JP2011014658A - Electronic component manufacturing apparatus, alarm notification program, and alarm notification system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To locate a position where an abnormality has occurred, and to take measures against the cause of the abnormality in a short time.SOLUTION: An electronic component manufacturing apparatus which can display the occurrence of an abnormality in the apparatus on a display device and can inform the fact, detects the abnormality occurring in the apparatus, outputs alarm information for informing the occurrence of the abnormality, acquires the identification information for specifying the position where the abnormality has occurred based on the alarm information, and displays the whole image including the position where the abnormality has occurred and a detail image indicating the detail of the position, which are associated by the identification information on one screen of the display device simultaneously or continuously.

Description

  The present invention relates to an electronic component manufacturing apparatus, an alarm notification program, and an alarm notification system that manufacture electronic components such as semiconductors and magnetoresistive elements.

  Conventionally, when a failure occurs in the electronic component manufacturing apparatus, the name of the component (alarm generating module name) in which the failure has occurred, an alarm message, etc. are displayed on the PC screen mounted on the electronic component manufacturing apparatus. . From the display of the alarm generation module name and alarm message, the operator can investigate the specific location of the failure and identify the cause of the failure by empirical judgment or referring to the instruction manual of the corresponding module. Doing work.

  Patent Document 1 discloses a database of measures (coping methods) when an abnormality occurs in a device, and then allows the same action to be performed when a similar abnormality occurs. Disclosed is a technique for shortening.

JP 2003-243273 A

  However, the task of identifying the specific failure location and investigating the cause based on the alarm generation module name and alarm message display content, etc., is largely based on the empirical judgment of the operator, and the causes are combined. Then, it may take a long time to identify and resolve the cause. Although the technique of Patent Document 1 can also be used, it takes time to specify a place to take measures in an actual apparatus, and it is difficult to provide a measure method corresponding to all the causes of failure.

  Further, if the recovery time is lengthened, the device stop time is lengthened, resulting in a problem that the operation rate of the device is lowered.

  In view of the above prior art, the present invention specifies an electronic component manufacturing technology that identifies the position where an abnormality has occurred and can respond to the cause of the abnormality in a short time without relying on empirical judgment. For the purpose of provision.

An electronic component manufacturing apparatus according to one aspect of the present invention that achieves the above object is an electronic component manufacturing apparatus capable of displaying and notifying an occurrence of an abnormality occurring in the apparatus on a display device,
Detecting means for detecting an abnormality occurring in the device and outputting alarm information for informing the occurrence of the abnormality;
Obtaining means for obtaining identification information for identifying the position where the abnormality has occurred, based on the alarm information;
Display control means for displaying the entire image including the position where the abnormality has occurred and the detailed image indicating the details of the position, which are related by the identification information, simultaneously or continuously on one screen of the display device. And.

  According to the present invention, it is possible to easily identify the position where an abnormality has occurred without depending on empirical judgment, and it is possible to cope with the cause of the abnormality in a short time.

  Alternatively, by specifying the location where the failure occurs in a short time, man-hours such as cause investigation can be reduced, the apparatus stop time can be shortened, and the operating rate of the electronic component manufacturing apparatus can be improved.

It is a figure explaining the outline of the electronic component manufacturing apparatus concerning embodiment of this invention. It is a figure explaining the functional structure of an apparatus mounting. It is a figure explaining the outline processing flow of an alarm notification part. (A) shows an example of a screen for displaying alarm information, and (b) is a diagram exemplarily showing a correspondence table for associating an alarm ID with an alarm occurrence corresponding location ID. It is a figure explaining the general | schematic process flow of an alarm generation corresponding location display part. (A) is a figure which illustrates parallel display of a whole image and a detailed image, and (b) is a figure which illustrates taking a picture of the image memorized by the 1st storage device. It is a figure explaining the example of the screen transition of the subordinate screen subordinate to a main screen. It is a figure which shows illustartively the structure of the alarm generation corresponding location display information memorize | stored in a 1st memory | storage device. It is a figure which shows the structured data prescribed | regulated with respect to one alarm generation corresponding place ID. It is a figure explaining the display of a moving image. It is a figure which shows the schematic structure of an alarm notification system. It is a figure explaining the flow of processing in an alarm notification system.

  Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the drawings. However, the constituent elements described in this embodiment are merely examples, and the technical scope of the present invention is determined by the scope of claims, and is limited by the following individual embodiments. is not.

  With reference to FIG. 1, an outline of an electronic component manufacturing apparatus according to an embodiment of the present invention will be described. The electronic component manufacturing apparatus is a cluster type apparatus in which a plurality of process modules P and sensing modules S are connected to a transfer module Tr in which a transfer robot (not shown) is arranged. Although not shown, the transfer module Tr includes a substrate transfer robot, and can transfer a substrate between each process module P and the sensing module S.

  The process module P is a module for processing a substrate. For example, a film forming module capable of forming a film by sputtering, a CVD (Chemical Vapor Deposition) method, an etching module capable of performing dry etching, or the like, heating And temperature control modules that can be cooled. The process module P of the electronic component manufacturing apparatus according to the present embodiment is provided with substrate processing members such as an exhaust pump, a power source for plasma generation, and a gas introduction system according to the type thereof. It is connected to a control device such as a PLC (Programmable Logic Controller) for controlling and executing predetermined processing on the substrate. The sensing module S is provided with a displacement sensor or the like, and is used for detecting deformation of the end effector of the transport robot.

  Further, the transfer module Tr is connected to the substrate supply chamber SS via a load lock / unload lock module (LL / UL), from which a substrate can be introduced. The substrate supply chamber SS and the load lock / unload lock module (LL / UL) are separated by a partition wall (not shown), and the substrate supply chamber SS is in an atmospheric pressure environment (atmosphere side). An apparatus-mounted PC 100 is provided on the atmosphere side, and an alarm notification operation for notifying the operator that an abnormality has occurred is performed by displaying an alarm when a failure occurs in the electronic component manufacturing apparatus.

  The functional configuration of the apparatus mounting PC 100 will be described with reference to FIG. The device-mounted PC 100 includes a display device 201 such as a liquid crystal display capable of displaying an alarm to an operator, an input device 202 such as a mouse and a keyboard that can be input from the operator, a first storage device 203, and a second storage device 204. , Connected to the device controller 205.

  The device controller 205 controls each module constituting the electronic component manufacturing apparatus and executes predetermined processing on the substrate. Further, the device controller 205 receives status information in each module from various sensors (not shown) provided in each module, uses the received status information for control of each unit, and based on the status information. The occurrence of an abnormality or the like in the electronic component manufacturing apparatus is detected, and alarm information for notifying the apparatus on which the abnormality has occurred is output.

  When the device-mounted PC 100 receives the alarm information output from the device controller 205, it displays an alarm notification unit 211 that displays a predetermined alarm corresponding to the alarm information, and a specific position where the failure has occurred (location corresponding to the occurrence of the alarm). And an alarm generation corresponding location display section 212.

  In addition, the device-mounted PC 100 includes a network interface 220 for connecting to the network 1101 and can send and receive data to and from an external device or an external storage device connected on the network 1101. For example, the first storage device 203 or the second storage device 204 is connected to the network 1101, the whole image and the detailed image are acquired from the first storage device 203 on the network 1101 via the network interface 220, and an alarm is issued. The occurrence corresponding location display unit 212 can also display the acquired whole image and detailed image on one screen.

(Processing of alarm notification unit 211)
When an abnormality occurring in each module of the electronic component manufacturing apparatus is detected by various sensors provided in each module, alarm information for notifying the occurrence of the abnormality is output from the various sensors. The alarm notification unit 211 acquires identification information for specifying a position where an abnormality has occurred based on the alarm information. FIG. 3 shows a schematic processing flow of the alarm notification unit 211, and FIG. 4A shows an example of a screen (hereinafter also referred to as “alarm information screen”) that displays alarm information output by the alarm notification unit 211.

