DE3573472D1 - Process and device for measuring the thickness of thin metallic coatings deposited on a conductive support - Google Patents

Process and device for measuring the thickness of thin metallic coatings deposited on a conductive support

Info

Publication number
DE3573472D1
DE3573472D1 DE8585402064T DE3573472T DE3573472D1 DE 3573472 D1 DE3573472 D1 DE 3573472D1 DE 8585402064 T DE8585402064 T DE 8585402064T DE 3573472 T DE3573472 T DE 3573472T DE 3573472 D1 DE3573472 D1 DE 3573472D1
Authority
DE
Germany
Prior art keywords
thickness
measuring
conductive support
thin metallic
metallic coatings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8585402064T
Other languages
English (en)
Inventor
Robert Wang
Henri Clergeot
Francois Monteil
Dominique Placko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fives Stein SA
Original Assignee
Stein Heurtey SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stein Heurtey SA filed Critical Stein Heurtey SA
Application granted granted Critical
Publication of DE3573472D1 publication Critical patent/DE3573472D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Physical Vapour Deposition (AREA)
DE8585402064T 1984-10-24 1985-10-23 Process and device for measuring the thickness of thin metallic coatings deposited on a conductive support Expired DE3573472D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8416290A FR2572175A1 (fr) 1984-10-24 1984-10-24 Procede et dispositif pour mesurer l'epaisseur de couches metalliques minces deposees sur un support conducteur

Publications (1)

Publication Number Publication Date
DE3573472D1 true DE3573472D1 (en) 1989-11-09

Family

ID=9308972

Family Applications (2)

Application Number Title Priority Date Filing Date
DE198585402064T Pending DE179720T1 (de) 1984-10-24 1985-10-23 Verfahren und vorrichtung zur dickenmessung von duennen, auf einen leitenden traeger aufgebrachten, metallischen schichten.
DE8585402064T Expired DE3573472D1 (en) 1984-10-24 1985-10-23 Process and device for measuring the thickness of thin metallic coatings deposited on a conductive support

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE198585402064T Pending DE179720T1 (de) 1984-10-24 1985-10-23 Verfahren und vorrichtung zur dickenmessung von duennen, auf einen leitenden traeger aufgebrachten, metallischen schichten.

Country Status (7)

Country Link
US (1) US4752739A (de)
EP (1) EP0179720B1 (de)
JP (1) JPS61102504A (de)
KR (1) KR860003492A (de)
AT (1) ATE46970T1 (de)
DE (2) DE179720T1 (de)
FR (1) FR2572175A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3806612A1 (de) * 1987-03-02 1988-09-15 Glory Kogyo Kk Verfahren und vorrichtung zum erfassen einer magnetisierungskennlinie magnetischer duennschichten
CA1330829C (en) * 1989-08-09 1994-07-19 Peter P. Roosen Metal measuring method and apparatus
US5017869A (en) * 1989-12-14 1991-05-21 General Electric Company Swept frequency eddy current system for measuring coating thickness
FR2660751B1 (fr) * 1990-04-06 1993-12-31 Gec Alsthom Sa Capteur pour la mesure du deplacement relatif transversal d'une piece conductrice de forme allongee.
BE1004080A6 (fr) * 1990-04-18 1992-09-22 Centre Rech Metallurgique Procede pour le controle automatique de la qualite d'un composant de carrosserie automobile.
CA2043347A1 (en) * 1990-05-30 1991-12-01 Yukio Kohmura Method and system for inspection of electroconductive film using eddy current and process and system for production of optical fibres using method and system
LU87751A1 (fr) * 1990-06-20 1992-01-15 Arbed Procede et capteur pour la mesure en continu de l'epaisseur d'un revetement
DE4119903C5 (de) * 1991-06-17 2005-06-30 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Verfahren und Vorrichtung zur Messung dünner Schichten
DE4126921C2 (de) * 1991-08-14 1996-01-18 Elmeg Vorrichtung zur induktiven Messung der Lage eines Metallbandes
US5343146A (en) * 1992-10-05 1994-08-30 De Felsko Corporation Combination coating thickness gauge using a magnetic flux density sensor and an eddy current search coil
FR2712975B1 (fr) * 1993-11-23 1996-08-02 Framatome Sa Procédé de contrôle non destructif d'un tube mince par courants de Foucault et capteur à courants de Foucault.
US5623427A (en) * 1994-09-02 1997-04-22 Defelsko Corporation Nondestructive anodic capacity gauge
SE9801551L (sv) * 1998-05-04 1999-11-05 D A Production Ab Sätt och anordning för mätning av materialtjocklek
KR200179834Y1 (ko) * 1999-11-08 2000-04-15 하재일 병충해 및 냉해자동방지장치
US6707540B1 (en) 1999-12-23 2004-03-16 Kla-Tencor Corporation In-situ metalization monitoring using eddy current and optical measurements
JP4817575B2 (ja) * 1999-12-23 2011-11-16 ケーエルエー−テンカー コーポレイション 渦電流測定を利用して、メタライゼーション処理を実状態で監視する方法
US6433541B1 (en) * 1999-12-23 2002-08-13 Kla-Tencor Corporation In-situ metalization monitoring using eddy current measurements during the process for removing the film
US6667615B2 (en) * 2000-02-10 2003-12-23 Sankyo Seiki Mfg. Co., Ltd. Coin identifying device using magnetic sensors
US6593737B2 (en) 2000-08-24 2003-07-15 Shell Oil Company Method for measuring the wall thickness of an electrically conductive object
JP5065614B2 (ja) * 2006-04-14 2012-11-07 株式会社アルバック 渦電流式膜厚計
WO2011151530A1 (fr) * 2010-05-31 2011-12-08 Arcelormittal Investigacion Y Desarrollo, S.L. Procede et dispositif de mesure de l'epaisseur d'une couche de revetement sur une bande en defilement
WO2012152720A1 (en) * 2011-05-11 2012-11-15 Polyresearch Ag Contactless sensing element
US10234261B2 (en) * 2013-06-12 2019-03-19 Applied Materials, Inc. Fast and continuous eddy-current metrology of a conductive film
FR3007517B1 (fr) 2013-06-20 2016-08-19 Michelin & Cie Systeme de mesure de l'epaisseur d'une couche de gomme d'un pneumatique
FR3009076B1 (fr) * 2013-07-26 2017-03-31 Michelin & Cie Systeme de mesure de l'epaisseur d'une couche de gomme d'un pneumatique

