SE451897B - Flexibelt organ for en kraftgivare med ledare belegna pa ytan av det flexibla organet i dess neutrala bojplan - Google Patents

Flexibelt organ for en kraftgivare med ledare belegna pa ytan av det flexibla organet i dess neutrala bojplan

Info

Publication number
SE451897B
SE451897B SE8204218A SE8204218A SE451897B SE 451897 B SE451897 B SE 451897B SE 8204218 A SE8204218 A SE 8204218A SE 8204218 A SE8204218 A SE 8204218A SE 451897 B SE451897 B SE 451897B
Authority
SE
Sweden
Prior art keywords
flexible
mounting base
recessed surface
electrically conductive
neutral bending
Prior art date
Application number
SE8204218A
Other languages
English (en)
Swedish (sv)
Other versions
SE8204218D0 (sv
SE8204218L (en
Inventor
R A Hanson
Original Assignee
Sundstrand Data Control
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sundstrand Data Control filed Critical Sundstrand Data Control
Publication of SE8204218D0 publication Critical patent/SE8204218D0/
Publication of SE8204218L publication Critical patent/SE8204218L/
Publication of SE451897B publication Critical patent/SE451897B/sv

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/132Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Axle Suspensions And Sidecars For Cycles (AREA)
  • Vehicle Body Suspensions (AREA)
  • Gyroscopes (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Springs (AREA)
SE8204218A 1981-07-14 1982-07-08 Flexibelt organ for en kraftgivare med ledare belegna pa ytan av det flexibla organet i dess neutrala bojplan SE451897B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/283,340 US4399700A (en) 1981-07-14 1981-07-14 Force transducer flexure with conductors on surfaces in the neutral bending plane

Publications (3)

Publication Number Publication Date
SE8204218D0 SE8204218D0 (sv) 1982-07-08
SE8204218L SE8204218L (en) 1983-01-15
SE451897B true SE451897B (sv) 1987-11-02

Family

ID=23085570

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8204218A SE451897B (sv) 1981-07-14 1982-07-08 Flexibelt organ for en kraftgivare med ledare belegna pa ytan av det flexibla organet i dess neutrala bojplan

Country Status (11)

Country Link
US (1) US4399700A (it)
JP (1) JPS5814024A (it)
AU (1) AU555277B2 (it)
CA (1) CA1184048A (it)
CH (1) CH654921A5 (it)
DE (1) DE3225255A1 (it)
FR (1) FR2509865B1 (it)
IL (1) IL66177A (it)
IT (1) IT1149011B (it)
NO (1) NO822382L (it)
SE (1) SE451897B (it)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4400979A (en) * 1981-07-14 1983-08-30 Sundstrand Data Control, Inc. Force transducer flexure with conductors on surfaces in the neutral bending plane
US5042301A (en) * 1986-08-25 1991-08-27 Hanson Richard A Pendulous assembly for use in an accelerometer
US4779463A (en) * 1987-01-13 1988-10-25 Systron Donner Corporation Servo accelerometer
US5024089A (en) * 1988-06-29 1991-06-18 Sundstrand Data Control, Inc. Stress compensated transducer
US4932258A (en) * 1988-06-29 1990-06-12 Sundstrand Data Control, Inc. Stress compensated transducer
DE4102805A1 (de) * 1991-01-31 1992-08-13 Bosch Gmbh Robert Kapazitiver beschleunigungssensor
US5532665A (en) * 1994-01-21 1996-07-02 Alliedsignal, Inc. Low stress magnet interface
US5557044A (en) * 1994-01-21 1996-09-17 Alliedsignal, Inc. Low stress magnet interface
US5524488A (en) * 1994-01-24 1996-06-11 Alliedsignal Inc. Flux control groove
US5488865A (en) * 1994-08-15 1996-02-06 Alliedsignal Inc. Wide-band servo accelerometer with flat leaf flexure suspension
DE19816802C2 (de) * 1998-04-16 2000-08-31 Daimler Chrysler Ag Piezoelektrischer Beschleunigungssensor
GB0506081D0 (en) * 2005-03-24 2005-05-04 Gallagher George Force sensors
US10335897B2 (en) * 2016-07-28 2019-07-02 Applied Physics, Inc. Laser ablation of accelerometer proof mass

