SG10201907040TA - Substrate processing system, substrate processing apparatus, and method of manufacturingsemiconductor device - Google Patents

Substrate processing system, substrate processing apparatus, and method of manufacturingsemiconductor device

Info

Publication number
SG10201907040TA
SG10201907040TA SG10201907040TA SG10201907040TA SG10201907040TA SG 10201907040T A SG10201907040T A SG 10201907040TA SG 10201907040T A SG10201907040T A SG 10201907040TA SG 10201907040T A SG10201907040T A SG 10201907040TA SG 10201907040T A SG10201907040T A SG 10201907040TA
Authority
SG
Singapore
Prior art keywords
substrate processing
manufacturingsemiconductor
processing apparatus
processing system
substrate
Prior art date
Application number
SG10201907040TA
Inventor
Akihiko Yoneda
Kazuhide Asai
tetsuyuki Maeda
Naoya Miyashita
Nobuyuki Miyakawa
Tadashi Okazaki
Hideo Yanase
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Publication of SG10201907040TA publication Critical patent/SG10201907040TA/en

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
SG10201907040TA 2018-08-03 2019-07-31 Substrate processing system, substrate processing apparatus, and method of manufacturingsemiconductor device SG10201907040TA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018146484 2018-08-03
JP2019127050A JP6804069B2 (en) 2018-08-03 2019-07-08 Manufacturing method of substrate processing system, substrate processing equipment and semiconductor equipment

Publications (1)

Publication Number Publication Date
SG10201907040TA true SG10201907040TA (en) 2020-03-30

Family

ID=69619508

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201907040TA SG10201907040TA (en) 2018-08-03 2019-07-31 Substrate processing system, substrate processing apparatus, and method of manufacturingsemiconductor device

Country Status (3)

Country Link
JP (1) JP6804069B2 (en)
SG (1) SG10201907040TA (en)
TW (1) TWI757618B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021144597A (en) * 2020-03-13 2021-09-24 株式会社荏原製作所 Alarm display device
JP2023056708A (en) * 2021-10-08 2023-04-20 東京エレクトロン株式会社 Etching processing system, etching quality prediction method and etching quality prediction program
CN116203909B (en) * 2023-03-31 2024-01-30 江苏杰太光电技术有限公司 Control method and system for automatic work of intelligent carrier plate

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002238029A (en) * 2001-12-28 2002-08-23 Mega Chips Corp Image storage device
JP2011014658A (en) * 2009-06-30 2011-01-20 Canon Anelva Corp Electronic component manufacturing apparatus, alarm notification program, and alarm notification system
JP6368453B2 (en) * 2011-06-24 2018-08-01 株式会社日立国際電気 Substrate processing apparatus, data analysis method and program for substrate processing apparatus

Also Published As

Publication number Publication date
TW202013572A (en) 2020-04-01
JP2020025088A (en) 2020-02-13
TWI757618B (en) 2022-03-11
JP6804069B2 (en) 2020-12-23

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