CN106990049B - 测量凝结气体折射率的系统和方法 - Google Patents
测量凝结气体折射率的系统和方法 Download PDFInfo
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- CN106990049B CN106990049B CN201710223379.6A CN201710223379A CN106990049B CN 106990049 B CN106990049 B CN 106990049B CN 201710223379 A CN201710223379 A CN 201710223379A CN 106990049 B CN106990049 B CN 106990049B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
- G01N2021/213—Spectrometric ellipsometry
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CN201710223379.6A CN106990049B (zh) | 2017-04-07 | 2017-04-07 | 测量凝结气体折射率的系统和方法 |
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CN201710223379.6A CN106990049B (zh) | 2017-04-07 | 2017-04-07 | 测量凝结气体折射率的系统和方法 |
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CN106990049A CN106990049A (zh) | 2017-07-28 |
CN106990049B true CN106990049B (zh) | 2019-12-06 |
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CN201710223379.6A Active CN106990049B (zh) | 2017-04-07 | 2017-04-07 | 测量凝结气体折射率的系统和方法 |
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Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US5276503A (en) * | 1990-11-05 | 1994-01-04 | Ninon Shinku Gijutsu Kabushiki Kaisha | Method and apparatus for gas phase synthesis |
SE9504417D0 (sv) * | 1995-12-11 | 1995-12-11 | Siemens Elema Ab | Metod för att bestämma koncentrationen av en specifik gas och en analysapparat |
US6662631B2 (en) * | 1998-08-28 | 2003-12-16 | Interuniversitair Microelektronica Centrum | Method and apparatus for characterization of porous films |
US7042570B2 (en) * | 2002-01-25 | 2006-05-09 | The Regents Of The University Of California | Porous thin film time-varying reflectivity analysis of samples |
US9007593B2 (en) * | 2010-07-20 | 2015-04-14 | The Regents Of The University Of California | Temperature response sensing and classification of analytes with porous optical films |
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TR01 | Transfer of patent right |
Effective date of registration: 20210120 Address after: 221300 No.8, Liaohe West Road, Pizhou Economic Development Zone, Xuzhou City, Jiangsu Province Patentee after: JIANGSU LEUVEN INSTRUMMENTS Co.,Ltd. Address before: 218 tewustin Road, Leuven, Belgium Patentee before: LEUVEN INSTRUMENTS |
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TR01 | Transfer of patent right | ||
CP03 | Change of name, title or address |
Address after: 221300 No.8, Liaohe West Road, Pizhou Economic Development Zone, Xuzhou City, Jiangsu Province Patentee after: Jiangsu Luwen Instrument Co.,Ltd. Address before: 221300 No.8, Liaohe West Road, Pizhou Economic Development Zone, Xuzhou City, Jiangsu Province Patentee before: JIANGSU LEUVEN INSTRUMMENTS Co.,Ltd. |
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CP03 | Change of name, title or address |