SG10201604607PA - PVD Vacuum Coating Unit - Google Patents
PVD Vacuum Coating UnitInfo
- Publication number
- SG10201604607PA SG10201604607PA SG10201604607PA SG10201604607PA SG10201604607PA SG 10201604607P A SG10201604607P A SG 10201604607PA SG 10201604607P A SG10201604607P A SG 10201604607PA SG 10201604607P A SG10201604607P A SG 10201604607PA SG 10201604607P A SG10201604607P A SG 10201604607PA
- Authority
- SG
- Singapore
- Prior art keywords
- coating unit
- vacuum coating
- pvd vacuum
- pvd
- unit
- Prior art date
Links
- 238000005240 physical vapour deposition Methods 0.000 title 1
- 238000001771 vacuum deposition Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Battery Electrode And Active Subsutance (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH18902007 | 2007-12-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG10201604607PA true SG10201604607PA (en) | 2016-07-28 |
Family
ID=39186114
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG10201604607PA SG10201604607PA (en) | 2007-12-06 | 2008-11-17 | PVD Vacuum Coating Unit |
| SG2012089439A SG186624A1 (en) | 2007-12-06 | 2008-11-17 | Pvd vacuum coating unit |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG2012089439A SG186624A1 (en) | 2007-12-06 | 2008-11-17 | Pvd vacuum coating unit |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US8968830B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP2220265A1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP5449185B2 (cg-RX-API-DMAC7.html) |
| KR (1) | KR20100094558A (cg-RX-API-DMAC7.html) |
| CN (1) | CN101889102B (cg-RX-API-DMAC7.html) |
| BR (1) | BRPI0820014A2 (cg-RX-API-DMAC7.html) |
| CA (1) | CA2707581A1 (cg-RX-API-DMAC7.html) |
| MX (1) | MX2010006214A (cg-RX-API-DMAC7.html) |
| RU (1) | RU2486280C2 (cg-RX-API-DMAC7.html) |
| SG (2) | SG10201604607PA (cg-RX-API-DMAC7.html) |
| TW (1) | TWI498442B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2009070903A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2454393B1 (de) * | 2009-07-14 | 2016-09-28 | MSM Krystall GBR | Verfahren zur herstellung von wendeschneidplatten |
| CZ304905B6 (cs) * | 2009-11-23 | 2015-01-14 | Shm, S.R.O. | Způsob vytváření PVD vrstev s pomocí rotační cylindrické katody a zařízení k provádění tohoto způsobu |
| DE102010038077B4 (de) | 2010-10-08 | 2018-05-30 | Msm Krystall Gbr (Vertretungsberechtigte Gesellschafter: Dr. Rainer Schneider, 12165 Berlin; Arno Mecklenburg, 10999 Berlin) | Wendeschneidplatte und Verfahren zu deren Herstellung |
| ES2532898T3 (es) * | 2011-06-30 | 2015-04-01 | Lamina Technologies Sa | Deposición por arco catódico |
| CN104004993B (zh) * | 2013-02-25 | 2018-01-12 | 北京中科三环高技术股份有限公司 | 一种表面处理装置 |
| DE102015004856A1 (de) * | 2015-04-15 | 2016-10-20 | Oerlikon Metaplas Gmbh | Bipolares Arc-Beschichtungsverfahren |
| KR102079460B1 (ko) | 2015-12-17 | 2020-02-19 | 가부시키가이샤 알박 | 진공 처리 장치 |
| US11322338B2 (en) * | 2017-08-31 | 2022-05-03 | Taiwan Semiconductor Manufacturing Co., Ltd. | Sputter target magnet |
| DE102018004086A1 (de) * | 2018-05-18 | 2019-11-21 | Singulus Technologies Ag | Durchlaufanlage und Verfahren zum Beschichten von Substraten |
| KR102833369B1 (ko) * | 2018-12-17 | 2025-07-10 | 어플라이드 머티어리얼스, 인코포레이티드 | 캡슐화를 위한 pvd 방향성 증착 |
| US20200255941A1 (en) * | 2019-02-11 | 2020-08-13 | Kennametal Inc. | Supports for chemical vapor deposition coating applications |
| WO2020226626A1 (en) * | 2019-05-07 | 2020-11-12 | Light-Med (Usa), Inc. | Silver-indium transient liquid phase method of bonding semiconductor device and heat-spreading mount and semiconductor structure having silver-indium transient liquid phase bonding joint |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1264025A (en) | 1987-05-29 | 1989-12-27 | James A.E. Bell | Apparatus and process for coloring objects by plasma coating |