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3020767A (en) * 1959-10-05 1962-02-13 Kistler Instr Corp Linear accelerometer
US3229530A (en) * 1960-12-12 1966-01-18 North American Aviation Inc Accelerometer
US3331253A (en) * 1963-08-05 1967-07-18 Systron Donner Corp Accelerometer and sensing assembly therefor
US3339419A (en) * 1964-07-02 1967-09-05 North American Aviation Inc Accelerometer
NL136155C (it) * 1966-09-09
US3513711A (en) * 1966-10-03 1970-05-26 Singer General Precision Subminiature single axis accelerometer
US3702073A (en) * 1969-02-28 1972-11-07 Sundstrand Data Control Accelerometer
US4182187A (en) * 1978-04-24 1980-01-08 Sundstrand Data Control, Inc. Force balancing assembly for transducers
AU524751B2 (en) * 1978-05-15 1982-09-30 Sundstrand Data Control, Inc. Movable element with position sensing means
US4250757A (en) * 1979-11-05 1981-02-17 Sundstrand Data Control, Inc. Movable element with position sensing means for transducers
US4342227A (en) * 1980-12-24 1982-08-03 International Business Machines Corporation Planar semiconductor three direction acceleration detecting device and method of fabrication
US4400979A (en) * 1981-07-14 1983-08-30 Sundstrand Data Control, Inc. Force transducer flexure with conductors on surfaces in the neutral bending plane

Also Published As

Publication number Publication date
JPH049267B2 (it) 1992-02-19
NO822382L (no) 1983-01-17
CA1184048A (en) 1985-03-19
AU555277B2 (en) 1986-09-18
FR2509865B1 (fr) 1987-03-06
IT8248776A0 (it) 1982-07-08
DE3225255A1 (de) 1983-02-24
CH654921A5 (it) 1986-03-14
SE8204218D0 (sv) 1982-07-08
US4399700A (en) 1983-08-23
IT1149011B (it) 1986-12-03
AU8491382A (en) 1983-01-20
DE3225255C2 (it) 1990-10-11
JPS5814024A (ja) 1983-01-26
IL66177A (en) 1988-10-31
FR2509865A1 (fr) 1983-01-21
SE8204218L (en) 1983-01-15

Similar Documents

Publication Publication Date Title
US4711128A (en) Micromachined accelerometer with electrostatic return
SE451897B (sv) Flexibelt organ for en kraftgivare med ledare belegna pa ytan av det flexibla organet i dess neutrala bojplan
US6705166B2 (en) Small size, high capacitance readout silicon based MEMS accelerometer
US5287744A (en) Accelerometer with flexure isolation
US5824904A (en) Acceleration sensor using a piezoelectric element
JPS6034069B2 (ja) 変換器用保証質量組立体
US6137150A (en) Semiconductor physical-quantity sensor having a locos oxide film, for sensing a physical quantity such as acceleration, yaw rate, or the like
JPH05256870A (ja) 小型シリコン加速度計及びその方法
WO1990000735A1 (en) Multidimensional force sensor
SE451899B (sv) Flexibelt organ for en givare for att vid en monteringsbas fastgora ett kraftavkennande element
JPH10239347A (ja) 運動センサ
JPH0792046A (ja) 容量性トランスデューサとトランスデューサ素子のプロフィールを制御する方法
JPS63503090A (ja) 加速度計の保証質量境界面
EP0420963A4 (en) Asymmetric flexure for pendulous accelerometer
WO1992003739A1 (en) Accelerometer with rebalance coil stress isolation
SE451898B (sv) Flexibelt organ med elektriska ledare
JPH1114658A (ja) 静電容量式加速度センサ
JP5706773B2 (ja) 位置センサ、計測システム及び平面ステージ
JP3931405B2 (ja) 角速度センサ
JP2581324B2 (ja) 加速度センサ
GB2096326A (en) Force-balance pendulum accelerometers
JP2009068936A (ja) 物理量検出装置
JP4681701B2 (ja) 加速度センサ
JP2008128916A (ja) 電位センサ、電位センサを備える画像形成装置
JPH11271354A (ja) 容量型センサ

Legal Events

Date Code Title Description
NUG Patent has lapsed

Ref document number: 8204218-5

Effective date: 19920210

Format of ref document f/p: F