SG11201501002QA - Ultra-high purity storage and dispensing of liquid reagents - Google Patents

Ultra-high purity storage and dispensing of liquid reagents

Info

Publication number
SG11201501002QA
SG11201501002QA SG11201501002QA SG11201501002QA SG11201501002QA SG 11201501002Q A SG11201501002Q A SG 11201501002QA SG 11201501002Q A SG11201501002Q A SG 11201501002QA SG 11201501002Q A SG11201501002Q A SG 11201501002QA SG 11201501002Q A SG11201501002Q A SG 11201501002QA
Authority
SG
Singapore
Prior art keywords
dispensing
ultra
high purity
liquid reagents
purity storage
Prior art date
Application number
SG11201501002QA
Other languages
English (en)
Inventor
Donn K Naito
Andy Krell
Mitchell W Mcferon
Steven Jackson
Joel Robison
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of SG11201501002QA publication Critical patent/SG11201501002QA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/02—Apparatus characterised by being constructed of material selected for its chemically-resistant properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/14—Linings or internal coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/38—Devices for discharging contents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D43/00—Lids or covers for rigid or semi-rigid containers
    • B65D43/02—Removable lids or covers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/70—Containers, packaging elements or packages, specially adapted for particular articles or materials for materials not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/02—Apparatus characterised by their chemically-resistant properties
    • B01J2219/0204—Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components
    • B01J2219/0245—Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components of synthetic organic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Chemical Vapour Deposition (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
SG11201501002QA 2012-08-09 2013-08-07 Ultra-high purity storage and dispensing of liquid reagents SG11201501002QA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261681510P 2012-08-09 2012-08-09
PCT/US2013/054025 WO2014025937A1 (en) 2012-08-09 2013-08-07 Ultra-high purity storage and dispensing of liquid reagents

Publications (1)

Publication Number Publication Date
SG11201501002QA true SG11201501002QA (en) 2015-04-29

Family

ID=50068554

Family Applications (2)

Application Number Title Priority Date Filing Date
SG11201501002QA SG11201501002QA (en) 2012-08-09 2013-08-07 Ultra-high purity storage and dispensing of liquid reagents
SG10201700892QA SG10201700892QA (en) 2012-08-09 2013-08-07 Ultra-High Purity Storage And Dispensing of Liquid Reagents

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG10201700892QA SG10201700892QA (en) 2012-08-09 2013-08-07 Ultra-High Purity Storage And Dispensing of Liquid Reagents

Country Status (8)

Country Link
US (1) US10358263B2 (ja)
EP (1) EP2883238A4 (ja)
JP (1) JP6490582B2 (ja)
KR (1) KR102082165B1 (ja)
CN (1) CN104769701B (ja)
SG (2) SG11201501002QA (ja)
TW (1) TWI622527B (ja)
WO (1) WO2014025937A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102082165B1 (ko) 2012-08-09 2020-02-27 엔테그리스, 아이엔씨. 초고순도 액체 반응물의 저장 및 분배
KR20180126556A (ko) 2016-03-31 2018-11-27 후지필름 가부시키가이샤 반도체 제조용 처리액, 반도체 제조용 처리액이 수용된 수용 용기, 패턴 형성 방법 및 전자 디바이스의 제조 방법
CN112198755B (zh) * 2020-10-20 2024-05-24 江苏高光半导体材料有限公司 一种掩膜版存储使用一体装载盒
KR102373773B1 (ko) * 2021-10-16 2022-03-14 엔비스아나(주) 케미컬 내압용기

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0689878B2 (ja) * 1985-05-17 1994-11-14 エアー・プロダクツ・アンド・ケミカルズ・インコーポレーテッド 使い捨て化学薬品容器およびその製造方法
US5046638A (en) * 1990-03-22 1991-09-10 Fluoroware, Inc. Seamless pressure vessel with recessed indentation
JPH04101838A (ja) * 1990-08-22 1992-04-03 Nippon Carbide Ind Co Inc 新規な容器及びそれに使用する資材
JP3559062B2 (ja) 1993-06-30 2004-08-25 三井・デュポンフロロケミカル株式会社 テトラフルオロエチレン／フルオロアルコキシトリフルオロエチレン共重合体組成物
JPH09318497A (ja) 1996-05-30 1997-12-12 Nomura Micro Sci Co Ltd 試料容器、超純水製造管理システムおよび超純水分析方法
JPH10119973A (ja) 1996-10-18 1998-05-12 Mitsubishi Gas Chem Co Inc サンプリング口を有する薬液容器
JPH10273193A (ja) * 1997-03-31 1998-10-13 Mitsubishi Gas Chem Co Inc 高純度薬液輸送用大型容器
US5928743A (en) 1997-07-24 1999-07-27 Purepak Technology Corporation Pressurized gas vessel having internal chemical surface
JP2001341794A (ja) * 2000-05-31 2001-12-11 Sumitomo Chem Co Ltd 超高純度過酸化水素水用容器
US6581649B2 (en) * 2001-07-13 2003-06-24 L'air Liquide - Societe Anonyme A'directiore Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Methods and apparatus for delivering high purity liquids with low vapor pressure
JP2005236050A (ja) * 2004-02-19 2005-09-02 Az Electronic Materials Kk 電子デバイス製造用薬液の供給装置および容器交換方法
JP5049342B2 (ja) 2006-06-02 2012-10-17 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド バリヤー・フルオロポリマー・フィルムをベースとするライナーおよびそれを含むパッケージング
US8002247B2 (en) * 2008-08-22 2011-08-23 Air Products And Chemicals, Inc. Cross purge valve and container assembly
US8162296B2 (en) * 2009-03-19 2012-04-24 Air Products And Chemicals, Inc. Splashguard for high flow vacuum bubbler vessel
KR102082165B1 (ko) 2012-08-09 2020-02-27 엔테그리스, 아이엔씨. 초고순도 액체 반응물의 저장 및 분배

Also Published As

Publication number Publication date
JP6490582B2 (ja) 2019-03-27
US10358263B2 (en) 2019-07-23
SG10201700892QA (en) 2017-04-27
TWI622527B (zh) 2018-05-01
CN104769701A (zh) 2015-07-08
TW201420435A (zh) 2014-06-01
KR102082165B1 (ko) 2020-02-27
EP2883238A1 (en) 2015-06-17
WO2014025937A1 (en) 2014-02-13
CN104769701B (zh) 2018-05-29
US20150210430A1 (en) 2015-07-30
JP2015534256A (ja) 2015-11-26
EP2883238A4 (en) 2016-03-16
KR20150046097A (ko) 2015-04-29

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