ATE46970T1 - Verfahren und vorrichtung zur dickenmessung von duennen, auf einen leitenden traeger aufgebrachten, metallischen schichten. - Google Patents
Verfahren und vorrichtung zur dickenmessung von duennen, auf einen leitenden traeger aufgebrachten, metallischen schichten.Info
- Publication number
- ATE46970T1 ATE46970T1 AT85402064T AT85402064T ATE46970T1 AT E46970 T1 ATE46970 T1 AT E46970T1 AT 85402064 T AT85402064 T AT 85402064T AT 85402064 T AT85402064 T AT 85402064T AT E46970 T1 ATE46970 T1 AT E46970T1
- Authority
- AT
- Austria
- Prior art keywords
- thickness
- measuring
- conductive support
- thin metallic
- metallic coatings
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- 238000005259 measurement Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
- G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8416290A FR2572175A1 (fr) | 1984-10-24 | 1984-10-24 | Procede et dispositif pour mesurer l'epaisseur de couches metalliques minces deposees sur un support conducteur |
EP85402064A EP0179720B1 (de) | 1984-10-24 | 1985-10-23 | Verfahren und Vorrichtung zur Dickenmessung von dünnen, auf einen leitenden Träger aufgebrachten, metallischen Schichten |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE46970T1 true ATE46970T1 (de) | 1989-10-15 |
Family
ID=9308972
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT85402064T ATE46970T1 (de) | 1984-10-24 | 1985-10-23 | Verfahren und vorrichtung zur dickenmessung von duennen, auf einen leitenden traeger aufgebrachten, metallischen schichten. |
Country Status (7)
Country | Link |
---|---|
US (1) | US4752739A (de) |
EP (1) | EP0179720B1 (de) |
JP (1) | JPS61102504A (de) |
KR (1) | KR860003492A (de) |
AT (1) | ATE46970T1 (de) |
DE (2) | DE179720T1 (de) |
FR (1) | FR2572175A1 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3806612A1 (de) * | 1987-03-02 | 1988-09-15 | Glory Kogyo Kk | Verfahren und vorrichtung zum erfassen einer magnetisierungskennlinie magnetischer duennschichten |
CA1330829C (en) * | 1989-08-09 | 1994-07-19 | Peter P. Roosen | Metal measuring method and apparatus |
US5017869A (en) * | 1989-12-14 | 1991-05-21 | General Electric Company | Swept frequency eddy current system for measuring coating thickness |
FR2660751B1 (fr) * | 1990-04-06 | 1993-12-31 | Gec Alsthom Sa | Capteur pour la mesure du deplacement relatif transversal d'une piece conductrice de forme allongee. |
BE1004080A6 (fr) * | 1990-04-18 | 1992-09-22 | Centre Rech Metallurgique | Procede pour le controle automatique de la qualite d'un composant de carrosserie automobile. |
CA2043347A1 (en) * | 1990-05-30 | 1991-12-01 | Yukio Kohmura | Method and system for inspection of electroconductive film using eddy current and process and system for production of optical fibres using method and system |
LU87751A1 (fr) * | 1990-06-20 | 1992-01-15 | Arbed | Procede et capteur pour la mesure en continu de l'epaisseur d'un revetement |
DE4119903C5 (de) * | 1991-06-17 | 2005-06-30 | Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg | Verfahren und Vorrichtung zur Messung dünner Schichten |
DE4126921C2 (de) * | 1991-08-14 | 1996-01-18 | Elmeg | Vorrichtung zur induktiven Messung der Lage eines Metallbandes |
US5343146A (en) * | 1992-10-05 | 1994-08-30 | De Felsko Corporation | Combination coating thickness gauge using a magnetic flux density sensor and an eddy current search coil |
FR2712975B1 (fr) * | 1993-11-23 | 1996-08-02 | Framatome Sa | Procédé de contrôle non destructif d'un tube mince par courants de Foucault et capteur à courants de Foucault. |
US5623427A (en) * | 1994-09-02 | 1997-04-22 | Defelsko Corporation | Nondestructive anodic capacity gauge |
SE9801551L (sv) * | 1998-05-04 | 1999-11-05 | D A Production Ab | Sätt och anordning för mätning av materialtjocklek |
KR200179834Y1 (ko) * | 1999-11-08 | 2000-04-15 | 하재일 | 병충해 및 냉해자동방지장치 |
US6707540B1 (en) | 1999-12-23 | 2004-03-16 | Kla-Tencor Corporation | In-situ metalization monitoring using eddy current and optical measurements |
WO2001046684A1 (en) * | 1999-12-23 | 2001-06-28 | Kla-Tencor Corporation | In-situ metalization monitoring using eddy current measurements and optical measurements |
US6433541B1 (en) | 1999-12-23 | 2002-08-13 | Kla-Tencor Corporation | In-situ metalization monitoring using eddy current measurements during the process for removing the film |
US6667615B2 (en) | 2000-02-10 | 2003-12-23 | Sankyo Seiki Mfg. Co., Ltd. | Coin identifying device using magnetic sensors |
US6593737B2 (en) * | 2000-08-24 | 2003-07-15 | Shell Oil Company | Method for measuring the wall thickness of an electrically conductive object |
