FR2140864A5 - - Google Patents

Info

Publication number
FR2140864A5
FR2140864A5 FR7121092A FR7121092A FR2140864A5 FR 2140864 A5 FR2140864 A5 FR 2140864A5 FR 7121092 A FR7121092 A FR 7121092A FR 7121092 A FR7121092 A FR 7121092A FR 2140864 A5 FR2140864 A5 FR 2140864A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7121092A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7121092A priority Critical patent/FR2140864A5/fr
Application granted granted Critical
Publication of FR2140864A5 publication Critical patent/FR2140864A5/fr
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/023Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance where the material is placed in the field of a coil

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
FR7121092A 1971-06-10 1971-06-10 Expired FR2140864A5 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7121092A FR2140864A5 (de) 1971-06-10 1971-06-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7121092A FR2140864A5 (de) 1971-06-10 1971-06-10

Publications (1)

Publication Number Publication Date
FR2140864A5 true FR2140864A5 (de) 1973-01-19

Family

ID=9078423

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7121092A Expired FR2140864A5 (de) 1971-06-10 1971-06-10

Country Status (1)

Country Link
FR (1) FR2140864A5 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2572175A1 (fr) * 1984-10-24 1986-04-25 Stein Heurtey Procede et dispositif pour mesurer l'epaisseur de couches metalliques minces deposees sur un support conducteur
WO2019002280A1 (de) * 2017-06-29 2019-01-03 Aixtron Se Verfahren zur bestimmung der dampfkonzentration unter verwendung der magnetischen eigenschaften des dampfes

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4752739A (en) * 1984-10-16 1988-06-21 Stein Heurtey Device for measuring the thickness of thin metallic layers deposited on a conductive support
FR2572175A1 (fr) * 1984-10-24 1986-04-25 Stein Heurtey Procede et dispositif pour mesurer l'epaisseur de couches metalliques minces deposees sur un support conducteur
EP0179720A1 (de) * 1984-10-24 1986-04-30 Stein Heurtey Verfahren und Vorrichtung zur Dickenmessung von dünnen, auf einen leitenden Träger aufgebrachten, metallischen Schichten
WO2019002280A1 (de) * 2017-06-29 2019-01-03 Aixtron Se Verfahren zur bestimmung der dampfkonzentration unter verwendung der magnetischen eigenschaften des dampfes

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Legal Events

Date Code Title Description
ST Notification of lapse