  In step S101, the alarm notification unit 211 receives alarm information transmitted from the device controller 205 when an abnormality or the like occurs. The alarm information received by the alarm notification unit 211 includes identification information (alarm ID) for specifying the type and position of the abnormality that has occurred, and information related to the date and time when the alarm occurred. The content of the alarm information is not limited to this example. For example, the device-mounted PC 100 receives the output signal of each sensor, and the alarm notification unit 211 of the device-mounted PC 100 identifies the position where the abnormality occurred based on the output of the sensor. The structure which acquires the identification information (alarm ID) for doing may be sufficient.

  In step S <b> 102, the alarm notification unit 211 displays an alarm information screen on the display device 201. In order to display the alarm information screen, the alarm notification unit 211 refers to the second storage device 204, acquires an alarm message or the like corresponding to the alarm ID as alarm display information, and displays the alarm message on the display device 201. As shown in FIG. 4A, the alarm display information includes, for example, an alarm generation module (for example, “process module F”) indicating a module name including a location where an abnormality or the like has occurred, an alarm ID, and an alarm generation cause. The alarm message (for example, “cryo trap supercooling”) that simply indicates the content of the alarm, the date and time of occurrence of the alarm, and the like are included. Such information is stored in the second storage device 204 in association with each alarm ID. In addition, an alarm occurrence corresponding location display button 401 for displaying an alarm occurrence corresponding location is displayed on a part of the alarm information screen (FIG. 4A). In some cases, it is difficult to take specific measures only with the information displayed on the alarm information screen. In such a case, when the operator presses the alarm occurrence corresponding location display button 401, a specific alarm occurrence in the alarm generating module displayed on the alarm information screen under the display control of the alarm occurrence corresponding location display unit 212 is displayed. Corresponding portions can be displayed on the display device 201.

  For example, when a plurality of alarm generation modules are displayed on the alarm information display screen (FIG. 4A), an alarm is generated by selecting one of the alarm generation modules by operating the input device 202. By pressing a corresponding location display button 401, an alarm generation corresponding location in the selected alarm generation module can be displayed on the display device 201.

  The process of step S103 becomes a standby state waiting for an input instruction (S103-No). In step S103, when an instruction for displaying the location corresponding to the occurrence of the alarm is acquired from the operator (S103-Yes), the process proceeds to step S104, and the alarm notification unit 211 identifies the location corresponding to the occurrence of the alarm with the alarm ID. It is converted into an alarm occurrence corresponding location ID which is specific information for this purpose. The alarm ID conversion process can be performed using, for example, a correspondence table between alarm IDs and alarm occurrence corresponding part IDs as shown in FIG. By using the correspondence table, it is possible to manage the alarm occurrence location display information independently. Therefore, when you add new alarm occurrence location display information by design change or device function addition, It becomes possible to add easily. Note that the alarm occurrence location ID may be included in the alarm information and output from the device controller 205 without using the correspondence table.

  In step S <b> 105, the alarm notification unit 211 outputs a display instruction for an alarm occurrence corresponding location including the alarm occurrence corresponding location ID to the alarm occurrence corresponding location display unit 212.

(Alarm occurrence corresponding part display unit 212)
Next, with reference to FIGS. 5 to 10, processing of the alarm occurrence corresponding part display unit 212 in the present embodiment will be described. The alarm occurrence corresponding part display unit 212 can display where the event (notification target event) that caused the occurrence of the alarm occurred in the apparatus (occurrence corresponding part of the notification target event). In addition to the location that caused the occurrence of the alarm, the location corresponding to the occurrence of the notification target event is, for example, a location where measures should be taken to eliminate the cause of the occurrence of the alarm (such as a location where the failure occurred) There may be.

  FIG. 5 is a flowchart for explaining a schematic processing flow of the alarm occurrence corresponding part display unit 212. In step S201, upon receiving the display command output from the alarm notification unit 211, the alarm occurrence corresponding location display unit 212 first displays the alarm occurrence location display information based on the alarm occurrence corresponding location ID included in the display command. Obtained from the storage device 203. The alarm occurrence location display information includes, for example, an overall image showing an overall display including an alarm occurrence location causing an abnormality or the like, and a detailed image showing the alarm occurrence location in detail. Here, the “entire image” is not necessarily limited to the one that displays the entire apparatus, and may be any that displays a wider part of the apparatus than the “detailed image”.

