SG106636A1 - Purification of methylsilanes - Google Patents

Purification of methylsilanes

Info

Publication number
SG106636A1
SG106636A1 SG200105698A SG200105698A SG106636A1 SG 106636 A1 SG106636 A1 SG 106636A1 SG 200105698 A SG200105698 A SG 200105698A SG 200105698 A SG200105698 A SG 200105698A SG 106636 A1 SG106636 A1 SG 106636A1
Authority
SG
Singapore
Prior art keywords
methylsilanes
purification
Prior art date
Application number
SG200105698A
Other languages
English (en)
Inventor
J Helly Patrick
Akhtar Masud
Original Assignee
Boc Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Inc filed Critical Boc Group Inc
Publication of SG106636A1 publication Critical patent/SG106636A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages
    • C07F7/20—Purification, separation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
    • B01J20/10—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages
    • C07F7/0803—Compounds with Si-C or Si-Si linkages
    • C07F7/0805—Compounds with Si-C or Si-Si linkages comprising only Si, C or H atoms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Separation Of Gases By Adsorption (AREA)
SG200105698A 2000-09-19 2001-09-18 Purification of methylsilanes SG106636A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/664,627 US6444013B1 (en) 2000-09-19 2000-09-19 Purification of methylsilanes

Publications (1)

Publication Number Publication Date
SG106636A1 true SG106636A1 (en) 2004-10-29

Family

ID=24666762

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200105698A SG106636A1 (en) 2000-09-19 2001-09-18 Purification of methylsilanes

Country Status (6)

Country Link
US (1) US6444013B1 (fr)
EP (1) EP1188759A3 (fr)
JP (1) JP2002179689A (fr)
KR (1) KR20020022588A (fr)
SG (1) SG106636A1 (fr)
TW (1) TW575576B (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050054211A1 (en) * 2003-09-04 2005-03-10 Mindi Xu Purification of silicon-containing materials
DE102004030737A1 (de) * 2004-06-25 2006-01-12 Degussa Ag Verfahren und Vorrichtung zur Extraktion von Stoffen aus silanmodifizierten Füllstoffen
US7306652B2 (en) * 2005-03-30 2007-12-11 Parker-Hannifin Corporation Siloxane removal process
JP5861491B2 (ja) * 2012-02-21 2016-02-16 セントラル硝子株式会社 トリメチルシランの精製方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4099936A (en) * 1976-12-16 1978-07-11 Union Carbide Corporation Process for the purification of silane
IT1088820B (it) * 1977-12-05 1985-06-10 Smiel Spa Processo di purificazione di clorosilani impiegabili nella preparazione di silicio per elettronica
JPS59110697A (ja) 1982-12-17 1984-06-26 Shin Etsu Chem Co Ltd メチルハイドロジエンシラン類の製造方法
US4554141A (en) * 1984-05-14 1985-11-19 Ethyl Corporation Gas stream purification
FR2622564B1 (fr) * 1987-10-28 1990-02-02 Rhone Poulenc Chimie Procede de purification de silane
US4774347A (en) 1988-02-29 1988-09-27 Dow Corning Corporation Removal of chlorinated hydrocarbons from alkylsilanes
DE3843313A1 (de) * 1988-12-22 1990-06-28 Wacker Chemitronic Verfahren zur entfernung von gasfoermigen kontaminierenden, insbesondere dotierstoffverbindungen aus halogensilanverbindungen enthaltenden traegergasen
US4985580A (en) 1990-03-12 1991-01-15 Dow Corning Corporation Alkylation of silanes
US5206004A (en) * 1990-04-30 1993-04-27 Ethyl Corporation Silane compositions and process
US5290342A (en) * 1990-12-05 1994-03-01 Ethyl Corporation Silane compositions and process
US5493043A (en) 1995-05-15 1996-02-20 Dow Corning Corporation Method for redistribution and purification of methylsilanes
US5493042A (en) 1995-06-15 1996-02-20 Dow Corning Corporation Process for removing silanes from by-product stream
US5916245A (en) * 1996-05-20 1999-06-29 Advanced Technology Materials, Inc. High capacity gas storage and dispensing system
JPH101483A (ja) 1996-06-13 1998-01-06 Dow Corning Asia Ltd アリルシラン化合物の製造方法
JP3362632B2 (ja) * 1997-03-26 2003-01-07 信越化学工業株式会社 シラン類含有ガスの処理方法
US6027547A (en) * 1997-05-16 2000-02-22 Advanced Technology Materials, Inc. Fluid storage and dispensing vessel with modified high surface area solid as fluid storage medium
US5980608A (en) * 1998-01-07 1999-11-09 Advanced Technology Materials, Inc. Throughflow gas storage and dispensing system
JP3582983B2 (ja) * 1998-04-21 2004-10-27 三井化学株式会社 アルキルシラン類の精製方法
JP2000095784A (ja) * 1998-09-25 2000-04-04 Mitsui Chemicals Inc メチルシランの精製方法

Also Published As

Publication number Publication date
US6444013B1 (en) 2002-09-03
TW575576B (en) 2004-02-11
JP2002179689A (ja) 2002-06-26
EP1188759A3 (fr) 2003-12-10
EP1188759A2 (fr) 2002-03-20
KR20020022588A (ko) 2002-03-27

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