SE451900B - Forfarande for tillverkning av ett flexibelt organ for en kraftgivare - Google Patents

Forfarande for tillverkning av ett flexibelt organ for en kraftgivare

Info

Publication number
SE451900B
SE451900B SE8204221A SE8204221A SE451900B SE 451900 B SE451900 B SE 451900B SE 8204221 A SE8204221 A SE 8204221A SE 8204221 A SE8204221 A SE 8204221A SE 451900 B SE451900 B SE 451900B
Authority
SE
Sweden
Prior art keywords
indicator
blank
flexible member
opposite
plane
Prior art date
Application number
SE8204221A
Other languages
English (en)
Swedish (sv)
Other versions
SE8204221L (sv
SE8204221D0 (sv
Inventor
K W Atherton
Original Assignee
Sundstrand Data Control
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sundstrand Data Control filed Critical Sundstrand Data Control
Publication of SE8204221D0 publication Critical patent/SE8204221D0/xx
Publication of SE8204221L publication Critical patent/SE8204221L/
Publication of SE451900B publication Critical patent/SE451900B/sv

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/132Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • Measuring Fluid Pressure (AREA)
  • Position Input By Displaying (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Pressure Sensors (AREA)
  • Bending Of Plates, Rods, And Pipes (AREA)
  • Materials For Medical Uses (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Prostheses (AREA)
SE8204221A 1981-07-14 1982-07-08 Forfarande for tillverkning av ett flexibelt organ for en kraftgivare SE451900B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/283,130 US4394405A (en) 1981-07-14 1981-07-14 Method of making force transducer flexure

Publications (3)

Publication Number Publication Date
SE8204221D0 SE8204221D0 (sv) 1982-07-08
SE8204221L SE8204221L (sv) 1983-01-15
SE451900B true SE451900B (sv) 1987-11-02

Family

ID=23084664

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8204221A SE451900B (sv) 1981-07-14 1982-07-08 Forfarande for tillverkning av ett flexibelt organ for en kraftgivare

Country Status (11)

Country Link
US (1) US4394405A (xx)
JP (1) JPS5818131A (xx)
AU (1) AU554274B2 (xx)
CA (1) CA1191337A (xx)
CH (1) CH654920A5 (xx)
DE (1) DE3225216A1 (xx)
FR (1) FR2509866B1 (xx)
IL (1) IL66178A (xx)
IT (1) IT1149012B (xx)
NO (1) NO822381L (xx)
SE (1) SE451900B (xx)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6173071A (ja) * 1984-09-14 1986-04-15 インタ−ナシヨナル・スタンダ−ド・エレクトリツク・コ−ポレ−シヨン 可撓性ヒンジ装置
US4779463A (en) * 1987-01-13 1988-10-25 Systron Donner Corporation Servo accelerometer
US4932258A (en) * 1988-06-29 1990-06-12 Sundstrand Data Control, Inc. Stress compensated transducer
US5024089A (en) * 1988-06-29 1991-06-18 Sundstrand Data Control, Inc. Stress compensated transducer
US5557044A (en) * 1994-01-21 1996-09-17 Alliedsignal, Inc. Low stress magnet interface
US5532665A (en) * 1994-01-21 1996-07-02 Alliedsignal, Inc. Low stress magnet interface
US5524488A (en) * 1994-01-24 1996-06-11 Alliedsignal Inc. Flux control groove
US5488865A (en) * 1994-08-15 1996-02-06 Alliedsignal Inc. Wide-band servo accelerometer with flat leaf flexure suspension
US7623142B2 (en) * 2004-09-14 2009-11-24 Hewlett-Packard Development Company, L.P. Flexure
US7100447B2 (en) 2004-12-07 2006-09-05 Honeywell International Inc. Super Invar magnetic return path for high performance accelerometers
US7191654B2 (en) * 2005-08-17 2007-03-20 Honeywell International Inc. Methods and systems for adjusting magnetic return path with minimized reluctance
US10335897B2 (en) * 2016-07-28 2019-07-02 Applied Physics, Inc. Laser ablation of accelerometer proof mass

