SE9602658D0 - Förfarande och anordning för bestämning av skikttjocklekar - Google Patents

Förfarande och anordning för bestämning av skikttjocklekar

Info

Publication number
SE9602658D0
SE9602658D0 SE9602658A SE9602658A SE9602658D0 SE 9602658 D0 SE9602658 D0 SE 9602658D0 SE 9602658 A SE9602658 A SE 9602658A SE 9602658 A SE9602658 A SE 9602658A SE 9602658 D0 SE9602658 D0 SE 9602658D0
Authority
SE
Sweden
Prior art keywords
layers
substrate
alternating field
layer thicknesses
determining layer
Prior art date
Application number
SE9602658A
Other languages
English (en)
Other versions
SE508354C2 (sv
SE9602658L (sv
Inventor
Pascal Jourdain
Lars Hallstadius
Hans-Urs Zwicky
Kurt-Aake Magnusson
Gerhard Bart
Original Assignee
Asea Atom Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asea Atom Ab filed Critical Asea Atom Ab
Priority to SE9602658A priority Critical patent/SE508354C2/sv
Publication of SE9602658D0 publication Critical patent/SE9602658D0/sv
Priority to US08/679,624 priority patent/US5889401A/en
Priority to DE19628220A priority patent/DE19628220B4/de
Publication of SE9602658L publication Critical patent/SE9602658L/sv
Publication of SE508354C2 publication Critical patent/SE508354C2/sv

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21C—NUCLEAR REACTORS
    • G21C17/00—Monitoring; Testing ; Maintaining
    • G21C17/06—Devices or arrangements for monitoring or testing fuel or fuel elements outside the reactor core, e.g. for burn-up, for contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/30—Nuclear fission reactors
SE9602658A 1996-07-05 1996-07-05 Förfarande och anordning för bestämning av skikttjocklek SE508354C2 (sv)

Priority Applications (3)

Application Number Priority Date Filing Date Title
SE9602658A SE508354C2 (sv) 1996-07-05 1996-07-05 Förfarande och anordning för bestämning av skikttjocklek
US08/679,624 US5889401A (en) 1996-07-05 1996-07-12 Method and apparatus for determining the thickness of several layers superimposed on a substrate
DE19628220A DE19628220B4 (de) 1996-07-05 1996-07-15 Verfahren und Vorrichtung zur Bestimmung der Dicke einer oder mehrerer übereinanderliegender Schichten auf einem Substrat

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SE9602658A SE508354C2 (sv) 1996-07-05 1996-07-05 Förfarande och anordning för bestämning av skikttjocklek
US08/679,624 US5889401A (en) 1996-07-05 1996-07-12 Method and apparatus for determining the thickness of several layers superimposed on a substrate
DE19628220A DE19628220B4 (de) 1996-07-05 1996-07-15 Verfahren und Vorrichtung zur Bestimmung der Dicke einer oder mehrerer übereinanderliegender Schichten auf einem Substrat

Publications (3)

Publication Number Publication Date
SE9602658D0 true SE9602658D0 (sv) 1996-07-05
SE9602658L SE9602658L (sv) 1998-01-06
SE508354C2 SE508354C2 (sv) 1998-09-28

Family

ID=27216458

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9602658A SE508354C2 (sv) 1996-07-05 1996-07-05 Förfarande och anordning för bestämning av skikttjocklek

Country Status (3)

Country Link
US (1) US5889401A (sv)
DE (1) DE19628220B4 (sv)
SE (1) SE508354C2 (sv)

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US6945845B2 (en) * 2003-03-04 2005-09-20 Applied Materials, Inc. Chemical mechanical polishing apparatus with non-conductive elements
UA60955C2 (en) * 2003-07-25 2006-01-16 Subsidiary Entpr With Foreign Method for contactlessly measuring conductivity of film polymeric electrolyte by a combined transducer
US20050066739A1 (en) * 2003-09-26 2005-03-31 Lam Research Corporation Method and apparatus for wafer mechanical stress monitoring and wafer thermal stress monitoring
US6955588B1 (en) 2004-03-31 2005-10-18 Lam Research Corporation Method of and platen for controlling removal rate characteristics in chemical mechanical planarization
DE102004034081A1 (de) * 2004-07-15 2006-02-09 Robert Bosch Gmbh Verfahren zur berührungsfreien Bestimmung einer Dicke einer Schicht aus elektrisch leitendem Material
US7388369B2 (en) * 2004-11-30 2008-06-17 Electric Power Research Institute, Inc. Method and apparatus for measuring hydrogen concentration in zirconium alloy components in the fuel pool of a nuclear power plant
SE530770C2 (sv) * 2005-08-24 2008-09-09 Westinghouse Electric Sweden System och användning avseende virvelströmsmätningar på komponenter för nukleära reaktorer
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US9528814B2 (en) 2011-05-19 2016-12-27 NeoVision, LLC Apparatus and method of using impedance resonance sensor for thickness measurement
FR2981741B1 (fr) * 2011-10-20 2013-11-29 Messier Bugatti Dowty Procede de mesure d'epaisseur d'une couche de revetement par induction de champs magnetiques
US9465089B2 (en) 2011-12-01 2016-10-11 Neovision Llc NMR spectroscopy device based on resonance type impedance (IR) sensor and method of NMR spectra acquisition
US8952708B2 (en) 2011-12-02 2015-02-10 Neovision Llc Impedance resonance sensor for real time monitoring of different processes and methods of using same
JP5648663B2 (ja) * 2012-09-20 2015-01-07 センサ・システム株式会社 焼入れ硬化層厚さの検査装置及びニッケルめっき皮膜厚さの検査装置
RU2577037C1 (ru) * 2014-12-09 2016-03-10 Открытое акционерное общество Центральный научно-исследовательский институт специального машиностроения Способ вихретокового контроля толщины композитных материалов на неметаллических подложках и устройство для его осуществления
JP6792859B2 (ja) * 2016-08-09 2020-12-02 国立大学法人東京工業大学 解析方法、解析プログラム、および解析装置
FR3062203B1 (fr) * 2017-01-24 2020-11-13 Safran Aircraft Engines Procede de realisation d'un abaque pour la mesure simultanee de l'epaisseur des differentes couches d'un revetement metallique
DE102017129150B4 (de) 2017-12-07 2020-03-05 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Verfahren und Vorrichtung zur Messung der Dicke von nicht magnetisierbaren Schichten auf einem magnetisierbaren Grundwerkstoff
CN114577894B (zh) * 2022-01-14 2023-05-26 湖南凌扬电子科技有限公司 磁性金属底材与非导电涂层间的含金属夹层识别方法及系统

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Also Published As

Publication number Publication date
SE508354C2 (sv) 1998-09-28
DE19628220A1 (de) 1998-02-05
US5889401A (en) 1999-03-30
DE19628220B4 (de) 2011-06-16
SE9602658L (sv) 1998-01-06

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