SE353185B - - Google Patents
Info
- Publication number
- SE353185B SE353185B SE14465/68A SE1446568A SE353185B SE 353185 B SE353185 B SE 353185B SE 14465/68 A SE14465/68 A SE 14465/68A SE 1446568 A SE1446568 A SE 1446568A SE 353185 B SE353185 B SE 353185B
- Authority
- SE
- Sweden
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/69—Etching of wafers, substrates or parts of devices using masks for semiconductor materials
- H10P50/691—Etching of wafers, substrates or parts of devices using masks for semiconductor materials for Group V materials or Group III-V materials
- H10P50/693—Etching of wafers, substrates or parts of devices using masks for semiconductor materials for Group V materials or Group III-V materials characterised by their size, orientation, disposition, behaviour or shape, in horizontal or vertical plane
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/60—Wet etching
- H10P50/64—Wet etching of semiconductor materials
- H10P50/642—Chemical etching
- H10P50/644—Anisotropic liquid etching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/051—Etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/115—Orientation
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US67981867A | 1967-11-01 | 1967-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE353185B true SE353185B (https=) | 1973-01-22 |
Family
ID=24728489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE14465/68A SE353185B (https=) | 1967-11-01 | 1968-10-25 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3506509A (https=) |
| BE (1) | BE723234A (https=) |
| FR (1) | FR96065E (https=) |
| GB (1) | GB1250653A (https=) |
| MY (1) | MY7300448A (https=) |
| NL (1) | NL152115B (https=) |
| SE (1) | SE353185B (https=) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3770533A (en) * | 1971-07-02 | 1973-11-06 | Philips Corp | Method of producing high resolution patterns in single crystals |
| US3909325A (en) * | 1974-06-28 | 1975-09-30 | Motorola Inc | Polycrystalline etch |
| US4137123A (en) * | 1975-12-31 | 1979-01-30 | Motorola, Inc. | Texture etching of silicon: method |
| US4859280A (en) * | 1986-12-01 | 1989-08-22 | Harris Corporation | Method of etching silicon by enhancing silicon etching capability of alkali hydroxide through the addition of positive valence impurity ions |
| US4810557A (en) * | 1988-03-03 | 1989-03-07 | American Telephone And Telegraph Company, At&T Bell Laboratories | Method of making an article comprising a tandem groove, and article produced by the method |
| US4918030A (en) * | 1989-03-31 | 1990-04-17 | Electric Power Research Institute | Method of forming light-trapping surface for photovoltaic cell and resulting structure |
| DE3920644C1 (https=) * | 1989-06-23 | 1990-12-20 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De | |
| US5431777A (en) * | 1992-09-17 | 1995-07-11 | International Business Machines Corporation | Methods and compositions for the selective etching of silicon |
| DE19811878C2 (de) * | 1998-03-18 | 2002-09-19 | Siemens Solar Gmbh | Verfahren und Ätzlösung zum naßchemischen pyramidalen Texturätzen von Siliziumoberflächen |
| US6326689B1 (en) * | 1999-07-26 | 2001-12-04 | Stmicroelectronics, Inc. | Backside contact for touchchip |
| WO2007129555A1 (ja) * | 2006-05-02 | 2007-11-15 | Mimasu Semiconductor Industry Co., Ltd. | 半導体基板の製造方法、ソーラー用半導体基板及びエッチング液 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL105904C (https=) * | 1955-12-30 | |||
| US3041226A (en) * | 1958-04-02 | 1962-06-26 | Hughes Aircraft Co | Method of preparing semiconductor crystals |
| US3425879A (en) * | 1965-10-24 | 1969-02-04 | Texas Instruments Inc | Method of making shaped epitaxial deposits |
-
0
- FR FR172255A patent/FR96065E/fr not_active Expired
-
1967
- 1967-11-01 US US679818A patent/US3506509A/en not_active Expired - Lifetime
-
1968
- 1968-10-25 SE SE14465/68A patent/SE353185B/xx unknown
- 1968-10-28 NL NL686815372A patent/NL152115B/xx unknown
- 1968-10-31 BE BE723234D patent/BE723234A/xx unknown
- 1968-11-01 GB GB1250653D patent/GB1250653A/en not_active Expired
-
1973
- 1973-12-30 MY MY448/73A patent/MY7300448A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| MY7300448A (en) | 1973-12-31 |
| US3506509A (en) | 1970-04-14 |
| DE1806225A1 (de) | 1971-01-28 |
| BE723234A (https=) | 1969-04-01 |
| DE1806225B2 (de) | 1972-08-24 |
| GB1250653A (https=) | 1971-10-20 |
| FR96065E (fr) | 1972-05-19 |
| NL152115B (nl) | 1977-01-17 |
| NL6815372A (https=) | 1969-05-05 |