  In step S202, the alarm occurrence corresponding part display unit 212 displays the entire image and the detailed image on the screen of the display device 201 based on the alarm occurrence part display information acquired in the previous step S201.

  FIG. 6A is a diagram exemplarily showing an entire image 601 and a detailed image 602 by display control of the alarm occurrence corresponding part display unit 212, and the alarm occurrence corresponding part display unit 212 includes an entire image 601 and a detailed image 602. Are displayed on the same screen in parallel. By displaying in parallel in this way, the operator can grasp the outline of the location where the abnormality or the like has occurred from the entire image 601 regardless of empirical judgment, and can view the location where the specific abnormality or the like has occurred from the detailed screen 602. It becomes possible to grasp easily.

  The entire image 601 is a real image (still image or moving image) of the device viewed from the front direction. A star is blinkingly displayed at the approximate position of the location corresponding to the alarm occurrence so that the approximate location of the location corresponding to the alarm occurrence can be recognized. It is displayed. Further, the detailed image 602 is an actual image that shows the location corresponding to the occurrence of the alarm in more detail than the entire image 601. Specifically, a still image or a moving image obtained by shooting the location corresponding to the occurrence of the alarm closer to the overall image 601 is displayed. It is displayed.

  Further, in the detailed image 602, a still image or a moving image is displayed, and information relating to an alarm occurrence or information relating to the occurrence of an alarm and a link to the information are displayed.

  In the example of FIG. 6A, “alarm occurrence corresponding part ID”, “alarm generation corresponding part name”, “message”, and a link to information for supplementing the detailed image such as an enlarged image of the detailed image are provided. indicate. In FIG. 6A, the display of the “matching box”, which is the display of the name of the location corresponding to the occurrence of the alarm, is linked to the enlarged image page of the detailed image, and the display of the matching box is selected (clicked) by the input device 202. ), The detailed image 602 can be switched to an enlarged image.

  The “message” displays, for example, a failure countermeasure method for guiding the operator to eliminate the cause of occurrence of the alarm, detailed status information regarding the location where the alarm is generated, a countermeasure for the failure, and the like. By displaying the message, it is possible to guide the operator's action (coping method) for recovery. In the example of FIG. 6A, “Check connector” is displayed, which indicates that there is an alarm cause in the connector in the matching box.

  In the display control of FIG. 6A, the alarm occurrence corresponding part display unit 212 can display the entire image and the detailed image on the same screen as a still image or continuously as a moving image. For example, as shown in FIG. 6B, the still image displayed here is obtained by previously capturing each part of the apparatus from various positions and directions by an imaging apparatus such as a digital camera in the first storage device 203. I can leave it to you. Alternatively, using a moving image capturing device such as a video camera, MPEG format moving image information (video information) obtained by photographing each part of the device can be stored in the first storage device 203. The information stored in the first storage device 203 includes approximate position information (coordinate information) for specifying the position where the abnormality has occurred, and the alarm occurrence corresponding location display unit 212 displays the approximate position information (coordinates). Based on (information), the position where the abnormality has occurred can be displayed recognizable on either the whole image or the detailed image. Based on the approximate position information (coordinate information), the alarm occurrence corresponding location display unit 212 displays, for example, a position indicating an abnormality in the entire image (for example, a star in the entire image 601 in FIG. 6A). ) Can be superimposed and displayed. The alarm occurrence corresponding part display unit 212 can also display such a display on the detailed image 602.

  The alarm occurrence corresponding part display unit 212 displays an entire image including a position where an abnormality has occurred and a detailed image showing details of the position where the abnormality has occurred, which are associated by the alarm occurrence corresponding part ID (identification information). It is possible to display on one screen of the apparatus 201 simultaneously or continuously. For simultaneous or continuous display, for example, when the still image of the entire image and the detailed image are displayed in parallel, or the display is switched from the entire image to the detailed image continuously on one screen. Is included. For example, when a detailed image is continuously displayed from a whole image by a moving image, for example, the detailed position (in the detailed image) is changed from the approximate position of the alarm occurrence corresponding position (position of the occurrence corresponding position in the entire image: arrow A in FIG. 10). It is possible to display the position corresponding to the occurrence of the alarm so as to zoom up (enlarged display) at the shortest distance to the arrow A ′ in FIG. Alternatively, a method of displaying along a normal route (route along arrow B from arrow A in FIG. 10) from the approximate position indicating the direction of arrow A in FIG. Is mentioned.