JP5065614B2 (ja) * | 2006-04-14 | 2012-11-07 | 株式会社アルバック | 渦電流式膜厚計 |
WO2011151530A1 (fr) | 2010-05-31 | 2011-12-08 | Arcelormittal Investigacion Y Desarrollo, S.L. | Procede et dispositif de mesure de l'epaisseur d'une couche de revetement sur une bande en defilement |
EP2707679B1 (de) * | 2011-05-11 | 2017-06-28 | PolyResearch AG | Kontaktloses sensorelement |
US10234261B2 (en) * | 2013-06-12 | 2019-03-19 | Applied Materials, Inc. | Fast and continuous eddy-current metrology of a conductive film |
FR3007517B1 (fr) | 2013-06-20 | 2016-08-19 | Michelin & Cie | Systeme de mesure de l'epaisseur d'une couche de gomme d'un pneumatique |
FR3009076B1 (fr) * | 2013-07-26 | 2017-03-31 | Michelin & Cie | Systeme de mesure de l'epaisseur d'une couche de gomme d'un pneumatique |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB425586A (en) * | 1934-11-21 | 1935-03-18 | Alfred Loewenstein | Improvements relating to systems for electrically measuring the thickness of metallic walls, sheets and the like |
GB453424A (en) * | 1935-02-08 | 1936-09-08 | Allan Brown Stevenson | Apparatus for the determination of the thickness of metal walls |
GB565561A (en) * | 1941-12-30 | 1944-11-16 | John Rae Park | An improved instrument or gauge for use in facilitating the turning or machining of certain metal components also applicable for detecting hidden faults in metal components |
US2764734A (en) * | 1952-10-03 | 1956-09-25 | Wilfrid A Yates | Phase angle method of metal thickness indication |
US3229198A (en) * | 1962-09-28 | 1966-01-11 | Hugo L Libby | Eddy current nondestructive testing device for measuring multiple parameter variables of a metal sample |
US3358225A (en) * | 1964-03-27 | 1967-12-12 | Richard S Peugeot | Lift-off compensation for eddy current testers |
US3535625A (en) * | 1968-04-22 | 1970-10-20 | Garrett Corp | Strain and flaw detector |
US3626344A (en) * | 1969-07-28 | 1971-12-07 | Viktor Egorovich Shaternikov | Eddy currents transducer for electrical devices to control coating thickness and surface profile of metal articles |
FR2140864A5 (de) * | 1971-06-10 | 1973-01-19 | Commissariat Energie Atomique | |
US3878457A (en) * | 1973-11-16 | 1975-04-15 | Wayne E Rodgers | Thin film thickness measuring apparatus using an unbalanced inductive bridge |
DE2410047A1 (de) * | 1974-03-02 | 1975-09-11 | Nix Steingroeve Elektro Physik | Elektromagnetischer schichtdickenmesser mit umschaltbarer mess-frequenz |
DE2440674A1 (de) * | 1974-08-24 | 1976-03-11 | Brockhaus J G Dr Ing Kg | Messgeraet fuer elektroblech, insbesondere fuer ganze tafeln |
JPS54107764A (en) * | 1978-02-13 | 1979-08-23 | Toshiba Corp | Thickness measuring method |
FR2500632B2 (fr) * | 1980-11-12 | 1987-12-24 | Revigny Soc Metall | Dispositif de detection par courants de foucault de defauts dans un produit metallique |
FR2507310A1 (fr) * | 1981-06-04 | 1982-12-10 | Commissariat Energie Atomique | Procede pour determiner le profil d'une surface metallique conductrice, procede pour comparer ce profil a un profil modele et dispositif pour la mise en oeuvre de ces procedes |
JPS5967405A (ja) * | 1982-09-30 | 1984-04-17 | Sumitomo Metal Ind Ltd | ライナ厚測定方法 |
GB2140564B (en) * | 1983-05-23 | 1986-10-22 | Central Electr Generat Board | Cable corrosion monitor |
IT1194275B (it) * | 1983-06-15 | 1988-09-14 | Cise Spa | Misuratore di spessori elevati "senza contatto" per materiali metallici ad di sopra della temperatura di curie |
FR2552540B1 (fr) * | 1983-09-27 | 1987-03-20 | Commissariat Energie Atomique | Dispositif pour mesurer la proximite d'une surface metallique conductrice |
-
1984
- 1984-10-24 FR FR8416290A patent/FR2572175A1/fr not_active Withdrawn
-
1985
- 1985-10-23 DE DE198585402064T patent/DE179720T1/de active Pending
- 1985-10-23 DE DE8585402064T patent/DE3573472D1/de not_active Expired
- 1985-10-23 EP EP85402064A patent/EP0179720B1/de not_active Expired
- 1985-10-23 KR KR1019850007811A patent/KR860003492A/ko not_active Application Discontinuation
- 1985-10-23 AT AT85402064T patent/ATE46970T1/de not_active IP Right Cessation
- 1985-10-24 JP JP60238530A patent/JPS61102504A/ja active Pending
- 1985-10-24 US US06/790,968 patent/US4752739A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE179720T1 (de) | 1986-10-16 |
JPS61102504A (ja) | 1986-05-21 |
FR2572175A1 (fr) | 1986-04-25 |
DE3573472D1 (en) | 1989-11-09 |
EP0179720B1 (de) | 1989-10-04 |
US4752739A (en) | 1988-06-21 |
EP0179720A1 (de) | 1986-04-30 |
KR860003492A (ko) | 1986-05-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
UEP | Publication of translation of european patent specification | ||
REN | Ceased due to non-payment of the annual fee |