| DE4209384C1 (cg-RX-API-DMAC7.html) | 1992-03-23 | 1993-04-22 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De | |
| RU2058427C1 (ru) * | 1993-06-01 | 1996-04-20 | Александр Иванович Дерюгин | Вакуумная установка для нанесения покрытий |
| RU2099439C1 (ru) * | 1995-05-06 | 1997-12-20 | Самарская государственная архитектурно-строительная академия | Устройство для нанесения покрытий (варианты) |
| DE29615190U1 (de) * | 1996-03-11 | 1996-11-28 | Balzers Verschleissschutz GmbH, 55411 Bingen | Anlage zur Beschichtung von Werkstücken |
| CN1169477A (zh) * | 1996-05-10 | 1998-01-07 | 萨蒂斯真空工业销售股份公司 | 在光学基片上蒸镀镀膜的方法 |
| US5803971A (en) * | 1997-01-13 | 1998-09-08 | United Technologies Corporation | Modular coating fixture |
| EP0928977A4 (en) | 1997-05-16 | 2000-01-05 | Hoya Kabushiki Kaisha | PLASTIC OPTICAL COMPONENT WITH A REFLECTION-PREVENTING FILM AND MECHANISM FOR THE SAME-SHAPED FILM THICKNESS PRODUCTION OF THIS FILM |
| JP4345869B2 (ja) | 1997-05-16 | 2009-10-14 | Ｈｏｙａ株式会社 | スパッタ成膜用の膜厚補正機構 |
| SE517046C2 (sv) | 1997-11-26 | 2002-04-09 | Sandvik Ab | Plasmaaktiverad CVD-metod för beläggning av skärverktyg med finkornig aluminiumoxid |
| JP2000141108A (ja) | 1999-01-01 | 2000-05-23 | Hitachi Tool Engineering Ltd | 被覆スロ―アウェイチップの製造方法 |
| JP2001049428A (ja) | 1999-08-05 | 2001-02-20 | Nippon Sheet Glass Co Ltd | 基体に被膜を被覆する方法およびその方法に用いるスパッタリング装置 |
| DE50115410D1 (de) | 2000-09-05 | 2010-05-12 | Oerlikon Trading Ag | Vakuumanlage mit koppelbarem Werkstückträger |
| US20020160620A1 (en) * | 2001-02-26 | 2002-10-31 | Rudolf Wagner | Method for producing coated workpieces, uses and installation for the method |
| DE202004011179U1 (de) * | 2003-07-21 | 2004-12-02 | Unaxis Balzers Ag | Trog zum Stapeln, Aufnehmen und Transportieren von kleinen Teilen, insbesondere Werkzeugen |
| US8178220B2 (en) * | 2004-04-30 | 2012-05-15 | Sumitomo Electric Hardmetal Corp. | Surface-covered cubic boron nitride sintered body tool and method of manufacturing the same |
| ES2562454T3 (es) | 2005-03-24 | 2016-03-04 | Oerlikon Surface Solutions Ag, Trübbach | Capa de material duro |
-
2008
- 2008-11-13 US US12/270,415 patent/US8968830B2/en not_active Expired - Fee Related
- 2008-11-17 JP JP2010536303A patent/JP5449185B2/ja not_active Expired - Fee Related
- 2008-11-17 CA CA2707581A patent/CA2707581A1/en not_active Abandoned
- 2008-11-17 SG SG10201604607PA patent/SG10201604607PA/en unknown
- 2008-11-17 BR BRPI0820014-9A patent/BRPI0820014A2/pt not_active IP Right Cessation
- 2008-11-17 SG SG2012089439A patent/SG186624A1/en unknown
- 2008-11-17 EP EP08856536A patent/EP2220265A1/de not_active Withdrawn
- 2008-11-17 CN CN200880119186.5A patent/CN101889102B/zh not_active Expired - Fee Related
- 2008-11-17 MX MX2010006214A patent/MX2010006214A/es unknown
- 2008-11-17 WO PCT/CH2008/000485 patent/WO2009070903A1/de not_active Ceased
- 2008-11-17 RU RU2010127857/02A patent/RU2486280C2/ru not_active IP Right Cessation
- 2008-11-17 KR KR1020107014904A patent/KR20100094558A/ko not_active Ceased
- 2008-12-04 TW TW097147045A patent/TWI498442B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| CN101889102A (zh) | 2010-11-17 |
| TW200936795A (en) | 2009-09-01 |
| SG186624A1 (en) | 2013-01-30 |
| JP2011505262A (ja) | 2011-02-24 |
| US8968830B2 (en) | 2015-03-03 |
| JP5449185B2 (ja) | 2014-03-19 |
| KR20100094558A (ko) | 2010-08-26 |
| TWI498442B (zh) | 2015-09-01 |
| MX2010006214A (es) | 2010-06-23 |
| RU2486280C2 (ru) | 2013-06-27 |
| WO2009070903A1 (de) | 2009-06-11 |
| BRPI0820014A2 (pt) | 2015-05-19 |
| CA2707581A1 (en) | 2009-06-11 |
| US20090148599A1 (en) | 2009-06-11 |
| EP2220265A1 (de) | 2010-08-25 |
| CN101889102B (zh) | 2013-04-10 |
| RU2010127857A (ru) | 2012-01-20 |
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