  Regarding the images in the direction of the arrow A and the direction of the arrow A ′, the entire image and the detailed image are images viewed from substantially the same direction, and the proximity distance to the location corresponding to the alarm occurrence changes. The angle of the image in the direction of arrow A and arrow B varies greatly, but it is suitable for displaying an intricate part. The same can be said for still images.

(Transition to subscreen)
An example of the screen transition (screen switching) of the subordinate screen subordinate to the main screen (the image of FIG. 6A (the whole image 601 and the detailed image 602)) will be described with reference to FIG. For example, when the name “matching box” is selected (clicked) on the detailed image 602 using the input device 202, the alarm occurrence corresponding part display unit 212 is related to the enlarged image 701 linked to the detailed image 602 and the enlarged image 701. Is switched to a screen showing related information 702 (FIG. 7A).

  In the enlarged display 701, guidance displays 703 and 704 for displaying more detailed contents are shown. When the selection display operation 703 is selected (clicked) by the input device 202, the alarm occurrence corresponding part display unit 212 switches the screen to the internal image of the matching box linked to the guidance display 703 (FIG. 7C).

  Further, when the guidance display 704 is selected (clicked) by the input device 202, the alarm generation corresponding location display unit 212 displays detailed information of the connector of the matching box linked to the guidance display 704, for example, the connector specification, the connector arrangement number. Etc. are switched (FIG. 7D).

  When the related information 702 is selected (clicked) by the input device 202, electronic data of an instruction manual of the enlarged image 701 (matching box) is displayed (FIG. 7B).

  Next, with reference to FIG. 8, an example configuration of alarm occurrence corresponding location display information stored in the first storage device 203 will be described. In the first storage device 203, alarm display corresponding location display information in an electronic component manufacturing apparatus (also referred to as “apparatus A”) is classified and stored by a plurality of hierarchical structures. In the first hierarchy, the entire image constituting the main screen of the device A is stored. Whole image: The front corresponds to, for example, the image indicated by reference numeral 601 in FIG. As the entire image, a plurality of types of images obtained by viewing the device from various positions such as the front surface of the device, the back surface of the device, the right surface of the device, the left surface of the device, the lower surface of the device, and the upper surface of the device are stored in the first layer. The alarm occurrence corresponding location ID is associated with any kind of whole image or plural kinds of whole images. When an alarm occurs, the alarm occurrence corresponding location display unit 212 displays an entire image including the corresponding alarm occurrence corresponding location based on the alarm occurrence corresponding location ID. For example, when the location corresponding to the alarm occurrence ID = 2, the alarm occurrence corresponding location display unit 212 selects and displays the entire image: back side.

  In the second hierarchy, the detailed images constituting the main screen of the device A are stored in a state combined with the alarm occurrence corresponding location ID. The alarm occurrence corresponding location display unit 212 displays a detailed image corresponding to the corresponding alarm occurrence corresponding location based on the alarm occurrence corresponding location ID when an alarm occurs. Since the entire image and the detailed image are associated with each other based on the alarm occurrence corresponding location ID, the alarm occurrence corresponding location display unit 212 can display the entire image and the detailed image in parallel as shown in FIG. it can.

  In the third hierarchy, the supplementary image for supplementing the display contents of the detailed image or the whole image or the electronic data of the supplementary material is stored in a state associated with the alarm occurrence corresponding location ID. For example, when the location corresponding to the alarm occurrence is ID = 5, the attribute ID = 5 is commonly used, such as “5-1”, “5-2”, and “5-3”. To be related. The overall image, the approximate position information in the entire image of the location corresponding to the alarm occurrence, the detailed image, and further detailed supplemental images and supplementary materials are associated by the alarm occurrence corresponding location ID, and link information to these is also stored in the first storage device 203. Is done.

