GB1318046A - Apparatus for vacuum evaporation - Google Patents

Apparatus for vacuum evaporation

Info

Publication number
GB1318046A
GB1318046A GB2834670A GB2834670A GB1318046A GB 1318046 A GB1318046 A GB 1318046A GB 2834670 A GB2834670 A GB 2834670A GB 2834670 A GB2834670 A GB 2834670A GB 1318046 A GB1318046 A GB 1318046A
Authority
GB
United Kingdom
Prior art keywords
substance
support
vacuum evaporation
june
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2834670A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGA AB
Original Assignee
AGA AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AGA AB filed Critical AGA AB
Publication of GB1318046A publication Critical patent/GB1318046A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1318046 Vacuum evaporation apparatus AGA A B 11 June 1970 [13 June 1969] 28346/70 Heading C7F Vacuum evaporation apparatus includes a vacuum chamber 1, a support 10 for the substance to be evaporated, and a means to direct heat on to only a portion of said substance at any instant, the support 10 being rotatable relative to the heating means to heat different portions of the substance in sequence and the thermal resistivity of the support being such that the temperature of said portions is maintained and an entire annulus of the substance vaporizes simultaneously. A groove 11 may be provided for the substance, and may be longitudinally divided to hold different substances, or more than one groove may be provided; heating is either by a deflected electron beam, as shown, by radiant heat, or by laser beam.
GB2834670A 1969-06-13 1970-06-11 Apparatus for vacuum evaporation Expired GB1318046A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE8403/69A SE345881B (en) 1969-06-13 1969-06-13

Publications (1)

Publication Number Publication Date
GB1318046A true GB1318046A (en) 1973-05-23

Family

ID=20273979

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2834670A Expired GB1318046A (en) 1969-06-13 1970-06-11 Apparatus for vacuum evaporation

Country Status (7)

Country Link
US (1) US3695217A (en)
JP (1) JPS4947631B1 (en)
CH (1) CH553258A (en)
DE (1) DE2029014C3 (en)
FR (1) FR2052572A5 (en)
GB (1) GB1318046A (en)
SE (1) SE345881B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3316554C1 (en) * 1983-05-06 1984-07-12 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Evaporator device with jet heating for vapor deposition of several materials

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3996469A (en) * 1975-01-06 1976-12-07 Jersey Nuclear-Avco Isotopes, Inc. Floating convection barrier for evaporation source
US4048462A (en) * 1975-01-17 1977-09-13 Airco, Inc. Compact rotary evaporation source
US4091257A (en) * 1975-02-24 1978-05-23 General Electric Company Deep diode devices and method and apparatus
JP2913745B2 (en) * 1990-04-10 1999-06-28 松下電器産業株式会社 Vacuum deposition equipment
JP2003113466A (en) * 2001-07-31 2003-04-18 Fuji Photo Film Co Ltd Vacuum deposition apparatus
DE102012207159A1 (en) * 2012-04-30 2013-10-31 Von Ardenne Anlagentechnik Gmbh Apparatus for coating substrates in coating chamber with crucible system, has crucible system with unit to transmit power from drive unit to crucible outside drive chamber which is in air-tight state against coating chamber interior

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3316554C1 (en) * 1983-05-06 1984-07-12 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Evaporator device with jet heating for vapor deposition of several materials
US4632059A (en) * 1983-05-06 1986-12-30 Dr. Johannes Heidenhain Gmbh Evaporator device for the evaporation of several materials

Also Published As

Publication number Publication date
JPS4947631B1 (en) 1974-12-17
FR2052572A5 (en) 1971-04-09
US3695217A (en) 1972-10-03
CH553258A (en) 1974-08-30
SE345881B (en) 1972-06-12
DE2029014A1 (en) 1971-01-07
DE2029014C3 (en) 1979-10-04
DE2029014B2 (en) 1972-12-07

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee