SG11201406122WA - Nanostructured material and method of making the same - Google Patents

Nanostructured material and method of making the same

Info

Publication number
SG11201406122WA
SG11201406122WA SG11201406122WA SG11201406122WA SG11201406122WA SG 11201406122W A SG11201406122W A SG 11201406122WA SG 11201406122W A SG11201406122W A SG 11201406122WA SG 11201406122W A SG11201406122W A SG 11201406122WA SG 11201406122W A SG11201406122W A SG 11201406122WA
Authority
SG
Singapore
Prior art keywords
making
same
nanostructured material
nanostructured
Prior art date
Application number
SG11201406122WA
Other languages
English (en)
Inventor
Ta-Hua Yu
Moses M David
Abdujabar K Dire
Albert I Everaerts
William Blake Kolb
Todd M Sandman
Shunsuke Suzuki
Scott A Walker
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of SG11201406122WA publication Critical patent/SG11201406122WA/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/16—Optical coatings produced by application to, or surface treatment of, optical elements having an anti-static effect, e.g. electrically conducting coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B2207/00—Coding scheme for general features or characteristics of optical elements and systems of subclass G02B, but not including elements and systems which would be classified in G02B6/00 and subgroups
    • G02B2207/101—Nanooptics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching
    • H01J2237/3343—Problems associated with etching
    • H01J2237/3345—Problems associated with etching anisotropy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/778—Nanostructure within specified host or matrix material, e.g. nanocomposite films
    • Y10S977/781—Possessing nonosized surface openings that extend partially into or completely through the host material

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Biophysics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Optical Elements (AREA)
SG11201406122WA 2012-03-26 2013-02-22 Nanostructured material and method of making the same SG11201406122WA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261615646P 2012-03-26 2012-03-26
PCT/US2013/027348 WO2013148031A1 (en) 2012-03-26 2013-02-22 Nanostructured material and method of making the same

Publications (1)

Publication Number Publication Date
SG11201406122WA true SG11201406122WA (en) 2014-10-30

Family

ID=47913545

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201406122WA SG11201406122WA (en) 2012-03-26 2013-02-22 Nanostructured material and method of making the same

Country Status (7)

Country Link
US (2) US9651715B2 (enrdf_load_stackoverflow)
EP (1) EP2831648B1 (enrdf_load_stackoverflow)
JP (2) JP6339557B2 (enrdf_load_stackoverflow)
KR (1) KR102047392B1 (enrdf_load_stackoverflow)
CN (1) CN104335078B (enrdf_load_stackoverflow)
SG (1) SG11201406122WA (enrdf_load_stackoverflow)
WO (1) WO2013148031A1 (enrdf_load_stackoverflow)

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WO2019074900A1 (en) * 2017-10-10 2019-04-18 Carlex Glass America, Llc ENHANCED ANTI-REFLECTIVE FUNCTIONAL COATING FOR GLAZING
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Also Published As

Publication number Publication date
KR102047392B1 (ko) 2019-11-21
CN104335078A (zh) 2015-02-04
EP2831648B1 (en) 2016-09-14
KR20140139074A (ko) 2014-12-04
US20170221680A1 (en) 2017-08-03
JP6339557B2 (ja) 2018-06-06
JP2018028693A (ja) 2018-02-22
WO2013148031A1 (en) 2013-10-03
CN104335078B (zh) 2017-08-08
US10126469B2 (en) 2018-11-13
JP2015514231A (ja) 2015-05-18
US9651715B2 (en) 2017-05-16
US20150077854A1 (en) 2015-03-19
JP6685987B2 (ja) 2020-04-22
EP2831648A1 (en) 2015-02-04

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