  The structure of the electronic component manufacturing apparatus according to the present embodiment is complex, and depending on the location where an alarm is generated, the entire image (for example, the front of the apparatus) viewed from a specific position may not be shown. By preparing a whole type of whole image and selectively displaying the whole image according to the location corresponding to the alarm occurrence, the operator can see the optimum whole image, and the confirmation work becomes easier.

  There are no particular restrictions on the overall image to be combined with the detailed image, and it is possible to select an overall image that makes it easy to grasp the location of the location where the alarm occurs, or to see it from a position along the route when approaching the location where the alarm occurs. Alternatively, the entire image may be selected.

  Although it is preferable to use an image viewed from the front or side of the apparatus, the present invention is not limited to this, and even an actual image taken obliquely from above or below is easy to understand. In addition, in the electronic component manufacturing apparatus, there is a portion that is surrounded by a chamber and cannot be seen from the side surface direction, and therefore an apparatus lower surface image and an upper surface image can be used.

  In the present embodiment, the association information between each alarm generation corresponding location ID and the approximate position information, detailed image, etc. is described as structured data such as XML (Extensible Markup Language) or HTML (Hypertext Markup Language). 1 is stored in the storage device 203. The format of the association information between each alarm occurrence corresponding location ID and the approximate position information, detailed image, etc. is not limited to XML or HTML format structured data. For example, it is preferable to use Java (registered trademark) Script or the like because there is no need to install a paid compiler (application software development software) such as C language, and no cost is generated. If the operating system Windows (registered trademark) is installed in the device-mounted PC 100, the Microsoft Internet Explorer (registered trademark) with "XML Parser (MSXML)" (registered trademark) is installed. Therefore, it can be introduced easily and at low cost.

  FIG. 9 exemplifies structured data defined for one alarm occurrence corresponding location ID (in the example of FIG. 9, alarm occurrence corresponding location ID = “5”). The approximate position information indicated by the position coordinates, the link information of the detailed image data, and the “message” displayed simultaneously on the main screen are described. For example, by combining with design information such as CAD information, it is possible to display the approximate position information as coordinate information based on specific numerical information.

  When the alarm occurrence corresponding location display unit 212 receives the alarm occurrence corresponding location ID converted from the alarm ID from the alarm notification unit 211, the alarm occurrence corresponding location display unit 212 reads the structured data corresponding to the received alarm occurrence corresponding location ID, and Display as a detailed image on the main screen. Specifically, the alarm occurrence corresponding location display unit 212 defines a style for displaying and printing the second layer XML on the screen by shaping the XML document as an XSL (Extensible Style sheet Language). (Language), DOM (Document Object Model: interface specification for manipulating XML documents from application programs, etc.), converted to HTML, and the entire image of the first layer and the detailed image of the second layer are used as the main screen indicate.

  As described above, it is possible to display information corresponding to each alarm by storing various information in each layer by association based on each alarm occurrence corresponding location ID. For example, as shown in FIG. 6A, when the alarm occurrence location and the cause can be grasped by parallel display (combination) of the entire image and the detailed image, the operator uses the information on this screen. Based on this, it is possible to take measures to eliminate the cause of the alarm. In addition, in the parallel display of the whole image and the detailed image in FIG. 6A, when the specific correspondence is unknown, a diagram showing the internal structure, an instruction manual, and the part that caused the occurrence are displayed. By displaying supplementary information such as specifications, the operator can easily grasp the cause of the alarm and take measures to eliminate the cause.

  According to this embodiment, it is possible to identify the location where an alarm occurs and investigate the cause of the occurrence of the alarm in a short time. Alternatively, by specifying the location where the failure occurs in a short time, man-hours such as cause investigation can be reduced, the apparatus stop time can be shortened, and the operating rate of the electronic component manufacturing apparatus can be improved.

  By using a real image such as a photograph or a moving image taken of the electronic component manufacturing apparatus, there is no need to newly design a drawing. Further, the image information can be managed hierarchically, and the addition and change of image data can be easily performed. Therefore, the functions of the present embodiment can be realized with low cost and short delivery time.

