DE69427316D1 - Verfahren zur Positionierung einer elektronischen Sonde einer Spannungsmesseinrichtung - Google Patents

Verfahren zur Positionierung einer elektronischen Sonde einer Spannungsmesseinrichtung

Info

Publication number
DE69427316D1
DE69427316D1 DE69427316T DE69427316T DE69427316D1 DE 69427316 D1 DE69427316 D1 DE 69427316D1 DE 69427316 T DE69427316 T DE 69427316T DE 69427316 T DE69427316 T DE 69427316T DE 69427316 D1 DE69427316 D1 DE 69427316D1
Authority
DE
Germany
Prior art keywords
positioning
measuring device
voltage measuring
electronic probe
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69427316T
Other languages
English (en)
Other versions
DE69427316T2 (de
Inventor
Hironori Takahashi
Isuke Hirano
Shinichiro Aoshima
Yutaka Tsuchiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Application granted granted Critical
Publication of DE69427316D1 publication Critical patent/DE69427316D1/de
Publication of DE69427316T2 publication Critical patent/DE69427316T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Measurement Of Current Or Voltage (AREA)
DE69427316T 1993-03-15 1994-03-15 Verfahren zur Positionierung einer elektronischen Sonde einer Spannungsmesseinrichtung Expired - Fee Related DE69427316T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05422593A JP3323572B2 (ja) 1993-03-15 1993-03-15 電圧測定装置のｅ−ｏプローブ位置決め方法

Publications (2)

Publication Number Publication Date
DE69427316D1 true DE69427316D1 (de) 2001-07-05
DE69427316T2 DE69427316T2 (de) 2001-10-31

Family

ID=12964606

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69427316T Expired - Fee Related DE69427316T2 (de) 1993-03-15 1994-03-15 Verfahren zur Positionierung einer elektronischen Sonde einer Spannungsmesseinrichtung

Country Status (4)

Country Link
US (1) US5552716A (de)
EP (1) EP0616239B1 (de)
JP (1) JP3323572B2 (de)
DE (1) DE69427316T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5403814A (en) * 1991-03-25 1995-04-04 Ciba-Geigy Corporation Sulfonylureas
US6445202B1 (en) 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US6055095A (en) * 1999-07-30 2000-04-25 Intel Corporation Microscope with infrared imaging
US6388434B1 (en) 2000-01-17 2002-05-14 Bechtel Bwxt Idaho, Llc Electro-optic high voltage sensor
US6573735B2 (en) * 2000-06-22 2003-06-03 Qualcomm Incorporated Reliability of vias and diagnosis by e-beam probing
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
DE10156210A1 (de) * 2001-11-15 2003-06-05 Infineon Technologies Ag Prüfanordnung zur messtechnischen Untersuchung einesPrüfobjektes, insbesondere in Form einer integrierten Schaltung
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4446425A (en) * 1982-02-12 1984-05-01 The University Of Rochester Measurement of electrical signals with picosecond resolution
US4618819A (en) * 1984-03-27 1986-10-21 The University Of Rochester Measurement of electrical signals with subpicosecond resolution
JPS61165607A (ja) * 1985-01-18 1986-07-26 Hitachi Ltd 測定装置
JPH0787211B2 (ja) * 1987-10-23 1995-09-20 日本電信電話株式会社 集積回路の試験装置
JP2655716B2 (ja) * 1989-03-13 1997-09-24 日本電信電話株式会社 プローブと被測定回路との位置決め方法
JP2607798B2 (ja) * 1991-03-18 1997-05-07 日本電信電話株式会社 集積回路の電圧信号測定方法および測定装置
US5274325A (en) * 1991-03-18 1993-12-28 Nippon Telegraph And Telephone Corporation Method and apparatus for electro-optic sampling measurement of electrical signals in integrated circuits
US5592101A (en) * 1992-07-24 1997-01-07 Hamamatsu Photonics K.K. Electro-optic apparatus for measuring an electric field of a sample

Also Published As

Publication number Publication date
EP0616239A3 (de) 1995-03-08
US5552716A (en) 1996-09-03
DE69427316T2 (de) 2001-10-31
JP3323572B2 (ja) 2002-09-09
EP0616239B1 (de) 2001-05-30
EP0616239A2 (de) 1994-09-21
JPH06265606A (ja) 1994-09-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee