |
JPH11204238A (en) * | 1998-01-08 | 1999-07-30 | Ngk Insulators Ltd | Ceramic heater |
US6447712B1 (en) * | 1998-12-28 | 2002-09-10 | University Of Washington | Method for sintering ceramic tapes |
US6174829B1 (en) * | 1999-01-07 | 2001-01-16 | Advanced Ceramic X Corp. | Ceramic dielectric compositions |
JP3228924B2 (en) * | 2000-01-21 | 2001-11-12 | イビデン株式会社 | Ceramic heater for semiconductor manufacturing and inspection equipment |
WO2001062686A1 (en) | 2000-02-24 | 2001-08-30 | Ibiden Co., Ltd. | Aluminum nitride sintered compact, ceramic substrate, ceramic heater and electrostatic chuck |
JP2002160974A (en) * | 2000-11-22 | 2002-06-04 | Ibiden Co Ltd | Aluminium nitride sintered compact and its manufacturing method, ceramic substrate and its manufacturing method |
CN1212655C (en) * | 2002-08-23 | 2005-07-27 | 清华大学 | Process for preparing zero-shrinkage low-temp, co-fired ceramic multi-layer baseplate |
EP1675446A4 (en) * | 2003-10-17 | 2009-12-02 | Hitachi Metals Ltd | Multi-layer ceramic substrate, method for manufacturng the same and electronic device using the same |
US7494557B1 (en) * | 2004-01-30 | 2009-02-24 | Sandia Corporation | Method of using sacrificial materials for fabricating internal cavities in laminated dielectric structures |
US20060162844A1 (en) * | 2005-01-26 | 2006-07-27 | Needes Christopher R | Multi-component LTCC substrate with a core of high dielectric constant ceramic material and processes for the development thereof |
JP5084155B2 (en) * | 2005-03-11 | 2012-11-28 | 日本碍子株式会社 | Alumina sintered body and method for manufacturing the same, electrostatic chuck using the alumina sintered body, and method for manufacturing the same |
WO2006099538A2 (en) * | 2005-03-15 | 2006-09-21 | Nanodynamics, Inc. | Devices with ultrathin structures and method of making same |
JP4590368B2 (en) * | 2006-03-24 | 2010-12-01 | 日本碍子株式会社 | Manufacturing method of electrostatic chuck |
TWI359473B (en) * | 2006-07-19 | 2012-03-01 | Ngk Insulators Ltd | Electrostatic chuck heater |
CN101347058B (en) * | 2006-08-07 | 2010-09-22 | 株式会社村田制作所 | Method of producing multilayer ceramic substrate |
WO2009002355A1 (en) * | 2007-06-25 | 2008-12-31 | Second Sight Medical Products, Inc. | Method for providing hermetic electrical feedthrough |
JP4600490B2 (en) * | 2008-02-25 | 2010-12-15 | Tdk株式会社 | Manufacturing method of multilayer electronic component |
TWI475594B (en) | 2008-05-19 | 2015-03-01 | Entegris Inc | Electrostatic chuck |
JP5332807B2 (en) * | 2009-03-30 | 2013-11-06 | Tdk株式会社 | Dielectric porcelain composition |
JP2011061049A (en) * | 2009-09-11 | 2011-03-24 | Ngk Spark Plug Co Ltd | Electrostatic chuck |
JP5557164B2 (en) * | 2010-03-24 | 2014-07-23 | Toto株式会社 | Electrostatic chuck |
JP5972630B2 (en) | 2011-03-30 | 2016-08-17 | 日本碍子株式会社 | Manufacturing method of electrostatic chuck |
JP5872998B2 (en) * | 2012-04-26 | 2016-03-01 | 日本特殊陶業株式会社 | Alumina sintered body, member comprising the same, and semiconductor manufacturing apparatus |
CN103351157A (en) * | 2013-06-26 | 2013-10-16 | 沈阳大学 | Technology for controlling sintering shrinkage and deformation of low-temperature co-firing ceramic substrate |
JP2017526187A (en) * | 2014-05-07 | 2017-09-07 | モーガン・アドヴァンスド・セラミックス・インコーポレイテッドMorgan Advanced Ceramics, Inc. | Improved method for producing large co-fired articles |
-
2015
- 2015-05-07 JP JP2017510763A patent/JP2017526187A/en active Pending
- 2015-05-07 US US15/308,417 patent/US20170057880A1/en not_active Abandoned
- 2015-05-07 CN CN201580022986.5A patent/CN107207367A/en active Pending
- 2015-05-07 WO PCT/EP2015/060126 patent/WO2015169929A2/en active Application Filing
- 2015-05-07 SG SG11201609223XA patent/SG11201609223XA/en unknown
- 2015-05-07 EP EP15722162.3A patent/EP3140119A2/en not_active Withdrawn
- 2015-05-07 KR KR1020167030939A patent/KR102427144B1/en active IP Right Grant
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2020
- 2020-03-31 US US16/836,720 patent/US11091398B2/en active Active
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2021
- 2021-03-01 US US17/189,149 patent/US11673842B2/en active Active
Also Published As
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KR102427144B1 (en) | 2022-07-28 |
EP3140119A2 (en) | 2017-03-15 |
US20210179500A1 (en) | 2021-06-17 |
CN107207367A (en) | 2017-09-26 |
US11091398B2 (en) | 2021-08-17 |
WO2015169929A2 (en) | 2015-11-12 |
US20200231509A1 (en) | 2020-07-23 |
JP2017526187A (en) | 2017-09-07 |
KR20170007739A (en) | 2017-01-20 |
WO2015169929A3 (en) | 2016-02-18 |
US20170057880A1 (en) | 2017-03-02 |
US11673842B2 (en) | 2023-06-13 |
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