SE347024B - - Google Patents
Info
- Publication number
- SE347024B SE347024B SE02595/69A SE259569A SE347024B SE 347024 B SE347024 B SE 347024B SE 02595/69 A SE02595/69 A SE 02595/69A SE 259569 A SE259569 A SE 259569A SE 347024 B SE347024 B SE 347024B
- Authority
- SE
- Sweden
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US70937668A | 1968-02-29 | 1968-02-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE347024B true SE347024B (en) | 1972-07-24 |
Family
ID=24849612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE02595/69A SE347024B (en) | 1968-02-29 | 1969-02-26 |
Country Status (13)
| Country | Link |
|---|---|
| US (1) | US3524426A (en) |
| JP (1) | JPS494156B1 (en) |
| AT (1) | AT286738B (en) |
| BE (1) | BE729026A (en) |
| CH (1) | CH501064A (en) |
| DE (1) | DE1911198A1 (en) |
| FR (1) | FR2002902A1 (en) |
| GB (1) | GB1250544A (en) |
| IE (1) | IE33433B1 (en) |
| LU (1) | LU58110A1 (en) |
| NL (1) | NL6903181A (en) |
| NO (1) | NO123939B (en) |
| SE (1) | SE347024B (en) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3649339A (en) * | 1969-09-05 | 1972-03-14 | Eugene C Smith | Apparatus and method for securing a high vacuum for particle coating process |
| US3648654A (en) * | 1970-03-16 | 1972-03-14 | Bell Telephone Labor Inc | Vertical liquid phase crystal growth apparatus |
| US3641973A (en) * | 1970-11-25 | 1972-02-15 | Air Reduction | Vacuum coating apparatus |
| US3915118A (en) * | 1973-09-17 | 1975-10-28 | Etec Corp | Specimen coating device for an SEM |
| US3921572A (en) * | 1974-02-25 | 1975-11-25 | Ibm | Vacuum coating apparatus |
| JPS5130965A (en) * | 1974-09-09 | 1976-03-16 | Matsushita Electric Ind Co Ltd | ATSUMAKUSHUSEKIKAIRO NO SEIZOHOHO |
| US4179530A (en) * | 1977-05-20 | 1979-12-18 | Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh | Process for the deposition of pure semiconductor material |
| US4173944A (en) * | 1977-05-20 | 1979-11-13 | Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh | Silverplated vapor deposition chamber |
| EP0008807A1 (en) * | 1978-09-13 | 1980-03-19 | Elektroschmelzwerk Kempten GmbH | Apparatus and method for the discontinuous or continuous coating of articles or strips by vacuum evaporation |
| DE2940064A1 (en) * | 1979-10-03 | 1981-04-16 | Leybold-Heraeus GmbH, 5000 Köln | VACUUM EVAPORATION SYSTEM WITH A VALVE CHAMBER, A STEAMING CHAMBER AND AN EVAPORATOR CHAMBER |
| JPS5769797A (en) * | 1980-10-17 | 1982-04-28 | Matsushita Electric Ind Co Ltd | Method of producing hybrid thick film integrated circuit |
| JPS57193249U (en) * | 1981-06-03 | 1982-12-07 | ||
| JPS5851594A (en) * | 1981-09-22 | 1983-03-26 | 日本電気株式会社 | Thick film hybrid ic board |
| JPS5885378U (en) * | 1981-12-04 | 1983-06-09 | ソニー株式会社 | printed wiring board |
| US4478174A (en) * | 1983-02-25 | 1984-10-23 | Canadian Patents & Development Limited | Vacuum coating vessel with movable shutter plate |
| JPS61164076U (en) * | 1986-03-20 | 1986-10-11 | ||
| WO2008032668A1 (en) * | 2006-09-11 | 2008-03-20 | Ulvac, Inc. | Vacuum evaporation processing equipment |
| KR101066033B1 (en) * | 2009-07-28 | 2011-09-20 | 엘아이지에이디피 주식회사 | Apparatus for Chemical Vapor Deposition and Apparatus for processing substrate |
| CN106947944A (en) * | 2017-05-23 | 2017-07-14 | 京东方科技集团股份有限公司 | One kind evaporation crucible, vapor deposition source, evaporation coating device and evaporation coating method |
| WO2021174032A1 (en) * | 2020-02-28 | 2021-09-02 | Illinois Tool Works Inc. | Piston monitoring assembly |
-
1968
- 1968-02-29 US US709376A patent/US3524426A/en not_active Expired - Lifetime
-
1969
- 1969-02-24 IE IE237/69A patent/IE33433B1/en unknown
- 1969-02-25 GB GB1250544D patent/GB1250544A/en not_active Expired
- 1969-02-26 SE SE02595/69A patent/SE347024B/xx unknown
- 1969-02-27 FR FR6905207A patent/FR2002902A1/fr not_active Withdrawn
- 1969-02-27 LU LU58110D patent/LU58110A1/xx unknown
- 1969-02-27 BE BE729026D patent/BE729026A/xx unknown
- 1969-02-27 NO NO0830/69A patent/NO123939B/no unknown
- 1969-02-28 JP JP44015284A patent/JPS494156B1/ja active Pending
- 1969-02-28 NL NL6903181A patent/NL6903181A/xx unknown
- 1969-02-28 CH CH306769A patent/CH501064A/en not_active IP Right Cessation
- 1969-02-28 AT AT205669A patent/AT286738B/en not_active IP Right Cessation
- 1969-02-28 DE DE19691911198 patent/DE1911198A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| AT286738B (en) | 1970-12-28 |
| IE33433L (en) | 1969-08-29 |
| GB1250544A (en) | 1971-10-20 |
| NO123939B (en) | 1972-02-07 |
| JPS494156B1 (en) | 1974-01-30 |
| CH501064A (en) | 1970-12-31 |
| LU58110A1 (en) | 1969-06-03 |
| IE33433B1 (en) | 1974-06-26 |
| US3524426A (en) | 1970-08-18 |
| FR2002902A1 (en) | 1969-10-31 |
| DE1911198A1 (en) | 1969-09-18 |
| BE729026A (en) | 1969-08-01 |
| NL6903181A (en) | 1969-09-02 |