SE466914B - Foerfarande foer framstaellning av svart titannitrid - Google Patents
Foerfarande foer framstaellning av svart titannitridInfo
- Publication number
- SE466914B SE466914B SE8901417A SE8901417A SE466914B SE 466914 B SE466914 B SE 466914B SE 8901417 A SE8901417 A SE 8901417A SE 8901417 A SE8901417 A SE 8901417A SE 466914 B SE466914 B SE 466914B
- Authority
- SE
- Sweden
- Prior art keywords
- reactor
- plasma
- titanium
- titanium halide
- direct current
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 18
- 150000004767 nitrides Chemical class 0.000 title 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 28
- 239000007789 gas Substances 0.000 claims description 26
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 23
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 20
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical group Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 claims description 18
- 239000010936 titanium Substances 0.000 claims description 17
- 229910052719 titanium Inorganic materials 0.000 claims description 17
- -1 titanium halide Chemical class 0.000 claims description 16
- 229910052757 nitrogen Inorganic materials 0.000 claims description 14
- 239000000843 powder Substances 0.000 claims description 14
- 229910052786 argon Inorganic materials 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 229910021529 ammonia Inorganic materials 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 230000001590 oxidative effect Effects 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 238000010494 dissociation reaction Methods 0.000 claims description 3
- 230000005593 dissociations Effects 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 19
- 239000001301 oxygen Substances 0.000 description 19
- 229910052760 oxygen Inorganic materials 0.000 description 19
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 9
- 239000000376 reactant Substances 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 6
- 238000001816 cooling Methods 0.000 description 6
- 239000004744 fabric Substances 0.000 description 4
- 238000004064 recycling Methods 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000002482 conductive additive Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002932 luster Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 239000004568 cement Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 208000028659 discharge Diseases 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- 229940058401 polytetrafluoroethylene Drugs 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- HQVZOORKDNCGCK-UHFFFAOYSA-N 2-[(2,4-dichlorophenyl)methyl]-4-(2,4,4-trimethylpentan-2-yl)phenol Chemical compound CC(C)(C)CC(C)(C)C1=CC=C(O)C(CC=2C(=CC(Cl)=CC=2)Cl)=C1 HQVZOORKDNCGCK-UHFFFAOYSA-N 0.000 description 1
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 1
- 206010024453 Ligament sprain Diseases 0.000 description 1
- 208000010040 Sprains and Strains Diseases 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000002537 cosmetic Substances 0.000 description 1
- 238000012258 culturing Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000976 ink Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000001420 photoelectron spectroscopy Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000012429 reaction media Substances 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
- DUNKXUFBGCUVQW-UHFFFAOYSA-J zirconium tetrachloride Chemical compound Cl[Zr](Cl)(Cl)Cl DUNKXUFBGCUVQW-UHFFFAOYSA-J 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/0821—Oxynitrides of metals, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/076—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with titanium or zirconium or hafnium
- C01B21/0763—Preparation from titanium, zirconium or hafnium halides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0894—Processes carried out in the presence of a plasma
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/12—Surface area
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/60—Optical properties, e.g. expressed in CIELAB-values
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/80—Compositional purity
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Catalysts (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB888809651A GB8809651D0 (en) | 1988-04-23 | 1988-04-23 | Nitrogen compounds |
