SG10201907189RA - Sensor target cover used in combination with liquid level detection sensor, wet processing device, substrate processing device, and sensor assembly - Google Patents

Sensor target cover used in combination with liquid level detection sensor, wet processing device, substrate processing device, and sensor assembly

Info

Publication number
SG10201907189RA
SG10201907189RA SG10201907189RA SG10201907189RA SG10201907189RA SG 10201907189R A SG10201907189R A SG 10201907189RA SG 10201907189R A SG10201907189R A SG 10201907189RA SG 10201907189R A SG10201907189R A SG 10201907189RA SG 10201907189R A SG10201907189R A SG 10201907189RA
Authority
SG
Singapore
Prior art keywords
processing device
sensor
combination
liquid level
level detection
Prior art date
Application number
SG10201907189RA
Other languages
English (en)
Inventor
Naoki Toyomura
Mitsuru Miyazaki
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of SG10201907189RA publication Critical patent/SG10201907189RA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
    • G01F23/28—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
    • G01F23/284—Electromagnetic waves
    • G01F23/292—Light, e.g. infrared or ultraviolet
    • G01F23/2921—Light, e.g. infrared or ultraviolet for discrete levels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
SG10201907189RA 2018-08-07 2019-08-05 Sensor target cover used in combination with liquid level detection sensor, wet processing device, substrate processing device, and sensor assembly SG10201907189RA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018148638A JP7080766B2 (ja) 2018-08-07 2018-08-07 液面検出センサと組み合わせて使用されるセンサターゲットカバー、および湿式処理装置

Publications (1)

Publication Number Publication Date
SG10201907189RA true SG10201907189RA (en) 2020-03-30

Family

ID=69405703

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201907189RA SG10201907189RA (en) 2018-08-07 2019-08-05 Sensor target cover used in combination with liquid level detection sensor, wet processing device, substrate processing device, and sensor assembly

Country Status (3)

Country Link
US (1) US11846536B2 (https=)
JP (1) JP7080766B2 (https=)
SG (1) SG10201907189RA (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112303883A (zh) * 2020-09-23 2021-02-02 温州水琳黛贸易有限公司 一种利用积蓄冷凝水节能环保的空调
JP7597472B2 (ja) * 2020-09-25 2024-12-10 東京エレクトロン株式会社 研削装置
US12198944B2 (en) * 2020-11-11 2025-01-14 Applied Materials, Inc. Substrate handling in a modular polishing system with single substrate cleaning chambers
JP6892176B1 (ja) * 2020-11-19 2021-06-23 不二越機械工業株式会社 ワーク洗浄装置
JP2024529124A (ja) * 2021-08-09 2024-08-01 エーシーエム リサーチ （シャンハイ） インコーポレーテッド 超臨界流体に基づく乾燥装置および方法
CN115771817B (zh) * 2022-11-23 2026-03-17 安徽启电自动化科技有限公司 一种投入式液位变送器收放结构

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0669177B2 (ja) 1983-02-23 1994-08-31 住友電気工業株式会社 伝送制御方式
JPH0329707Y2 (https=) * 1984-08-22 1991-06-25
US4946242A (en) * 1987-08-28 1990-08-07 Hitachi, Ltd. Optical part including integral combination of optical fiber and light emitting or receiving element and method of manufacturing the same
JPH1092781A (ja) * 1996-06-04 1998-04-10 Ebara Corp 基板の搬送方法及び装置
US5804831A (en) * 1997-05-15 1998-09-08 Casco Products Corporation Liquid level sensor for use in a hot, pressurized liquid
KR100354456B1 (ko) 1999-10-27 2002-09-30 주식회사 기가트론 습식세정 및 건조장치와 그 방법
WO2004008086A1 (en) * 2002-07-16 2004-01-22 Strube, Inc. Liquid level sensor using fluorescence in an optical waveguide
JP3673254B2 (ja) * 2002-11-14 2005-07-20 株式会社プレテック 液面検出センサ及び液面の検出方法
US7399985B2 (en) 2006-07-13 2008-07-15 Dataonline, L.L.C. Optical non-contact sensor for detecting material level in a container
IT1398785B1 (it) * 2009-08-04 2013-03-18 Illinois Tool Works Sensore ottico per rilevare il livello di liquido in un contenitore, in particolare per un contenitore asportabile per un elettrodomestico e lente e metodo associati
JP6295107B2 (ja) * 2014-03-07 2018-03-14 株式会社荏原製作所 基板処理システムおよび基板処理方法
JP2015230940A (ja) 2014-06-04 2015-12-21 株式会社荏原製作所 基板処理モジュール
TWI653701B (zh) * 2014-06-09 2019-03-11 日商荏原製作所股份有限公司 Substrate attaching and detaching portion for substrate holder, wet substrate processing device including the substrate attaching and detaching portion, substrate processing device, and substrate transfer method
US10246348B2 (en) * 2015-06-08 2019-04-02 Rayvio Corporation Ultraviolet disinfection system
KR102522960B1 (ko) 2015-12-14 2023-04-20 세메스 주식회사 기판 처리 장치

Also Published As

Publication number Publication date
JP2020024137A (ja) 2020-02-13
JP7080766B2 (ja) 2022-06-06
US20200049546A1 (en) 2020-02-13
US11846536B2 (en) 2023-12-19

Similar Documents

Publication Publication Date Title
SG10201907189RA (en) Sensor target cover used in combination with liquid level detection sensor, wet processing device, substrate processing device, and sensor assembly
SG11201910413WA (en) Biometric sensor with force detection and ultrasonic imaging capability
GB202204990D0 (en) Sensor device and system
HUE065261T2 (hu) Biometrikus szenzort tartalmazó elektronikus berendezés
EP3663814A4 (en) COVER DEVICE FOR NEAR-INFRARED SENSORS
EP3226946A4 (en) Sensor patch and sensing device having the same
EP3439103A4 (en) ANTENNA AND ELECTRONIC DEVICE THEREFOR
EP3236849A4 (en) Capacitive fingerprint sensing device with demodulation circuitry in sensing element
EP3252476A4 (en) Liquid surface inspection device, automated analysis device, and processing device
EP3730932A4 (en) LIQUID DETECTION SENSOR AND LIQUID DETECTION DEVICE
SG11202004111RA (en) Biometric sensor on portable device
EP3189282A4 (en) Water level detecting device and dehumidifier having the same
EP3634230A4 (en) FINGERPRINT SENSOR WITH LIVE CHARACTER DETECTION
EP3667559A4 (en) FINGERPRINT DETECTION DEVICE AND TERMINAL DEVICE WITH A FINGERPRINT RECOGNITION FUNCTION
SG11202011193PA (en) Detection device and detection system
EP3812729A4 (en) DEVICE FOR DETECTING SLIP
EP3875986A4 (en) SENSOR DEVICE AND DETECTION METHOD
ZA201708224B (en) Measuring device for determining physical properties, chemical properties, biological properties and/or materials in the surroundings of at least one sensor or of the at least one sensor as a component of the measuring device
GB2554153B (en) Human detection system, electronic device, human detecting sensor, and human detection method
EP3330702A4 (en) SENSOR SUBSTRATE AND SENSOR DEVICE
EP3457100A4 (en) CONTACT DETECTOR
EP3699568A4 (en) Force sensor and device comprising said sensor
FR3051553B1 (fr) Dispositif de detection capacitive et dispositif de mesure l'incluant
EP3523585A4 (en) LIFTING DEVICE AND REFRIGERATOR WITH IT
EP3736539A4 (en) SENSOR DEVICE