SE345881B - - Google Patents

Info

Publication number
SE345881B
SE345881B SE8403/69A SE840369A SE345881B SE 345881 B SE345881 B SE 345881B SE 8403/69 A SE8403/69 A SE 8403/69A SE 840369 A SE840369 A SE 840369A SE 345881 B SE345881 B SE 345881B
Authority
SE
Sweden
Application number
SE8403/69A
Inventor
R Jacobsson
Original Assignee
Aga Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aga Ab filed Critical Aga Ab
Priority to SE8403/69A priority Critical patent/SE345881B/xx
Priority to GB2834670A priority patent/GB1318046A/en
Priority to US45496A priority patent/US3695217A/en
Priority to DE2029014A priority patent/DE2029014C3/de
Priority to JP45051456A priority patent/JPS4947631B1/ja
Priority to FR7021879A priority patent/FR2052572A5/fr
Priority to CH900970A priority patent/CH553258A/xx
Publication of SE345881B publication Critical patent/SE345881B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
SE8403/69A 1969-06-13 1969-06-13 SE345881B (enrdf_load_stackoverflow)

Priority Applications (7)

Application Number Priority Date Filing Date Title
SE8403/69A SE345881B (enrdf_load_stackoverflow) 1969-06-13 1969-06-13
GB2834670A GB1318046A (en) 1969-06-13 1970-06-11 Apparatus for vacuum evaporation
US45496A US3695217A (en) 1969-06-13 1970-06-11 Vapor deposition apparatus
DE2029014A DE2029014C3 (de) 1969-06-13 1970-06-12 Vorrichtung zum Vakuumaufdampfen von Werkstoffgemischen
JP45051456A JPS4947631B1 (enrdf_load_stackoverflow) 1969-06-13 1970-06-13
FR7021879A FR2052572A5 (enrdf_load_stackoverflow) 1969-06-13 1970-06-15
CH900970A CH553258A (de) 1969-06-13 1970-06-15 Vorrichtung zum vakuumaufdampfen.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE8403/69A SE345881B (enrdf_load_stackoverflow) 1969-06-13 1969-06-13

Publications (1)

Publication Number Publication Date
SE345881B true SE345881B (enrdf_load_stackoverflow) 1972-06-12

Family

ID=20273979

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8403/69A SE345881B (enrdf_load_stackoverflow) 1969-06-13 1969-06-13

Country Status (7)

Country Link
US (1) US3695217A (enrdf_load_stackoverflow)
JP (1) JPS4947631B1 (enrdf_load_stackoverflow)
CH (1) CH553258A (enrdf_load_stackoverflow)
DE (1) DE2029014C3 (enrdf_load_stackoverflow)
FR (1) FR2052572A5 (enrdf_load_stackoverflow)
GB (1) GB1318046A (enrdf_load_stackoverflow)
SE (1) SE345881B (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3996469A (en) * 1975-01-06 1976-12-07 Jersey Nuclear-Avco Isotopes, Inc. Floating convection barrier for evaporation source
US4048462A (en) * 1975-01-17 1977-09-13 Airco, Inc. Compact rotary evaporation source
US4091257A (en) * 1975-02-24 1978-05-23 General Electric Company Deep diode devices and method and apparatus
DE3316554C1 (de) * 1983-05-06 1984-07-12 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Verdampfervorrichtung mit Strahlheizung zum Aufdampfen mehrerer Materialien
JP2913745B2 (ja) * 1990-04-10 1999-06-28 松下電器産業株式会社 真空蒸着装置
JP2003113466A (ja) * 2001-07-31 2003-04-18 Fuji Photo Film Co Ltd 真空蒸着装置
DE102012207159A1 (de) * 2012-04-30 2013-10-31 Von Ardenne Anlagentechnik Gmbh Vorrichtung zum Beschichten von Substraten

Also Published As

Publication number Publication date
US3695217A (en) 1972-10-03
JPS4947631B1 (enrdf_load_stackoverflow) 1974-12-17
DE2029014C3 (de) 1979-10-04
DE2029014B2 (de) 1972-12-07
FR2052572A5 (enrdf_load_stackoverflow) 1971-04-09
GB1318046A (en) 1973-05-23
DE2029014A1 (de) 1971-01-07
CH553258A (de) 1974-08-30

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