Publications (3)
Publication Number | Publication Date |
---|---|
SE8901417D0 SE8901417D0 (sv) | 1989-04-19 |
SE8901417L SE8901417L (sv) | 1989-10-24 |
SE466914B true SE466914B (sv) | 1992-04-27 |
Family
ID=10635738
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE8901417A SE466914B (sv) | 1988-04-23 | 1989-04-19 | Foerfarande foer framstaellning av svart titannitrid |
Country Status (10)
Country | Link |
---|---|
US (1) | US5002646A (de) |
EP (1) | EP0340907B1 (de) |
JP (1) | JPH0222110A (de) |
AU (1) | AU611274B2 (de) |
CH (1) | CH678522A5 (de) |
DE (1) | DE3913200A1 (de) |
FR (1) | FR2630427B1 (de) |
GB (2) | GB8809651D0 (de) |
IT (1) | IT1231757B (de) |
SE (1) | SE466914B (de) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8913106D0 (en) * | 1989-06-07 | 1989-07-26 | Tioxide Group Plc | Production of nitrogen compounds |
US5137542A (en) * | 1990-08-08 | 1992-08-11 | Minnesota Mining And Manufacturing Company | Abrasive printed with an electrically conductive ink |
US5118488A (en) * | 1990-08-28 | 1992-06-02 | Martin Marietta Energy Systems, Inc. | Process for making whiskers, fibers and flakes of transition metal compounds |
US5188979A (en) * | 1991-08-26 | 1993-02-23 | Motorola Inc. | Method for forming a nitride layer using preheated ammonia |
DE4214719C2 (de) * | 1992-05-04 | 1995-02-02 | Starck H C Gmbh Co Kg | Verfahren zur Herstellung feinteiliger Metall- und Keramikpulver |
GB9306802D0 (en) * | 1993-04-01 | 1993-05-26 | Tioxide Specialties Ltd | Process for the production of silicon nitride |
US5405515A (en) * | 1993-08-17 | 1995-04-11 | Fang; Pao-Hsien | Method and apparatus for production of a carbon nitride |
JPH08170174A (ja) * | 1994-12-14 | 1996-07-02 | Nec Corp | TiN膜の形成方法 |
US5749937A (en) * | 1995-03-14 | 1998-05-12 | Lockheed Idaho Technologies Company | Fast quench reactor and method |
US7576296B2 (en) | 1995-03-14 | 2009-08-18 | Battelle Energy Alliance, Llc | Thermal synthesis apparatus |
WO2001046067A1 (en) | 1999-12-21 | 2001-06-28 | Bechtel Bwxt Idaho, Llc | Hydrogen and elemental carbon production from natural gas and other hydrocarbons |
US7354561B2 (en) | 2004-11-17 | 2008-04-08 | Battelle Energy Alliance, Llc | Chemical reactor and method for chemically converting a first material into a second material |
KR100967465B1 (ko) * | 2004-12-28 | 2010-07-07 | 다이니폰 인사츠 가부시키가이샤 | 표시 소자용 흑색 수지 조성물 및 표시 소자용 부재 |
JP5095939B2 (ja) * | 2004-12-28 | 2012-12-12 | 石原産業株式会社 | 黒色系酸窒化チタン |
US7491349B2 (en) * | 2004-12-28 | 2009-02-17 | Ishihara Sangyo Kaisha, Ltd. | Black titanium oxynitride |
KR101485436B1 (ko) | 2007-03-20 | 2015-01-23 | 도레이 카부시키가이샤 | 흑색 수지 조성물, 수지 블랙 매트릭스, 컬러 필터 및 액정표시장치 |
CN101861283A (zh) * | 2007-11-15 | 2010-10-13 | 尤米科尔公司 | 制造金红石二氧化钛粉末的方法 |
JP4945544B2 (ja) * | 2008-11-04 | 2012-06-06 | 株式会社ホンダアクセス | 車両部品の装飾構造 |
US8591821B2 (en) | 2009-04-23 | 2013-11-26 | Battelle Energy Alliance, Llc | Combustion flame-plasma hybrid reactor systems, and chemical reactant sources |
TWI483999B (zh) * | 2009-06-15 | 2015-05-11 | Toray Industries | 黑色複合微粒子、黑色樹脂組成物、彩色濾光片基板及液晶顯示裝置 |
WO2018061644A1 (ja) * | 2016-09-30 | 2018-04-05 | 富士フイルム株式会社 | 金属窒化物含有粒子、分散組成物、硬化性組成物、硬化膜、及びそれらの製造方法、並びにカラーフィルタ、固体撮像素子、固体撮像装置、赤外線センサ |
JP6667422B2 (ja) * | 2016-11-22 | 2020-03-18 | 三菱マテリアル電子化成株式会社 | 黒色膜形成用混合粉末及びその製造方法 |
CN108217612A (zh) * | 2018-01-30 | 2018-06-29 | 攀枝花学院 | 制备球形氮化钛粉末的方法及设备 |
WO2019176409A1 (ja) | 2018-03-13 | 2019-09-19 | 富士フイルム株式会社 | 硬化膜の製造方法、固体撮像素子の製造方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2413778A (en) * | 1944-10-14 | 1947-01-07 | Du Pont | Production of titanium nitride |
GB787516A (en) * | 1955-02-24 | 1957-12-11 | British Titan Products | Improvements in or relating to the preparation of titanium nitride |
DE1066549B (de) * | 1957-07-17 | 1959-10-08 | Societe Anonyme des Manufactures des Glaces et Produits Chimiques de Saint-Gobain, Chauny &. Cirey, Paris | Verfahren zur Herstellung von chemischen Verbindungen von hohem Reinheitsgrad |
DE1160831B (de) * | 1962-04-21 | 1964-01-09 | Knapsack Ag | Verfahren und Vorrichtung zur Herstellung von Titannitrid |
FR1359434A (fr) * | 1962-04-21 | 1964-04-24 | Knapsack Ag | Procédé et appareil pour la préparation du nitrure de titane |
GB1199811A (en) * | 1968-03-09 | 1970-07-22 | British Titan Products | Production of Nitrogen-Containing Compounds |
US3591338A (en) * | 1968-06-05 | 1971-07-06 | Du Pont | Preparation of metal nitrides |
JPS4945079B1 (de) * | 1969-01-07 | 1974-12-02 | ||
US4022872A (en) * | 1975-11-12 | 1977-05-10 | Ppg Industries, Inc. | Process for preparing finely-divided refractory powders |
US4080431A (en) * | 1976-12-20 | 1978-03-21 | Ppg Industries, Inc. | Recovery of refractory hard metal powder product |
US4851206A (en) * | 1981-07-15 | 1989-07-25 | The Board Of Trustees Of The Leland Stanford Junior University, Stanford University | Methods and compostions involving high specific surface area carbides and nitrides |
JPS5976802A (ja) * | 1982-10-26 | 1984-05-02 | Japan Metals & Chem Co Ltd | 気相反応法による窒化チタン超微粉体の製造方法 |
JPS6051616A (ja) * | 1983-08-30 | 1985-03-23 | Mitsubishi Metal Corp | 微細な有色粉末の製法 |
GB2167395B (en) * | 1984-11-23 | 1989-05-17 | Mitsubishi Metal Corp | Black pigment |
FR2591412A1 (fr) * | 1985-12-10 | 1987-06-12 | Air Liquide | Procede de fabrication de poudres et reacteur etanche a plasma micro-onde |
JPS62260864A (ja) * | 1986-05-07 | 1987-11-13 | Mitsubishi Metal Corp | 黒色顔料 |
US4929433A (en) * | 1987-10-22 | 1990-05-29 | Alfred University | Method for the preparation of sinterable nitrides |
-
1988
- 1988-04-23 GB GB888809651A patent/GB8809651D0/en active Pending
-
1989
- 1989-03-31 GB GB8907258A patent/GB2217699B/en not_active Expired - Fee Related
- 1989-04-03 EP EP89303247A patent/EP0340907B1/de not_active Expired
- 1989-04-04 CH CH1236/89A patent/CH678522A5/fr not_active IP Right Cessation
- 1989-04-05 AU AU32460/89A patent/AU611274B2/en not_active Ceased
- 1989-04-19 IT IT8947867A patent/IT1231757B/it active
- 1989-04-19 SE SE8901417A patent/SE466914B/sv not_active IP Right Cessation
- 1989-04-20 US US07/340,790 patent/US5002646A/en not_active Expired - Fee Related
- 1989-04-21 FR FR898905370A patent/FR2630427B1/fr not_active Expired - Fee Related
- 1989-04-21 JP JP1103280A patent/JPH0222110A/ja active Pending
- 1989-04-21 DE DE3913200A patent/DE3913200A1/de not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
AU3246089A (en) | 1989-10-26 |
SE8901417D0 (sv) | 1989-04-19 |
GB2217699B (en) | 1991-11-20 |
GB8809651D0 (en) | 1988-05-25 |
DE3913200A1 (de) | 1989-11-02 |
US5002646A (en) | 1991-03-26 |
FR2630427B1 (fr) | 1992-12-11 |
GB8907258D0 (en) | 1989-05-17 |
CH678522A5 (de) | 1991-09-30 |
EP0340907B1 (de) | 1991-12-04 |
IT8947867A0 (it) | 1989-04-19 |
EP0340907A1 (de) | 1989-11-08 |
GB2217699A (en) | 1989-11-01 |
SE8901417L (sv) | 1989-10-24 |
JPH0222110A (ja) | 1990-01-25 |
FR2630427A1 (fr) | 1989-10-27 |
AU611274B2 (en) | 1991-06-06 |
IT1231757B (it) | 1991-12-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SE466914B (sv) | Foerfarande foer framstaellning av svart titannitrid | |
EP1619168B1 (de) | Vorrichtung zur Herstellung von Metalloxidnanopulvern | |
AU2005203123B2 (en) | Process for making metal oxide nanoparticles | |
KR100251664B1 (ko) | 미립자 금속 분말 | |
CN103415644B (zh) | 涂层以及用于涂层的方法和装置 | |
JP3274740B2 (ja) | 金属およびセラミツク微粉末を製造するための装置及び方法 | |
IL105592A (en) | Preparation of metal powders and ceramic powders with thin particles by chemical reactions of gases | |
CA2259691A1 (en) | Electrically assisted synthesis of particles and films with precisely controlled characteristics | |
IL105591A (en) | Metal powders with tiny particles | |
US6416862B1 (en) | Ultrafine particulate zinc oxide and production process thereof | |
JP2012515643A (ja) | 分別昇華/逆昇華によって固体混合物を連続的に精製するための方法及び装置 | |
EP0401999B1 (de) | Stabilisierte Zusammensetzungen von Metalloxidpulver | |
US5389585A (en) | Fine non-oxide ceramic powders | |
EP1215174B1 (de) | Hochweisse zinkoxidteilchen und verfahren zu dessen herstellung | |
NL8602755A (nl) | Als keramisch materiaal geschikt aluminiumoxyde en werkwijze voor de bereiding daarvan. | |
AU617943B2 (en) | Production of nitrogen compounds | |
US5470446A (en) | Process for the production of silicon nitride | |
Zhao | Evaluation of novel deposition technique: Enhanced chemical vapor deposition | |
Cerqueira et al. | NANOMETRIC Al 2 0 3-ZrO 2 POWDERS PRODUCTION BY ARC PLASMA TREATMENT |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
NAL | Patent in force |
Ref document number: 8901417-9 Format of ref document f/p: F |
|
NUG | Patent has lapsed |
Ref document number: 8901417-9 Format of ref document f/p: F |