SE7801728L - Metod och anordning for att rikta en strale av eletroner fran en elektronkella mot en malarea - Google Patents
Metod och anordning for att rikta en strale av eletroner fran en elektronkella mot en malareaInfo
- Publication number
- SE7801728L SE7801728L SE7801728A SE7801728A SE7801728L SE 7801728 L SE7801728 L SE 7801728L SE 7801728 A SE7801728 A SE 7801728A SE 7801728 A SE7801728 A SE 7801728A SE 7801728 L SE7801728 L SE 7801728L
- Authority
- SE
- Sweden
- Prior art keywords
- electrones
- radium
- directing
- electronic cell
- male area
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3007—Electron or ion-optical systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US77123577A | 1977-02-23 | 1977-02-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
SE7801728L true SE7801728L (sv) | 1978-08-24 |
SE437441B SE437441B (sv) | 1985-02-25 |
Family
ID=25091155
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE7801728A SE437441B (sv) | 1977-02-23 | 1978-02-15 | Metod for att dirigera en strale elktroner fran en elektronkella mot en malarea, samt apparat for tillempning av metoden |
Country Status (9)
Country | Link |
---|---|
JP (1) | JPS53124078A (sv) |
BR (1) | BR7801031A (sv) |
CA (1) | CA1166766A (sv) |
DE (1) | DE2805371C2 (sv) |
FR (1) | FR2382091A1 (sv) |
GB (1) | GB1587852A (sv) |
IT (1) | IT1158434B (sv) |
NL (1) | NL7802010A (sv) |
SE (1) | SE437441B (sv) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS543476A (en) * | 1977-06-09 | 1979-01-11 | Jeol Ltd | Electron beam exposure device |
GB1598219A (en) * | 1977-08-10 | 1981-09-16 | Ibm | Electron beam system |
JPS5679429A (en) * | 1979-12-03 | 1981-06-30 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Electron beam exposure process |
EP0053225B1 (en) * | 1980-11-28 | 1985-03-13 | International Business Machines Corporation | Electron beam system and method |
US4423305A (en) * | 1981-07-30 | 1983-12-27 | International Business Machines Corporation | Method and apparatus for controlling alignment of an electron beam of a variable shape |
JPS5928336A (ja) * | 1982-08-09 | 1984-02-15 | Nippon Telegr & Teleph Corp <Ntt> | パタ−ン形成法 |
CN116441562B (zh) * | 2023-06-16 | 2023-08-15 | 西安赛隆增材技术股份有限公司 | 一种电子束的束斑的校准装置及校准方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL6807439A (sv) * | 1968-05-27 | 1969-12-01 | ||
US3644700A (en) * | 1969-12-15 | 1972-02-22 | Ibm | Method and apparatus for controlling an electron beam |
US3801792A (en) * | 1973-05-23 | 1974-04-02 | Bell Telephone Labor Inc | Electron beam apparatus |
JPS5251871A (en) * | 1975-10-23 | 1977-04-26 | Rikagaku Kenkyusho | Projecting method for charge particle beams |
JPS5283177A (en) * | 1975-12-31 | 1977-07-11 | Fujitsu Ltd | Electron beam exposure device |
GB1557924A (en) * | 1976-02-05 | 1979-12-19 | Western Electric Co | Irradiation apparatus and methods |
NL177578C (nl) * | 1976-05-14 | 1985-10-16 | Thomson Csf | Inrichting voor het beschrijven van een voorwerp met een deeltjesbundel. |
FR2351497A1 (fr) * | 1976-05-14 | 1977-12-09 | Thomson Csf | Dispositif permettant le trace programme de figures de formes differentes |
DE2627632A1 (de) * | 1976-06-19 | 1977-12-22 | Jenoptik Jena Gmbh | Verfahren und einrichtung zur nichtthermischen elektronenstrahlbearbeitung |
JPS5320391A (en) * | 1976-08-09 | 1978-02-24 | Becton Dickinson Co | Blood inspection apparatus |
-
1977
- 1977-11-29 CA CA000291957A patent/CA1166766A/en not_active Expired
-
1978
- 1978-01-05 FR FR7800742A patent/FR2382091A1/fr active Granted
- 1978-01-20 GB GB2456/78A patent/GB1587852A/en not_active Expired
- 1978-02-09 DE DE2805371A patent/DE2805371C2/de not_active Expired
- 1978-02-10 IT IT20143/78A patent/IT1158434B/it active
- 1978-02-15 JP JP1548478A patent/JPS53124078A/ja active Granted
- 1978-02-15 SE SE7801728A patent/SE437441B/sv not_active IP Right Cessation
- 1978-02-21 BR BR7801031A patent/BR7801031A/pt unknown
- 1978-02-22 NL NL7802010A patent/NL7802010A/xx not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
CA1166766A (en) | 1984-05-01 |
IT1158434B (it) | 1987-02-18 |
FR2382091B1 (sv) | 1982-04-09 |
FR2382091A1 (fr) | 1978-09-22 |
NL7802010A (nl) | 1978-08-25 |
JPS5424833B2 (sv) | 1979-08-23 |
JPS53124078A (en) | 1978-10-30 |
IT7820143A0 (it) | 1978-02-10 |
GB1587852A (en) | 1981-04-08 |
DE2805371C2 (de) | 1984-02-16 |
BR7801031A (pt) | 1978-12-12 |
DE2805371A1 (de) | 1978-08-24 |
SE437441B (sv) | 1985-02-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
NUG | Patent has lapsed |
Ref document number: 7801728-2 Effective date: 19930912 Format of ref document f/p: F |