  By including information data such as instruction manuals and specifications, such information can be displayed on a PC equipped with the device. Further, by linking with CAD data such as a design drawing, more detailed information can be displayed in combination with a detailed image.

(Second Embodiment)
The schematic configuration of an electronic component manufacturing system (alarm notification system) having an electronic component manufacturing apparatus will be described with reference to FIGS. FIG. 11 is a diagram illustrating a schematic configuration of the alarm notification system, and FIG. 12 is a diagram illustrating a flow of processing in the alarm notification system. The alarm notification system is an electronic component manufacturing apparatus capable of displaying and notifying the occurrence of an abnormality occurring in the apparatus on a display device, an information processing apparatus for management, and maintenance for maintaining the electronic component manufacturing apparatus. And an information processing apparatus. The device mounting PC 100 mounted on the electronic component manufacturing apparatus is connected to a management information processing apparatus (server 1102) that manages the electronic component manufacturing system via a network 1101 such as the Internet.

  The electronic component manufacturing apparatus detects an abnormality that has occurred in the apparatus, outputs alarm information for notifying the occurrence of the abnormality (S1201), and based on the alarm information, identifies information for identifying the position where the abnormality has occurred. Obtain (S1202). Then, the identification information is transmitted to the server 1102 via the network 1101 (S1203).

  The server 1102 includes the first storage device 203 and the second storage device 204 described in the first embodiment. For example, the first storage device 203 stores an entire image, a detailed image, and supplementary information that supplements the content of the detailed image, which are associated with each other by the identification information. Then, when the server 1102 receives the identification information transmitted from the device-mounted PC 100 (S1204), the server 1102 acquires the corresponding whole image and detailed image from the first storage device 203 based on the identification information (S1205), and the network The entire image and the detailed image are distributed via 1101 (S1206).

  The device mounting PC 100 of the telegraph component manufacturing apparatus receives the distributed whole image and the detailed image (S1207), and displays the whole image and the detailed image simultaneously or continuously on one screen of the display device (S1208). ).

  Even if the device mounting PC 100 does not have the information of the first storage device 203 and the second storage device 204 inside the device mounting PC 100, the alarm display information corresponding to the alarm information and the alarm occurrence corresponding location in the device mounting PC 100 A display for notifying the occurrence of an alarm based on the display information can be displayed on the display 201. Information can be shared between the server 1102 and the apparatus-mounted PC 100, and information updates can be reflected quickly.

  The information processing device for maintenance (maintenance department PC 1103) receives the whole image and the detailed image distributed from the server 1102 (S1209), and displays the whole image and the detailed image on one screen of the display device of the maintenance department PC 1103. Can be simultaneously or continuously displayed (first display control) (S1210). The maintenance department PC 1103 can communicate with the server 1102 and the device-mounted PC 100 via the network 1101. When the server 1102 receives the alarm information from the device-mounted PC 100 installed on the user side, the server 1102 transmits the corresponding alarm display information and the alarm occurrence corresponding location display information to the maintenance department PC 1103, and the maintenance department PC 1103 also has the device mounted. It is also possible to display the same image information as the PC 100 (second display control). As a result, when a failure or the like occurs in the electronic component manufacturing apparatus, the maintenance department PC 1103 can respond to an inquiry from the user while referring to the same image information as the information controlled by the apparatus mounting PC 100. This makes it possible to solve problems more quickly.

  According to this embodiment, it is possible to identify the location where an alarm occurs and investigate the cause of the occurrence of the alarm in a short time. Alternatively, by specifying the location where the failure occurs in a short time, man-hours such as cause investigation can be reduced, the apparatus stop time can be shortened, and the operating rate of the electronic component manufacturing apparatus can be improved.

  If the actual image of the location corresponding to the occurrence of the alarm and the data of the device related information (instruction manual, component information, etc.) are stored in a large-capacity hard disk managed by the server information processing device, the electronic component manufacturing device A large amount of information can be acquired without holding a large amount of data in the device-mounted PC 100 mounted on the PC.

