SG10202003859TA - Dividing method of workpiece, detection method of dimensions of chips, and cutting apparatus - Google Patents

Dividing method of workpiece, detection method of dimensions of chips, and cutting apparatus

Info

Publication number
SG10202003859TA
SG10202003859TA SG10202003859TA SG10202003859TA SG10202003859TA SG 10202003859T A SG10202003859T A SG 10202003859TA SG 10202003859T A SG10202003859T A SG 10202003859TA SG 10202003859T A SG10202003859T A SG 10202003859TA SG 10202003859T A SG10202003859T A SG 10202003859TA
Authority
SG
Singapore
Prior art keywords
workpiece
chips
dimensions
cutting apparatus
detection method
Prior art date
Application number
SG10202003859TA
Inventor
Sawaki Satoshi
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of SG10202003859TA publication Critical patent/SG10202003859TA/en

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
SG10202003859TA 2019-05-21 2020-04-27 Dividing method of workpiece, detection method of dimensions of chips, and cutting apparatus SG10202003859TA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019095164A JP7321643B2 (en) 2019-05-21 2019-05-21 Workpiece division method, tip size detection method, and cutting device

Publications (1)

Publication Number Publication Date
SG10202003859TA true SG10202003859TA (en) 2020-12-30

Family

ID=73453901

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10202003859TA SG10202003859TA (en) 2019-05-21 2020-04-27 Dividing method of workpiece, detection method of dimensions of chips, and cutting apparatus

Country Status (2)

Country Link
JP (1) JP7321643B2 (en)
SG (1) SG10202003859TA (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5134412B2 (en) * 2008-03-28 2013-01-30 株式会社ディスコ Chipping detection method
JP5187505B2 (en) * 2008-04-07 2013-04-24 株式会社東京精密 Dicing method
JP6085079B2 (en) * 2011-03-28 2017-02-22 東京エレクトロン株式会社 Pattern forming method, temperature control method for member in processing container, and substrate processing system
JP5825502B2 (en) * 2013-02-27 2015-12-02 株式会社東京精密 Probe device

Also Published As

Publication number Publication date
JP7321643B2 (en) 2023-08-07
JP2020191356A (en) 2020-11-26
TW202044366A (en) 2020-12-01

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