SE8204293D0 - Contour measuring system with redundant arrangement of measuring points - Google Patents

Contour measuring system with redundant arrangement of measuring points

Info

Publication number
SE8204293D0
SE8204293D0 SE8204293A SE8204293A SE8204293D0 SE 8204293 D0 SE8204293 D0 SE 8204293D0 SE 8204293 A SE8204293 A SE 8204293A SE 8204293 A SE8204293 A SE 8204293A SE 8204293 D0 SE8204293 D0 SE 8204293D0
Authority
SE
Sweden
Prior art keywords
measuring
measured
interferometer
contour
define
Prior art date
Application number
SE8204293A
Other languages
English (en)
Other versions
SE8204293L (sv
SE454539B (sv
Inventor
A H Greenleaf
J T Watson
Original Assignee
Itek Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Itek Corp filed Critical Itek Corp
Publication of SE8204293D0 publication Critical patent/SE8204293D0/sv
Publication of SE8204293L publication Critical patent/SE8204293L/sv
Publication of SE454539B publication Critical patent/SE454539B/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
SE8204293A 1981-07-13 1982-07-12 Sett och anordningar for metning av konturen av tva- resp tredimensionella ytor SE454539B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/282,552 US4457625A (en) 1981-07-13 1981-07-13 Self calibrating contour measuring system using fringe counting interferometers

Publications (3)

Publication Number Publication Date
SE8204293D0 true SE8204293D0 (sv) 1982-07-12
SE8204293L SE8204293L (sv) 1983-01-14
SE454539B SE454539B (sv) 1988-05-09

Family

ID=23082031

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8204293A SE454539B (sv) 1981-07-13 1982-07-12 Sett och anordningar for metning av konturen av tva- resp tredimensionella ytor

Country Status (10)

Country Link
US (1) US4457625A (sv)
JP (1) JPS5866006A (sv)
BE (1) BE893811A (sv)
CA (1) CA1186893A (sv)
DE (1) DE3226005A1 (sv)
FR (1) FR2509458B1 (sv)
GB (1) GB2102574B (sv)
IL (1) IL66295A (sv)
IT (1) IT1151835B (sv)
SE (1) SE454539B (sv)

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CN108468029B (zh) * 2018-02-12 2020-01-21 中国科学院国家天文台南京天文光学技术研究所 用于碳化硅光学镜面改性与面形提升的磁控溅射扫描方法
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Also Published As

Publication number Publication date
FR2509458B1 (fr) 1986-07-25
BE893811A (fr) 1982-11-03
IT1151835B (it) 1986-12-24
IT8222360A0 (it) 1982-07-12
GB2102574B (en) 1985-05-09
DE3226005A1 (de) 1983-03-03
CA1186893A (en) 1985-05-14
IL66295A (en) 1987-12-20
JPS5866006A (ja) 1983-04-20
FR2509458A1 (fr) 1983-01-14
SE8204293L (sv) 1983-01-14
SE454539B (sv) 1988-05-09
GB2102574A (en) 1983-02-02
US4457625A (en) 1984-07-03

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