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL136155C (xx) * 1966-09-09
US3702073A (en) * 1969-02-28 1972-11-07 Sundstrand Data Control Accelerometer
US3673873A (en) * 1969-10-23 1972-07-04 North American Rockwell Sensing instrument having a cantilevered proof mass
US3912563A (en) * 1973-06-05 1975-10-14 Matsushita Electric Ind Co Ltd Method of making semiconductor piezoresistive strain transducer
US4105493A (en) * 1975-07-05 1978-08-08 The Gillette Company Production of shaving foil
US4021276A (en) * 1975-12-29 1977-05-03 Western Electric Company, Inc. Method of making rib-structure shadow mask for ion implantation
US4284468A (en) * 1977-12-16 1981-08-18 Llewelyn Stearns Patterned chemical etching of high temperature resistant metals
US4139434A (en) * 1978-01-30 1979-02-13 General Dynamics Corporation Method of making circuitry with bump contacts
JPS54106164A (en) * 1978-02-09 1979-08-20 Toppan Printing Co Ltd Method of fabricating plasma display panel electrode plate
US4182187A (en) * 1978-04-24 1980-01-08 Sundstrand Data Control, Inc. Force balancing assembly for transducers
US4250757A (en) * 1979-11-05 1981-02-17 Sundstrand Data Control, Inc. Movable element with position sensing means for transducers

Also Published As

Publication number Publication date
FR2509866B1 (fr) 1987-03-06
IT8248777A0 (it) 1982-07-08
IL66178A (en) 1987-10-30
NO822381L (no) 1983-01-17
IL66178A0 (en) 1982-09-30
US4394405A (en) 1983-07-19
SE8204221L (sv) 1983-01-15
IT1149012B (it) 1986-12-03
CH654920A5 (it) 1986-03-14
SE8204221D0 (sv) 1982-07-08
CA1191337A (en) 1985-08-06
FR2509866A1 (fr) 1983-01-21
AU8491482A (en) 1983-01-20
DE3225216C2 (xx) 1990-06-13
JPH049269B2 (xx) 1992-02-19
DE3225216A1 (de) 1983-01-27
JPS5818131A (ja) 1983-02-02
AU554274B2 (en) 1986-08-14

Similar Documents

Publication Publication Date Title
EP1596203B1 (en) Magnetic micro-electromechanical sytem (MEMS) sensor and method for its manufacture
SE451900B (sv) Forfarande for tillverkning av ett flexibelt organ for en kraftgivare
US20060185433A1 (en) MEMS teeter-totter accelerometer having reduced non-linearty
JP3433401B2 (ja) 静電容量型加速度センサ
US4825335A (en) Differential capacitive transducer and method of making
EP1737120B1 (en) Voice coil actuator with embedded capacitive sensor for motion, position and/or acceleration detection
JPH06327211A (ja) プレーナーマイクロモータ
JPH04143628A (ja) 静電容量式圧力センサ
JPS60207066A (ja) 平板振子構造の加速度計用センサ
JP2010169681A (ja) 磁束密度増加ダルソンバルmems加速度計のためのシステムおよび方法
JP2006520897A (ja) Mems加速度計
CN105004334A (zh) 面外电磁式半球形微陀螺仪及其制备方法
JP5049427B2 (ja) 振動構造ジャイロスコープの製造方法
SE451899B (sv) Flexibelt organ for en givare for att vid en monteringsbas fastgora ett kraftavkennande element
US10900783B2 (en) MEMS metal-quartz gyroscope
EP4140941A1 (en) Fabrication of mems structures from fused silica for inertial sensors
CN110526200B (zh) 一种具有纯轴向变形敏感梁的面外压阻式加速度计芯片及其制备方法
JP2000502442A (ja) 電磁加速度計
JPH06194383A (ja) サーボ形振動センサ
US20040244183A1 (en) Angular rate sensors and method of fabricating them
JP4681701B2 (ja) 加速度センサ
JPH09184774A (ja) 圧電型物理量センサ
RU2085954C1 (ru) Акселерометр
KR100607360B1 (ko) 3차원 반도체 자이로스코프 센싱 구조
CN116155039A (zh) 一种微型电磁执行器及其制备方法

Legal Events

Date Code Title Description
NUG Patent has lapsed

Ref document number: 8204221-9

Effective date: 19920210

Format of ref document f/p: F