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB425586A (en) * 1934-11-21 1935-03-18 Alfred Loewenstein Improvements relating to systems for electrically measuring the thickness of metallic walls, sheets and the like
GB453424A (en) * 1935-02-08 1936-09-08 Allan Brown Stevenson Apparatus for the determination of the thickness of metal walls
GB565561A (en) * 1941-12-30 1944-11-16 John Rae Park An improved instrument or gauge for use in facilitating the turning or machining of certain metal components also applicable for detecting hidden faults in metal components
US2764734A (en) * 1952-10-03 1956-09-25 Wilfrid A Yates Phase angle method of metal thickness indication
US3229198A (en) * 1962-09-28 1966-01-11 Hugo L Libby Eddy current nondestructive testing device for measuring multiple parameter variables of a metal sample
US3358225A (en) * 1964-03-27 1967-12-12 Richard S Peugeot Lift-off compensation for eddy current testers
US3535625A (en) * 1968-04-22 1970-10-20 Garrett Corp Strain and flaw detector
US3626344A (en) * 1969-07-28 1971-12-07 Viktor Egorovich Shaternikov Eddy currents transducer for electrical devices to control coating thickness and surface profile of metal articles
FR2140864A5 (de) * 1971-06-10 1973-01-19 Commissariat Energie Atomique
US3878457A (en) * 1973-11-16 1975-04-15 Wayne E Rodgers Thin film thickness measuring apparatus using an unbalanced inductive bridge
DE2410047A1 (de) * 1974-03-02 1975-09-11 Nix Steingroeve Elektro Physik Elektromagnetischer schichtdickenmesser mit umschaltbarer mess-frequenz
DE2440674A1 (de) * 1974-08-24 1976-03-11 Brockhaus J G Dr Ing Kg Messgeraet fuer elektroblech, insbesondere fuer ganze tafeln
JPS54107764A (en) * 1978-02-13 1979-08-23 Toshiba Corp Thickness measuring method
FR2500632B2 (fr) * 1980-11-12 1987-12-24 Revigny Soc Metall Dispositif de detection par courants de foucault de defauts dans un produit metallique
FR2507310A1 (fr) * 1981-06-04 1982-12-10 Commissariat Energie Atomique Procede pour determiner le profil d'une surface metallique conductrice, procede pour comparer ce profil a un profil modele et dispositif pour la mise en oeuvre de ces procedes
JPS5967405A (ja) * 1982-09-30 1984-04-17 Sumitomo Metal Ind Ltd ライナ厚測定方法
GB2140564B (en) * 1983-05-23 1986-10-22 Central Electr Generat Board Cable corrosion monitor
IT1194275B (it) * 1983-06-15 1988-09-14 Cise Spa Misuratore di spessori elevati "senza contatto" per materiali metallici ad di sopra della temperatura di curie
FR2552540B1 (fr) * 1983-09-27 1987-03-20 Commissariat Energie Atomique Dispositif pour mesurer la proximite d'une surface metallique conductrice

Also Published As

Publication number Publication date
US4752739A (en) 1988-06-21
JPS61102504A (ja) 1986-05-21
EP0179720A1 (de) 1986-04-30
DE179720T1 (de) 1986-10-16
EP0179720B1 (de) 1989-10-04
KR860003492A (ko) 1986-05-26
FR2572175A1 (fr) 1986-04-25
ATE46970T1 (de) 1989-10-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee