SE9504417D0 - Metod för att bestämma koncentrationen av en specifik gas och en analysapparat - Google Patents

Metod för att bestämma koncentrationen av en specifik gas och en analysapparat

Info

Publication number
SE9504417D0
SE9504417D0 SE9504417A SE9504417A SE9504417D0 SE 9504417 D0 SE9504417 D0 SE 9504417D0 SE 9504417 A SE9504417 A SE 9504417A SE 9504417 A SE9504417 A SE 9504417A SE 9504417 D0 SE9504417 D0 SE 9504417D0
Authority
SE
Sweden
Prior art keywords
analyzer
concentration
determining
polarization
specific gas
Prior art date
Application number
SE9504417A
Other languages
English (en)
Inventor
Rolf Castor
Original Assignee
Siemens Elema Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Elema Ab filed Critical Siemens Elema Ab
Priority to SE9504417A priority Critical patent/SE9504417D0/sv
Publication of SE9504417D0 publication Critical patent/SE9504417D0/sv
Priority to EP96116800A priority patent/EP0779507A1/en
Priority to US08/756,690 priority patent/US5739910A/en
Priority to JP8328454A priority patent/JPH09329543A/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N2021/8578—Gaseous flow
    • G01N2021/8585—Gaseous flow using porous sheets, e.g. for separating aerosols

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
SE9504417A 1995-12-11 1995-12-11 Metod för att bestämma koncentrationen av en specifik gas och en analysapparat SE9504417D0 (sv)

Priority Applications (4)

Application Number Priority Date Filing Date Title
SE9504417A SE9504417D0 (sv) 1995-12-11 1995-12-11 Metod för att bestämma koncentrationen av en specifik gas och en analysapparat
EP96116800A EP0779507A1 (en) 1995-12-11 1996-10-18 A method for determining the concentration of a specific gas and an analyzer
US08/756,690 US5739910A (en) 1995-12-11 1996-11-26 Method for determining the concentration of a specific gas and an analyzer
JP8328454A JPH09329543A (ja) 1995-12-11 1996-12-09 混合ガス内の特定ガスの濃度測定方法、アナライザ、及び、楕円偏光計（エリプソメータ）を、混合ガス内の特定ガスの濃度を連続的に測定するために用いる方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9504417A SE9504417D0 (sv) 1995-12-11 1995-12-11 Metod för att bestämma koncentrationen av en specifik gas och en analysapparat

Publications (1)

Publication Number Publication Date
SE9504417D0 true SE9504417D0 (sv) 1995-12-11

Family

ID=20400540

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9504417A SE9504417D0 (sv) 1995-12-11 1995-12-11 Metod för att bestämma koncentrationen av en specifik gas och en analysapparat

Country Status (4)

Country Link
US (1) US5739910A (sv)
EP (1) EP0779507A1 (sv)
JP (1) JPH09329543A (sv)
SE (1) SE9504417D0 (sv)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29802464U1 (de) * 1997-03-25 1998-06-04 Schmekel Bjoern Vorrichtung zur Messung des Brechungsindex
US6319736B1 (en) 1998-08-28 2001-11-20 Interuniversitair Microelektronica Centrum (Imec) Apparatus and method for determining porosity
AU2002224399A1 (en) * 2000-10-17 2002-04-29 Neophotonics Corporation Coating formation by reactive deposition
US6798499B2 (en) * 2001-07-18 2004-09-28 Alps Electric Co., Ltd. Method of forming optical thin films on substrate at high accuracy and apparatus therefor
US7209234B2 (en) * 2002-12-31 2007-04-24 J.A. Woollam Co., Inc. Combined use of oscillating means and ellipsometry to determine uncorrelated effective thickness and optical constants of material deposited from a fluid
FR2872910B1 (fr) * 2004-07-07 2006-10-13 Nanoraptor Sa Composant optique pour l'observation d'un echantillon nanometrique, systeme comprenant un tel composant, procede d'analyse mettant en oeuvre ce composant, et leurs applications
KR101105328B1 (ko) * 2009-11-23 2012-01-16 한국표준과학연구원 분자 흡착 및 해리 동특성 측정장치 및 측정방법
WO2011113007A2 (en) * 2010-03-12 2011-09-15 Board Of Regents Of The University Of Texas System Modification of a flow cell to measure adsorption kinetics under stagnation point flow and development of a setup correction procedure for obtaining adsorption kinetics at the stagnation point
CN106990049B (zh) * 2017-04-07 2019-12-06 鲁汶仪器有限公司（比利时） 测量凝结气体折射率的系统和方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3627876A1 (de) * 1986-08-16 1988-02-25 Felten & Guilleaume Energie Verfahren und einrichtung zum messen der gaskonzentration in einem gasgemisch
US4906844A (en) * 1988-08-12 1990-03-06 Rockwell International Corporation Phase sensitive optical monitor for thin film deposition
DE3936541C2 (de) * 1988-11-02 1998-05-20 Ricoh Kk Verfahren zum Messen von mindestens zwei unbekannten physikalischen Größen einer einlagigen Dünnschicht oder der obersten Lage einer mehrlagigen Dünnschicht-Struktur
JP2927934B2 (ja) * 1990-11-16 1999-07-28 株式会社リコー 薄膜測定方法および装置
EP0598341B1 (en) * 1992-11-17 1998-09-23 Hoechst Aktiengesellschaft Optical sensor for detecting chemical species
GB9412280D0 (en) * 1994-06-18 1994-08-10 Univ Coventry Optical gas sensor

Also Published As

Publication number Publication date
US5739910A (en) 1998-04-14
EP0779507A1 (en) 1997-06-18
JPH09329543A (ja) 1997-12-22

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