SG10201700892QA - Ultra-High Purity Storage And Dispensing of Liquid Reagents - Google Patents

Ultra-High Purity Storage And Dispensing of Liquid Reagents

Info

Publication number
SG10201700892QA
SG10201700892QA SG10201700892QA SG10201700892QA SG10201700892QA SG 10201700892Q A SG10201700892Q A SG 10201700892QA SG 10201700892Q A SG10201700892Q A SG 10201700892QA SG 10201700892Q A SG10201700892Q A SG 10201700892QA SG 10201700892Q A SG10201700892Q A SG 10201700892QA
Authority
SG
Singapore
Prior art keywords
dispensing
ultra
high purity
liquid reagents
purity storage
Prior art date
Application number
SG10201700892QA
Inventor
Donn K Naito
Andy Krell
Mitchell W Mcferon
Steven Jackson
Joel Robison
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of SG10201700892QA publication Critical patent/SG10201700892QA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/02—Apparatus characterised by being constructed of material selected for its chemically-resistant properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/14—Linings or internal coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/38—Devices for discharging contents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D43/00—Lids or covers for rigid or semi-rigid containers
    • B65D43/02—Removable lids or covers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/70—Containers, packaging elements or packages, specially adapted for particular articles or materials for materials not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/02—Apparatus characterised by their chemically-resistant properties
    • B01J2219/0204—Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components
    • B01J2219/0245—Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components of synthetic organic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
SG10201700892QA 2012-08-09 2013-08-07 Ultra-High Purity Storage And Dispensing of Liquid Reagents SG10201700892QA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201261681510P 2012-08-09 2012-08-09

Publications (1)

Publication Number Publication Date
SG10201700892QA true SG10201700892QA (en) 2017-04-27

Family

ID=50068554

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201700892QA SG10201700892QA (en) 2012-08-09 2013-08-07 Ultra-High Purity Storage And Dispensing of Liquid Reagents
SG11201501002QA SG11201501002QA (en) 2012-08-09 2013-08-07 Ultra-high purity storage and dispensing of liquid reagents

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG11201501002QA SG11201501002QA (en) 2012-08-09 2013-08-07 Ultra-high purity storage and dispensing of liquid reagents

Country Status (8)

Country Link
US (1) US10358263B2 (en)
EP (1) EP2883238A4 (en)
JP (1) JP6490582B2 (en)
KR (1) KR102082165B1 (en)
CN (1) CN104769701B (en)
SG (2) SG10201700892QA (en)
TW (1) TWI622527B (en)
WO (1) WO2014025937A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2883238A4 (en) 2012-08-09 2016-03-16 Entegris Inc Ultra-high purity storage and dispensing of liquid reagents
CN109071104B (en) 2016-03-31 2020-03-31 富士胶片株式会社 Processing liquid for semiconductor manufacturing, container for containing processing liquid for semiconductor manufacturing, pattern forming method, and method for manufacturing electronic device
CN112198755B (en) * 2020-10-20 2024-05-24 江苏高光半导体材料有限公司 Integrated loading box for storing and using mask
KR102373773B1 (en) * 2021-10-16 2022-03-14 엔비스아나(주) Chemical pressure container

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1986006705A1 (en) 1985-05-17 1986-11-20 J.C. Schumacher Company Disposable chemical container
US5046638A (en) * 1990-03-22 1991-09-10 Fluoroware, Inc. Seamless pressure vessel with recessed indentation
JPH04101838A (en) * 1990-08-22 1992-04-03 Nippon Carbide Ind Co Inc Novel container and material therefor
JP3559062B2 (en) 1993-06-30 2004-08-25 三井・デュポンフロロケミカル株式会社 Tetrafluoroethylene / fluoroalkoxytrifluoroethylene copolymer composition
JPH09318497A (en) 1996-05-30 1997-12-12 Nomura Micro Sci Co Ltd Sample vessel, ultrapure water preparation control system, and analyzing method of ultrapure water
JPH10119973A (en) 1996-10-18 1998-05-12 Mitsubishi Gas Chem Co Inc Chemical container having sampling port
JPH10273193A (en) * 1997-03-31 1998-10-13 Mitsubishi Gas Chem Co Inc Large-sized container for transport of high purity chemical
US5928743A (en) * 1997-07-24 1999-07-27 Purepak Technology Corporation Pressurized gas vessel having internal chemical surface
JP2001341794A (en) * 2000-05-31 2001-12-11 Sumitomo Chem Co Ltd Ultrapure hydrogen peroxide solution container
US6581649B2 (en) * 2001-07-13 2003-06-24 L'air Liquide - Societe Anonyme A'directiore Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Methods and apparatus for delivering high purity liquids with low vapor pressure
JP2005236050A (en) * 2004-02-19 2005-09-02 Az Electronic Materials Kk Apparatus for supplying chemical solutions for manufacturing electronic device and method for exchanging solution vessel
US8313821B2 (en) 2006-06-02 2012-11-20 Advanced Technology Materials, Inc. Barrier fluoropolymer film-based liners and packaging comprising same
US8002247B2 (en) * 2008-08-22 2011-08-23 Air Products And Chemicals, Inc. Cross purge valve and container assembly
US8162296B2 (en) * 2009-03-19 2012-04-24 Air Products And Chemicals, Inc. Splashguard for high flow vacuum bubbler vessel
EP2883238A4 (en) 2012-08-09 2016-03-16 Entegris Inc Ultra-high purity storage and dispensing of liquid reagents

Also Published As

Publication number Publication date
CN104769701A (en) 2015-07-08
SG11201501002QA (en) 2015-04-29
JP6490582B2 (en) 2019-03-27
JP2015534256A (en) 2015-11-26
EP2883238A1 (en) 2015-06-17
EP2883238A4 (en) 2016-03-16
WO2014025937A1 (en) 2014-02-13
US20150210430A1 (en) 2015-07-30
TWI622527B (en) 2018-05-01
US10358263B2 (en) 2019-07-23
KR20150046097A (en) 2015-04-29
KR102082165B1 (en) 2020-02-27
TW201420435A (en) 2014-06-01
CN104769701B (en) 2018-05-29

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