(Other embodiments)
The object of the present invention can also be achieved by supplying an alarm notification program for causing a computer to execute the functions of the above-described embodiments and a computer-readable storage medium storing the alarm notification program to a system or apparatus. Yes. Needless to say, this can also be achieved by the alarm notification system or the apparatus-mounted PC 100 reading and executing the alarm notification program stored in the storage medium.

  In this case, the program itself read from the storage medium realizes the functions of the above-described embodiments, and the program and the storage medium storing the program constitute the present invention.

Claims (9)

An electronic component manufacturing apparatus capable of displaying and notifying the occurrence of an abnormality occurring in the apparatus on a display device,
Detecting means for detecting an abnormality occurring in the device and outputting alarm information for informing the occurrence of the abnormality;
Obtaining means for obtaining identification information for identifying the position where the abnormality has occurred, based on the alarm information;
Display control means for displaying the entire image including the position where the abnormality has occurred and the detailed image indicating the details of the position, which are related by the identification information, simultaneously or continuously on one screen of the display device. When,
An electronic component manufacturing apparatus comprising: A storage unit that stores the whole image, the detailed image, and supplementary information that supplements the content of the detailed image, which are associated by the identification information;
The said display control means acquires the corresponding whole image and detailed image from the said memory | storage means based on the said identification information, and displays it on the said one screen simultaneously or continuously. Electronic component manufacturing equipment.   The display control means displays the whole image and the detailed image simultaneously on the one screen when the whole image and the detailed image are stored in the storage means as still images. The electronic component manufacturing apparatus according to claim 2.   The display control unit continuously switches the display from the entire image to the detailed image on the one screen when the entire image and the detailed image are stored as moving images in the storage unit. The electronic component manufacturing apparatus according to claim 2. An input device for inputting an instruction for displaying supplementary information for the detailed image;
When the instruction is input from the input device, the display control means acquires corresponding supplementary information from the storage means based on the identification information, and displays it on another screen of the display device. The electronic component manufacturing apparatus according to claim 2. The information stored in the storage means includes coordinate information for specifying the position where the abnormality has occurred,
The electronic component manufacturing apparatus according to claim 2, wherein the display control unit displays the position where the abnormality has occurred in a recognizable manner in the entire image or the detailed image based on the coordinate information. A communication means for transmitting and receiving data via a network;
The communication means acquires the entire image and the detailed image from storage means of a server connected via the network,
The electronic component manufacturing apparatus according to claim 1, wherein the display control unit displays the whole image and the detailed image acquired by the communication unit on the one screen. Computer
Detecting means for detecting an abnormality occurring in the apparatus and outputting alarm information for informing the occurrence of the abnormality;
Obtaining means for obtaining identification information for identifying the position where the abnormality has occurred, based on the alarm information;
Causing the entire image including the position where the abnormality has occurred, associated with the identification information, and the detailed image indicating the details of the position to function as display control means for simultaneously or continuously displaying on one screen. Features alarm notification program. An electronic component manufacturing apparatus capable of displaying and notifying occurrence of an abnormality occurring in the apparatus on a display device, an information processing apparatus for management, and an information processing for maintenance for maintaining the electronic component manufacturing apparatus An alarm notification system comprising:
The electronic component manufacturing apparatus is
Detecting means for detecting an abnormality occurring in the device and outputting alarm information for informing the occurrence of the abnormality;
Obtaining means for obtaining identification information for identifying the position where the abnormality has occurred, based on the alarm information;
Transmission means for transmitting the identification information acquired by the acquisition means via a network,
The management information processing apparatus includes:
Storage means for storing the whole image and the detailed image associated with each other by the identification information;
Based on the identification information, an entire image including a position where an abnormality has occurred and a detailed image indicating the details of the position are acquired from the storage unit, and the entire image and the detailed image are distributed via the network. A delivery means for
The electronic component manufacturing apparatus is
First display control means for receiving the whole image and the detailed image distributed by the distribution means and displaying the whole image and the detailed image simultaneously or continuously on one screen of a display device; In addition,
The information processing apparatus for maintenance is
The whole image and the detailed image distributed by the distribution unit are received, and the whole image and the detailed image are displayed simultaneously or continuously on one screen of the display device of the information processing apparatus for maintenance. An alarm notification system comprising a second display control device.

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